Axus Technology

Planarization, polishing, substrate cleaning, and material thinning services and products.

Substrate cleaning equipment, double-side PVA scrub, either standard or customized. Typical applications are post-CMP or polishing, or post-grinding.

Providing standard and custom material polishing, CMP, substrate cleaning, and material thinning equipment. Typical tools are IPEC472, Strasbaugh 6DS-SP, OnTrak DSS200 cleaning, and wafer-grinding tools.

Axus Technology maintains a fully equiped process development and foundry center for substrate planarizaton and polishing, as well as for substrate thinning applications.

Website

7001 W. Erie St., Suite 1
Chandler, AZ 85226 USA
480-705-8000