Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > IMS Nanofabrication Announces Partnership with JEOL for the Realization of Alpha and Beta Electron Multi-Beam Mask Writer (MBMW) Tools

Abstract:
IMS Nanofabrication AG (IMS) (www.ims.co.at) announced today that a partnership was formed with JEOL Ltd. (www.jeol.co.jp/en/) for the realization of Alpha and Beta electron multi-beam mask writer (MBMW) tools for the 10nm half-pitch mask technology node. For this purpose IMS Nanofabrication has developed and demonstrated a multi-beam write engine providing 262-thousand programmable beams of 50keV energy. JEOL provides a novel platform with an air-bearing vacuum stage for writing most advanced patterns on 6-inch mask blanks. The MBMW Alpha tool will be realized in 2014, and will form the basis for two consecutive MBMW Beta tools which will be built for the MBMW Collaboration formed by IMS with DNP, Intel, Photronics and TSMC.

IMS Nanofabrication Announces Partnership with JEOL for the Realization of Alpha and Beta Electron Multi-Beam Mask Writer (MBMW) Tools

Vienna, Austria | Posted on September 6th, 2013

"We are very pleased with this partnership, as it will ensure timely completion of the Alpha and Beta tools, paving the way towards the production of HVM tools", said Elmar Platzgummer, CEO of IMS Nanofabrication.

"This partnership reinforces JEOL's position in the leading-edge mask writer market with a highly competitive technology. JEOL is proud to contribute a newly developed multi-generational platform with an air-bearing stage as a vital part of the tool", said Yasutoshi Nakagawa, Corporate Officer, General Manager of SE Business Unit, JEOL Ltd.

####

About IMS Nanofabrication AG
IMS Nanofabrication AG (“IMS”) is an Austrian based high-tech company that was founded in December 2006 through the merger of the former IMS Nanofabrication GmbH and IMS - Ionen Mikrofabrikations Systeme GmbH. Based on its extensive know-how in charged particle systems, IMS offers solutions to directly transfer custom designed patterns to resist or to generate resist-less two and three dimensional surface modifications with features below 20 nanometers. IMS focuses its efforts on the development and production of key tool components for mask writing and direct write lithography applications. It plans to commercialize its technology and related services in cooperation with strategic investors and partners involved in the mask and lithography ecosystem. For more information on IMS Nanofabrication AG, visit: www.ims.co.at

About JEOL

JEOL Ltd. is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscope s (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs. For more information on JEOL Ltd., visit: www.jeol.co.jp/en/

For more information, please click here

Contacts:
IMS Nanofabrication AG
Dr. Hans Loeschner
VP Technical Marketing
phone: +43 1 2144894 24
mobile: +43 699 123 67 223


JEOL Ltd.
Hirokazu Yamada
Semiconductor Equipment Sales Dept.
phone: +81-42-528-3491
fax: +81-42-528-3488

Copyright © Business Wire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

'Exotic' material is like a switch when super thin April 18th, 2014

Innovative strategy to facilitate organ repair April 18th, 2014

Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014

Conductive Inks: booming to $2.8 billion by 2024 April 17th, 2014

Chip Technology

'Exotic' material is like a switch when super thin April 18th, 2014

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Obducat has launched a new generation of SINDRE® Nano Imprint production system April 11th, 2014

Scientists in Singapore develop novel ultra-fast electrical circuits using light-generated tunneling currents April 10th, 2014

Announcements

'Exotic' material is like a switch when super thin April 18th, 2014

Innovative strategy to facilitate organ repair April 18th, 2014

Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Alliances/Partnerships/Distributorships

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Peer Reviewed and Approved for Science by the the Washington Academy of Sciences April 3rd, 2014

New JEOL-Nikon MiXcroscopy Correlative Imaging Solution March 27th, 2014

Quantum Dots Take Center Stage at Inaugural Event: QD Vision Co-Founder and CTO Dr. Seth Coe-Sullivan to Chair First Quantum Dots Forum, March 26, 2014, San Diego, CA March 25th, 2014

Research partnerships

Novel stapled peptide nanoparticle combination prevents RSV infection, study finds April 17th, 2014

Scientists Capture Ultrafast Snapshots of Light-Driven Superconductivity: X-rays reveal how rapidly vanishing 'charge stripes' may be behind laser-induced high-temperature superconductivity April 16th, 2014

Scalable CVD process for making 2-D molybdenum diselenide: Rice, NTU scientists unveil CVD production for coveted 2-D semiconductor April 8th, 2014

Carbon nanotubes grow in combustion flames April 1st, 2014

Printing/Lithography/Inkjet

Conductive Inks: booming to $2.8 billion by 2024 April 17th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Obducat has launched a new generation of SINDRE® Nano Imprint production system April 11th, 2014

Printed Electronics Europe - Plastic Logic shows a flexible OLED display for wearable devices April 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE