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Eulitha AG

Eulitha manufactures large-area periodic nanostructures with uniquely high resolution and quality. The resolution (half-pitch) of the structures is below 20 nm and the patterns are free of defects such as stitching errors found in e-beam made ones. Eulitha provides one-dimensional linear gratings and two-dimensional dot arrays or grids.

The production of Eulitha is based on its record-breaking Extreme Ultraviolet Interference lithography technology. Our technology holds the record for high-resolution photolithography with a half-pitch of only 11 nm.


Eulitha AG
Villigen PSI 5232 Switzerland
41 56 310 4279

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