Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Bruker Joins SEMATECH to Advance Development of Semiconductor Defect Inspection Capabilities: Collaboration to address measurement challenges of next generation devices and improve nanoscale characterization of materials for advanced nodes

Abstract:
SEMATECH, the global consortium of chipmakers, announced today that Bruker Nano Surfaces, a division of Bruker Corporation, has joined SEMATECH to develop new semiconductor defect characterization solutions for advanced materials development. The collaboration will generate the first-ever detailed information database that allows Bruker's patented PeakForce QNM® mechanical force data to be correlated to nano-particle materials.

Bruker Joins SEMATECH to Advance Development of Semiconductor Defect Inspection Capabilities: Collaboration to address measurement challenges of next generation devices and improve nanoscale characterization of materials for advanced nodes

Albany, NY | Posted on October 3rd, 2013

As a member, Bruker will collaborate with metrology experts at SEMATECH to develop high-resolution atomic force microscope (AFM) based defect analysis capabilities, linked to material data provided by transmission electron microscopy (TEM) analysis with advanced energy dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). These techniques will provide the high resolution imaging and compositional data on the scale of a few nanometers, which is invaluable for in-line defect analysis.

"SEMATECH will be able to maximize the capability of high resolution imaging and analytical data output for next generation semiconductor devices with Brukers unique quantitative nanomechanical data based on PeakForce Tapping technology," said Mark R. Munch, Ph.D., President, Bruker MAT Group and Bruker Nano Surfaces Division. "Partnering with SEMATECH will enable us to provide detailed information about mechanical properties that can be combined with, atomic arrangement, chemical bonding, density, and electronic behavior on a nanometer scale. The result is a much more complete profile of each material than would have been possible without AFM."

"SEMATECH's Metrology program is a prime example of SEMATECH's collaborative model in which leading equipment and materials manufacturers can participate in a broader consortium-university-industry partnership to develop cutting-edge metrology and characterization techniques," said Michael Lercel, SEMATECH senior director of Nanodefectivity and Metrology. "The collaborative effort among world-class researchers and engineers from Bruker and SEMATECH, along with access to critical analytical equipment, form an important cornerstone in providing world-leading advanced metrology capabilities to our members."

The semiconductor industry lacks a long-term solution that combines defect sensitivity and throughput requirements at development, ramp-up, or high-volume manufacturing phases. With defect inspection and review approaching their fundamental limits, SEMATECH is working with leading suppliers to develop faster sample preparation techniques, by both optimizing existing technologies, testing novel methods and developing new characterization technologies that will address current and projected metrology gaps.

####

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About Bruker

Bruker Corporation (NASDAQ: BRKR) is a leading provider of high performance scientific instruments and solutions for molecular and materials research, as well as diagnostics, industrial, clinical and applied analysis. . For more information, please visit www.bruker.com.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
O: 518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

ANU invention to inspire new night-vision specs December 7th, 2016

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

Journal Nanotechnology Progress International (JONPI), newest edition out December 7th, 2016

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

Imaging

Deep insights from surface reactions: Researchers use Stampede supercomputer to study new chemical sensing methods, desalination and bacterial energy production December 2nd, 2016

Controlled electron pulses November 30th, 2016

Novel silicon etching technique crafts 3-D gradient refractive index micro-optics November 28th, 2016

Scientists shrink electron gun to matchbox size: Terahertz technology has the potential to enable new applications November 25th, 2016

Chip Technology

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Tokyo Institute of Technology research: 3D solutions to energy savings in silicon power transistors December 6th, 2016

Physicists decipher electronic properties of materials in work that may change transistors December 6th, 2016

Construction of practical quantum computers radically simplified: Scientists invent ground-breaking new method that puts quantum computers within reach December 5th, 2016

Announcements

ANU invention to inspire new night-vision specs December 7th, 2016

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

Journal Nanotechnology Progress International (JONPI), newest edition out December 7th, 2016

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

Tools

Deep insights from surface reactions: Researchers use Stampede supercomputer to study new chemical sensing methods, desalination and bacterial energy production December 2nd, 2016

Controlled electron pulses November 30th, 2016

Scientists shrink electron gun to matchbox size: Terahertz technology has the potential to enable new applications November 25th, 2016

News from Quorum: The Agricultural Research Service of the USDA uses a Quorum Cryo-SEM preparation system for the study of mites, ticks and other soft bodied organisms November 22nd, 2016

Alliances/Trade associations/Partnerships/Distributorships

Infrared instrumentation leader secures exclusive use of Vantablack coating December 5th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Mechanism for sodium storage in 2-D material: Tin selenide is an effective host for storing sodium ions, making it a promising material for sodium ion batteries October 27th, 2016

Enterprise In Space Partners with Sketchfab and 3D Hubs for NewSpace Education October 13th, 2016

Research partnerships

Deep insights from surface reactions: Researchers use Stampede supercomputer to study new chemical sensing methods, desalination and bacterial energy production December 2nd, 2016

Quantum obstacle course changes material from superconductor to insulator December 1st, 2016

Novel silicon etching technique crafts 3-D gradient refractive index micro-optics November 28th, 2016

Single photon converter -- a key component of quantum internet November 28th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project