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Axus Technology
Planarization, polishing, substrate cleaning, and material thinning services and products.
Substrate cleaning equipment, double-side PVA scrub, either standard or customized. Typical applications are post-CMP or polishing, or post-grinding.
Providing standard and custom material polishing, CMP, substrate cleaning, and material thinning equipment. Typical tools are IPEC472, Strasbaugh 6DS-SP, OnTrak DSS200 cleaning, and wafer-grinding tools.
Axus Technology maintains a fully equiped process development and foundry center for substrate planarizaton and polishing, as well as for substrate thinning applications.
7001 W. Erie St., Suite 1
Chandler, AZ 85226 USA
480-705-8000
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