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OAI
OAI designs and manufactures precision lithography equipment for Nanotechnology, MEMS, Microfluidic industries. Products include UV exposure systems, front and back side mask aligners, nanoimprint tolls, microfluidic process and equipment, and UV Ozone surface treatment for surface modification. OAI maintains field service and engineering worldwide.
685 RIVER OAKS PARKWAY
San Jose, CA 95134 USA
408-232-0600
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