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Home > Press > SEMATECH Provides Technical Guidance on Global Greenhouse Emissions Reductions to Semiconductor Manufacturers: Project focused on compliance challenges, technical implications and impacts of U.S. EPA Greenhouse Gas Regulation on semiconductor manufacturing
In a concerted effort to reduce emissions of global warming agents, SEMATECH has evaluated and demonstrated efficient ways for semiconductor manufacturers to more accurately estimate semiconductor greenhouse gas emissions. Additionally, these efforts support a comprehensive technical compliance strategy for the U.S. Environmental Protection Agency (EPA) greenhouse gas reporting rule that offers reasonable, workable options for measuring and reporting emissions for the semiconductor industry. SEMATECH's Environment, Safety and Health (ESH) work represents the most complete study on greenhouse gas (GHG) emissions from semiconductor manufacturers.
To reduce the emissions of GHGs that can intensify climate change, the U.S. EPA initiated the Mandatory Reporting of Greenhouse Gases Rule (74 FR 56260) which requires reporting of GHG emissions in the United States. The Semiconductor Industry Association (SIA) has led multi-year effort to pursue reasonable reporting methods for GHG emissions for U.S. semiconductor fabs.
SEMATECH's ESH Technology Center GHG project was prompted by industry concerns, coupled with a continuing commitment to support the SIA and development of an electronics industry greenhouse gas reporting rule that is technically feasible and cost effective to implement.
As a continuation of GHG emissions reporting efforts that began in 2009, SEMATECH has worked with member companies and industry suppliers to fill emission data gaps and develop alternatives to accurately estimate process greenhouse gas emissions. The data, compiled by SEMATECH's ESH Technology Center, resulted in development of default emission factors for semiconductor etch processes in lieu of recipe-specific testing and destruction/removal efficiencies for fluorinated greenhouse gas abatement devices, as well as allowance of a stack test alternative to estimate emissions.
"Prior to this effort, there was a lack of emissions characterization data for certain semiconductor processes throughout the industry," said Laurie Beu, ESH Technology Center technologist. "Partnership between device makers and suppliers is critical in order to ensure robust emissions estimates and meet the regulatory requirements. SEMATECH fosters this cooperation and information sharing to address the technical challenges associated with reporting and reducing process GHG emissions."
Addressing the challenges of climate change has been part of SEMATECH's ESH efforts since 1994, when the program completed the industry's first comprehensive reports on Perfluorocompound (PFC) State-of-Technology. Since then the program has published 54 reports and dozens of presentations that collectively help semiconductor manufacturers track and reduce semiconductor process GHG emissions. These include:
· PFC test plan templates and environmental characterization guidelines
· PFC abatement, recycle, alternative chemistry and process optimization evaluations
· Providing technical data in response to EPA proposed Subpart I reporting rule and publishing a report in 2011 that quantified the impact of final Subpart I rule
· Reports addressing F-GHG issues (etch emission factors, stack test alternative, abatement, gas use apportioning, test methods)
· Data collection that led to the development of robust etch process default emission factors
SEMATECH provides industry leadership through the ESH Technology Center, focusing on sustainability and green initiatives, addressing regulatory issues, and resource conservation in manufacturing operations. The ESH Technology Center has launched several initiatives to expand conservation activities among its members and the industry. These include:
· Monitor and evaluate ESH regulatory impacts and developing solutions
· Identify and demonstrate new and emerging approaches for resource conservation in semiconductor manufacturing
· Develop ESH applications for use in both current and future fabs
· Identify and delineate unique ESH requirements and solutions for the leading-edge semiconductor manufacturing processes and facilities
· Collaborate with a broad network of companies, consortia, universities, national laboratories, and associations from around the world to develop solutions for manufacturing and ESH technology challenges
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org.
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