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Home > Press > Oxford Instruments Supplies HLJ Technology Co. Ltd., with Plasma Etch and Deposition Solutions for the fabrication of VCSELS on 6 inch wafers

Abstract:
Oxford Instruments Plasma Technology, a leading supplier of plasma etch and deposition optoelectronics solutions to laser fabrication market announced that HLJ Technology Co. Ltd., based in Hsin Chu, Taiwan has selected multiple Oxford Instruments Inductively Coupled Plasma (ICP) etch and Plasma Enhanced Chemical Vapour Deposition (PECVD) systems on cluster platforms for the production of 6-inch VCSEL wafers.

Oxford Instruments Supplies HLJ Technology Co. Ltd., with Plasma Etch and Deposition Solutions for the fabrication of VCSELS on 6 inch wafers

Yatton, UK | Posted on October 3rd, 2019

HLJ is a pioneer of VCSEL production in Taiwan with an outstanding international reputation. Recently, HLJ had built a mass production line for 6-inch VCSEL wafers to enhance efficiency, and expedite greater control of production lead-times, capacity and quality. The in-house line integrated epitaxial structure design, growth, wafer processes and reliability tests. HLJ is committed to providing one-stop VCSEL devices shopping services for global users.

Dr. Lai GM of HLJ comments: “We chose Oxford Instruments to supply our ICP etch and PECVD systems because they offer cutting edge plasma processing solutions and unrivalled process support, which will be invaluable to us.”

The Cobra ICP and PECVD process solutions are designed to support leading edge device fabrication such as VCSELs.

Dr Ian Barkshire, CEO of Oxford Instruments commented: “We are delighted that HLJ has chosen multiple Oxford Instruments systems for the production of high technology VCSEL devices. We continue to strengthen our position as a solution provider for compound semiconductors, including the VCSEL market. This partnership reinforces our commitment to enhance market-leading production capabilities “.



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About Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

For more information, please click here

Contacts:
laire Critchell
Marketing Communications Manager



Oxford Instruments Plasma Technology

North End, Yatton, Bristol, BS49 4AP, UK

+44 (0) 1934 837053

plasma.oxinst.com

Copyright © Oxford Instruments Plasma Technology

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