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Elionix, Inc.

Elionix, Inc. was started in March, 1975. The scope of its business is in the research and development, design, and manufacturing of systems that utilize particle beams; electron, ion, and electromagnetic waves that include light and x-ray. Over the years, Elionix has manufactured more than 300 electron beam lithography systems and maintains the largest market share in Japan. Recent expansions into North America and the Pacific Rim countries have helped Elionix to increase its market share, and become known world wide for its excellence in scientific instrumentation dedicated to nanotechnology.


6 Executive Park Drive
Billerica, MA USA
978-663-9822 x235

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