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Home > Press > Oxford Instruments Plasma Technology Releases PTIQ: Intelligent Control Software for Plasma and Ion beam Processing Equipment

Abstract:
Oxford Instruments Plasma Technology, a leading provider of plasma and ion beam processing equipment has today launched PTIQ, a new range of control software for their leading-edge plasma processing systems.

Oxford Instruments Plasma Technology Releases PTIQ: Intelligent Control Software for Plasma and Ion beam Processing Equipment

Abingdon, UK | Posted on July 9th, 2020

Frazer Anderson, Innovation and Solutions Director, Plasma Technology, comments: “The PTIQ software has been designed to deliver an exceptional level of responsive system control, reliability and repeatability for our customers. It will optimise their process performance whether that be in the Lab or Fab. We recognise our R&D and high-volume manufacturing (HVM) customers have distinct requirements, and PTIQ caters for that with different levels of software.”

Frazer continues: “PTIQ is SEMI E95 compliant to facilitate rapid, error free process setup and provides automated daily, weekly and monthly checks to optimise uptime which is paramount for our HVM customers. It also assists enhanced yield through fingerprinting and chamber matching and features a flexible batch scheduler allowing throughput optimisation. It is customisable for error free, multiuser operation in any cleanroom environment which we know will be of great benefit to our customers at research facilities. We have also included a recipe editor that matches Oxford Instruments process datasheets for easy, error free transfer of recipes.

The revolutionary software is now available on new system purchases, and as an upgrade for existing customers with PlasmaPro® or Plasmalab® systems.

Dean Furlong, Customer Service Director, Plasma Technology states: “Our systems have a long lifetime, and we want our existing customers to benefit from this new software to optimise operational and process performance with their existing equipment. The upgrade options are available immediately for PlasmaPro and Plasmalab systems, including the ability to transfer recipes.”

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About Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for 60 years, supporting its core purpose to address some of the world’s most pressing challenges.

The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the FTSE250 index of the London Stock Exchange (OXIG). Its strategy focuses on being a customer-centric, market-focused Group, understanding the technical and commercial challenges faced by its customers. Key market segments include Semiconductor & Communications, Advanced Materials, Healthcare & Life Science, and Quantum Technology.

Their portfolio includes a range of core technologies in areas such as low temperature and high magnetic field environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; and advanced growth, deposition and etching.

Oxford Instruments is helping enable a greener economy, increased connectivity, improved health and leaps in scientific understanding. Their advanced products and services allow the world’s leading industrial companies and scientific research communities to image, analyse and manipulate materials down to the atomic and molecular level, helping to accelerate R&D, increase manufacturing productivity and make ground-breaking discoveries.

For more information, please click here

Contacts:
Claire Critchell, Marketing Communications Manager

Oxford Instruments Plasma Technology

E: | T: +44 (0)1934 837053

Copyright © Oxford Instruments Plasma Technology

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