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Home > Directory > Tools and instruments > Epion Corporation

Epion Corporation

Today's nanotechnologies require precise control of material properties and structure at the atomic level. Epion Corporation is the world's foremost supplier of commercial Gas Cluster Ion Beam (GCIB) equipment for manufacturing of semiconductors and other microdevices. GCIB is a highly versatile atomic-scale processing technique which is able to produce important surface modification effects that are not possible using any other existing methods.

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