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|New PlanarDL X-Y linear motor stage from Aerotech provides industry-leading straightness and flatness coupled with high speed.|
Aerotech (www.aerotech.com) has introduced a new X-Y linear motor stage with industry-leading geometric and dynamic performance for applications where straightness and flatness are critical, the company reports. The Planar DL series includes nine different travel and performance configurations to support such diverse uses as surface profilometry and high-speed scribing of semiconductor and LED wafers.
With anti-creep crossed-roller bearings, precision-machined surfaces and linear motors driving through the axes' center-of-stiffness, the stages deliver straightness to ±0.4 µm and flatness to ±1 µm. Structural elements are optimized for high dynamics and stiffness.
Applications include: • Semiconductor manufacturing • Electronics manufacturing (LEDs) • Test & Inspection • Laser Processing • Metals inspection • Micro-machining • Nanotechnology • Medical • Laboratory
The stages achieve 1 m/s velocity and 1.5 g acceleration, enabling high throughput, high-accuracy processing and low total cost of ownership. Aerotech's proprietary direct-drive technology assures long, maintenance-free working life.
High-performance options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.
Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.
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Product Sales Contacts:
Lastek PTY Ltd
Phone: (61-8) 8443 8668
Fax: (61-8) 8443 8427
Phone: +852 3793 3488
Phone: (886) 2-8502-6651
Phone: +91 079-2692-6360
FAX: +91 079-2692-6380
Plant & Mill Motion Control Sdn Bhd
Phone: (604) 645 1861
Fax: (604) 644 8543
Plant & Mill Supplies Pte Ltd
Phone: (65) 6542 4211
Fax: (65) 6542 1318
PMC Technology Co.
Phone: (662) 667 4501
Fax: (604) 667 4506
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