Home > Press > Bruker Joins SEMATECH to Advance Development of Semiconductor Defect Inspection Capabilities: Collaboration to address measurement challenges of next generation devices and improve nanoscale characterization of materials for advanced nodes
Abstract:
SEMATECH, the global consortium of chipmakers, announced today that Bruker Nano Surfaces, a division of Bruker Corporation, has joined SEMATECH to develop new semiconductor defect characterization solutions for advanced materials development. The collaboration will generate the first-ever detailed information database that allows Bruker's patented PeakForce QNM® mechanical force data to be correlated to nano-particle materials.
As a member, Bruker will collaborate with metrology experts at SEMATECH to develop high-resolution atomic force microscope (AFM) based defect analysis capabilities, linked to material data provided by transmission electron microscopy (TEM) analysis with advanced energy dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). These techniques will provide the high resolution imaging and compositional data on the scale of a few nanometers, which is invaluable for in-line defect analysis.
"SEMATECH will be able to maximize the capability of high resolution imaging and analytical data output for next generation semiconductor devices with Brukers unique quantitative nanomechanical data based on PeakForce Tapping technology," said Mark R. Munch, Ph.D., President, Bruker MAT Group and Bruker Nano Surfaces Division. "Partnering with SEMATECH will enable us to provide detailed information about mechanical properties that can be combined with, atomic arrangement, chemical bonding, density, and electronic behavior on a nanometer scale. The result is a much more complete profile of each material than would have been possible without AFM."
"SEMATECH's Metrology program is a prime example of SEMATECH's collaborative model in which leading equipment and materials manufacturers can participate in a broader consortium-university-industry partnership to develop cutting-edge metrology and characterization techniques," said Michael Lercel, SEMATECH senior director of Nanodefectivity and Metrology. "The collaborative effort among world-class researchers and engineers from Bruker and SEMATECH, along with access to critical analytical equipment, form an important cornerstone in providing world-leading advanced metrology capabilities to our members."
The semiconductor industry lacks a long-term solution that combines defect sensitivity and throughput requirements at development, ramp-up, or high-volume manufacturing phases. With defect inspection and review approaching their fundamental limits, SEMATECH is working with leading suppliers to develop faster sample preparation techniques, by both optimizing existing technologies, testing novel methods and developing new characterization technologies that will address current and projected metrology gaps.
####
About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech
About Bruker
Bruker Corporation (NASDAQ: BRKR) is a leading provider of high performance scientific instruments and solutions for molecular and materials research, as well as diagnostics, industrial, clinical and applied analysis. . For more information, please visit www.bruker.com.
For more information, please click here
Contacts:
Erica McGill
SEMATECH
O: 518-649-1041
Copyright © SEMATECH
If you have a comment, please Contact us.Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Related News Press |
News and information
Simulating magnetization in a Heisenberg quantum spin chain April 5th, 2024
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Imaging
Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024
The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023
Observation of left and right at nanoscale with optical force October 6th, 2023
Chip Technology
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024
HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024
Announcements
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Tools
Ferroelectrically modulate the Fermi level of graphene oxide to enhance SERS response November 3rd, 2023
The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023
Alliances/Trade associations/Partnerships/Distributorships
Chicago Quantum Exchange welcomes six new partners highlighting quantum technology solutions, from Chicago and beyond September 23rd, 2022
University of Illinois Chicago joins Brookhaven Lab's Quantum Center June 10th, 2022
Research partnerships
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Researchers’ approach may protect quantum computers from attacks March 8th, 2024
'Sudden death' of quantum fluctuations defies current theories of superconductivity: Study challenges the conventional wisdom of superconducting quantum transitions January 12th, 2024
The latest news from around the world, FREE | ||
Premium Products | ||
Only the news you want to read!
Learn More |
||
Full-service, expert consulting
Learn More |
||