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Home > Press > Bruker Joins SEMATECH to Advance Development of Semiconductor Defect Inspection Capabilities: Collaboration to address measurement challenges of next generation devices and improve nanoscale characterization of materials for advanced nodes

Abstract:
SEMATECH, the global consortium of chipmakers, announced today that Bruker Nano Surfaces, a division of Bruker Corporation, has joined SEMATECH to develop new semiconductor defect characterization solutions for advanced materials development. The collaboration will generate the first-ever detailed information database that allows Bruker's patented PeakForce QNM® mechanical force data to be correlated to nano-particle materials.

Bruker Joins SEMATECH to Advance Development of Semiconductor Defect Inspection Capabilities: Collaboration to address measurement challenges of next generation devices and improve nanoscale characterization of materials for advanced nodes

Albany, NY | Posted on October 3rd, 2013

As a member, Bruker will collaborate with metrology experts at SEMATECH to develop high-resolution atomic force microscope (AFM) based defect analysis capabilities, linked to material data provided by transmission electron microscopy (TEM) analysis with advanced energy dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). These techniques will provide the high resolution imaging and compositional data on the scale of a few nanometers, which is invaluable for in-line defect analysis.

"SEMATECH will be able to maximize the capability of high resolution imaging and analytical data output for next generation semiconductor devices with Brukers unique quantitative nanomechanical data based on PeakForce Tapping technology," said Mark R. Munch, Ph.D., President, Bruker MAT Group and Bruker Nano Surfaces Division. "Partnering with SEMATECH will enable us to provide detailed information about mechanical properties that can be combined with, atomic arrangement, chemical bonding, density, and electronic behavior on a nanometer scale. The result is a much more complete profile of each material than would have been possible without AFM."

"SEMATECH's Metrology program is a prime example of SEMATECH's collaborative model in which leading equipment and materials manufacturers can participate in a broader consortium-university-industry partnership to develop cutting-edge metrology and characterization techniques," said Michael Lercel, SEMATECH senior director of Nanodefectivity and Metrology. "The collaborative effort among world-class researchers and engineers from Bruker and SEMATECH, along with access to critical analytical equipment, form an important cornerstone in providing world-leading advanced metrology capabilities to our members."

The semiconductor industry lacks a long-term solution that combines defect sensitivity and throughput requirements at development, ramp-up, or high-volume manufacturing phases. With defect inspection and review approaching their fundamental limits, SEMATECH is working with leading suppliers to develop faster sample preparation techniques, by both optimizing existing technologies, testing novel methods and developing new characterization technologies that will address current and projected metrology gaps.

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About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About Bruker

Bruker Corporation (NASDAQ: BRKR) is a leading provider of high performance scientific instruments and solutions for molecular and materials research, as well as diagnostics, industrial, clinical and applied analysis. . For more information, please visit www.bruker.com.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
O: 518-649-1041

Copyright © SEMATECH

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