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Home > Press > SK hynix Semiconductor Ramps Nanometrics' Atlas(R) II OCD Metrology System: NanoDiffract Enables In-Line Critical Dimension Metrology for Key Device Control

Abstract:
Nanometrics Incorporated (Nasdaq:NANO), a leading provider of advanced process control metrology and inspection systems, today announced that SK hynix has realized significant process control improvement by deploying the Atlas® II platform for optical critical dimension (OCD) metrology across its memory device production.

SK hynix Semiconductor Ramps Nanometrics' Atlas(R) II OCD Metrology System: NanoDiffract Enables In-Line Critical Dimension Metrology for Key Device Control

Milpitas, CA | Posted on August 12th, 2013

"Nanometrics, with its Atlas II platform, has enabled key yield and performance learning on our DRAM devices," commented a representative of SK hynix. "Nanometrics continues to be a valuable technology supplier to SK hynix and the Atlas II platform plays an important role in the production ramp of our next-generation products."

"We have a close collaboration with SK hynix, and have provided the company metrology solutions across multiple technology generations of memory devices since first introducing our industry-leading NanoDiffract® OCD analysis software," commented S. Mark Borowicz, senior vice president of silicon solutions at Nanometrics. "Our Atlas II system, with its advanced technology for in-line process control, has enabled this important customer to quickly identify and address manufacturing steps that impact device performance, and tune key processes to maintain process stability."

The Atlas II is a high-performance process control system capable of advanced thin film and OCD metrology, leveraging the industry-leading performance of Nanometrics' NanoDiffract software for complex structure metrology.

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About Nanometrics Incorporated
Nanometrics is a leading provider of advanced, high-performance process control metrology and inspection systems used primarily in the fabrication of semiconductors and other solid-state devices, such as data storage components and discretes including high-brightness LEDs and power management components. Nanometrics' automated and integrated metrology systems measure critical dimensions, device structures, overlay registration, topography and various thin film properties, including film thickness as well as optical, electrical and material properties. The company's process control solutions are deployed throughout the fabrication process, from front-end-of-line substrate manufacturing, to high-volume production of semiconductors and other devices, to advanced wafer-scale packaging applications. Nanometrics' systems enable advanced process control for device manufacturers, providing improved device yield at reduced manufacturing cycle time, supporting the accelerated product life cycles in the semiconductor market. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Select Market under the symbol NANO.

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Contacts:
Investor Relations Contact:
Claire McAdams
Headgate Partners LLC
530.265.9899


Company Contact:
Kevin Heidrich
SVP
Marketing & Business Development
408.545.6000 x13211

Copyright © Nanometrics Incorporated

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