Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Chemnitz and Jena (Germany) Fraunhofer ENAS orders a Variable Shaped Beam Lithography System from Vistec Electron Beam for Advanced Research

Abstract:
Vistec Electron Beam GmbH, a leading supplier of electron-beam lithography systems, announced that Fraunhofer ENAS in Chemnitz has purchased a Variable Shaped Beam system Vistec SB254. The Fraunhofer Institute for Electronic Nano Systems ENAS, a leading research center within Germany's Fraunhofer-Gesellschaft, will utilize the new electron-beam lithography system for their micro and nano technologies in a wide range of applications.

Chemnitz and Jena (Germany) Fraunhofer ENAS orders a Variable Shaped Beam Lithography System from Vistec Electron Beam for Advanced Research

Jena, Germany | Posted on February 25th, 2014

The Fraunhofer ENAS owns an excellent technological know-how in the field of smart systems integration, micro and nano systems and micro and nano electronics. The core competencies comprise design, development, test and evaluation of reliability of components and systems, interconnect technologies as well as system integration. "The new electron-beam lithography system was chosen due to its operational flexibility and capacity to handle a large variety of different materials, high performance accuracy combined with a top level of automation. These features are essential to fulfill the requirements of our customers and partners in research and industry.", states Professor Dr. Thomas Gessner, Director of Fraunhofer ENAS.

The Fraunhofer ENAS purchase decision has been based on the result of an European tendering procedure including an intensive evaluation.

The Vistec SB254 is a high performance, cost-effective and universal electron-beam lithography system, enabling the usage for both direct write and mask making for a large variety of applications in industry and applied research.

The system is capable of handling and exposing transparent and non-transparent materials which are widely used in semiconductor and optical applications. Equipped with 50 kV Variable Shaped Beam electron optics, an address grid of 1 nm and an exposure platform with a stage travel range of 210 mm x 210 mm this system enables lithography below 20nm on various substrates from pieces up to 200 mm wafers and 7 inch masks.

As an optional feature, Cell Projection is also available. A Graphical User Interface (GUI) and fully automated cassette-to-cassette substrate handling, including substrate pre-alignment, allow the effective usage in an environment with consistently changing requirements. Furthermore the system features the data preparation software package ePLACE (provided by EQUIcon Software GmbH).

"We are very pleased, that Fraunhofer ENAS placed the order with Vistec. The installation of the new Vistec SB254 constitutes a new level of collaboration which started more than 20 years ago." comments Wolfgang Dorl, General Manager of Vistec Electron Beam.

####

About Vistec Electron Beam GmbH
Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research such as silicon direct write, compound semiconductor, mask making, integrated optics and several new emerging markets.
The company is located in Jena, Germany. In addition to its production facility in Germany, Vistec Electron Beam maintains service and support centers in Europe and Taiwan.

About Fraunhofer ENAS

The product and service portfolio of the Fraunhofer Institute for Electronic Nano Systems ENAS covers high-precision sensors for industrial applications, sensor and actuator systems with control units and evaluation electronics, printed functionalities like antennas and batteries as well as material and reliability research for microelectronics and micro system technology. The development, the design and the test of MEMS/NEMS, methods and technologies for their encapsulation and integration with electronics as well as micro and nano electronics and 3D integration are especially in the focus of the work. Application areas are semiconductor industry, medical engineering, mechanical engineering, automotive industry, logistics as well as aeronautics.

For more information, please click here

Contacts:
Dr. Martina Vogel
Fraunhofer ENAS
Officer of the executive director and manager marketing / PR
Technologie-Campus 3
09126 Chemnitz (Germany)
Phone: +49(0) 371 45001 203
Fax: +49(0) 371 45001 303

http://www.enas.fraunhofer.de/

Ines Stolberg
Vistec Electron Beam GmbH
Manager Strategic Marketing
Ilmstr. 4
D-07743 Jena (Germany)
Tel.: +49(0)3641/7998 155
Fax: +49(0)3641/7998 222

www.vistec-semi.com

PR Agency
Tower PR
Leutragraben 1
D-07743 Jena (Germany)
Tel.: +49(0)3641/8761182

www.tower-pr.com

Copyright © Vistec Electron Beam GmbH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Non-Enzyme Sensor Determines Level of Blood Sugar July 29th, 2015

Flexible Future of Point-of-Care Disease Diagnostic July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Chip Technology

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

Announcements

Non-Enzyme Sensor Determines Level of Blood Sugar July 29th, 2015

Flexible Future of Point-of-Care Disease Diagnostic July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Detecting small metallic contaminants in food via magnetization: A practical metallic-contaminant detecting system using three high-Tc RF superconducting quantum interference devices (SQUIDs) July 29th, 2015

Tools

Publication on Atomic Force Microscopy based nanoscale IR Spectroscopy (AFM-IR) persists as a 2015 top downloaded paper July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

New-Contracts/Sales/Customers

Liquipel Debuts Eyesight-Saving ION-Glass Blue Light Protection for iPhones and Androids at RadioShack Stores Nationwide: Liquipel's Unique Protective Screen, Available at RadioShack, Cuts Harmful Blue Light Implicated in Macular Degeneration by 10x July 28th, 2015

Dais Analytic's Business Affiliate in China Announces Ten-Year Strategic Energy Efficiency Business Arrangement With COFCO: Dais Beijing to Perform Feasibility Study on Over 80 Buildings to Improve Efficiencies as Part of Overall Hotel Energy-Savings Project July 23rd, 2015

Renishaw adds Raman analysis to Scanning Electron Microscopy at the University of Sydney, Australia July 9th, 2015

Oxford Instrumentsí TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project