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Home > Press > Aerotech X-Y Linear Motor Stage for applications where exceptional straightness and flatness of motion are critical

New PlanarDL X-Y linear motor stage from Aerotech provides industry-leading straightness and flatness coupled with high speed.
New PlanarDL X-Y linear motor stage from Aerotech provides industry-leading straightness and flatness coupled with high speed.

Abstract:
Aerotech (www.aerotech.com) has introduced a new X-Y linear motor stage with industry-leading geometric and dynamic performance for applications where straightness and flatness are critical, the company reports. The Planar DL series includes nine different travel and performance configurations to support such diverse uses as surface profilometry and high-speed scribing of semiconductor and LED wafers.

Aerotech X-Y Linear Motor Stage for applications where exceptional straightness and flatness of motion are critical

Stone Ridge, NY | Posted on September 23rd, 2013

With anti-creep crossed-roller bearings, precision-machined surfaces and linear motors driving through the axes' center-of-stiffness, the stages deliver straightness to ±0.4 µm and flatness to ±1 µm. Structural elements are optimized for high dynamics and stiffness.

Applications include: • Semiconductor manufacturing • Electronics manufacturing (LEDs) • Test & Inspection • Laser Processing • Metals inspection • Micro-machining • Nanotechnology • Medical • Laboratory

The stages achieve 1 m/s velocity and 1.5 g acceleration, enabling high throughput, high-accuracy processing and low total cost of ownership. Aerotech's proprietary direct-drive technology assures long, maintenance-free working life.

High-performance options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.

Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.

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For more information, please click here

Contacts:
Product Sales Contacts:
Australia
Lastek PTY Ltd
Phone: (61-8) 8443 8668
Fax: (61-8) 8443 8427

www.aerotech.com

CHINA
AEROTECH CHINA
Phone: +852 3793 3488

www.aerotech.com

TAIWAN
AEROTECH TAIWAN
William Yeh
Phone: (886) 2-8502-6651

www.aerotech.com

INDIA
LIBERTY INTERNATIONAL
Phone: +91 079-2692-6360
FAX: +91 079-2692-6380

www.aerotech.com

JAPAN
AEROTECH KK
Tadashi Imai
Phone: +81(0)47-489-1741
Fax: +81(0)47-489-1743

www.aerotech.com

MALAYSIA
Plant & Mill Motion Control Sdn Bhd
Phone: (604) 645 1861
Fax: (604) 644 8543

www.aerotech.com

SINGAPORE
Plant & Mill Supplies Pte Ltd
Singapore Office
Phone: (65) 6542 4211
Fax: (65) 6542 1318

www.aerotech.com

THAILAND
PMC Technology Co.
Phone: (662) 667 4501
Fax: (604) 667 4506

www.aerotech.com

Copyright © Aerotech

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