Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Meaglow Hollow Cathode Plasma Source to Upgrade Atomic Layer Deposition at Bilkent University

Atomic Layer Deposition (ALD) system converted with a hollow cathode plasma source
Atomic Layer Deposition (ALD) system converted with a hollow cathode plasma source

Abstract:
Meaglow Ltd. (Privately Held) announces the installation of a hollow cathode plasma source for the group of Professor Necmi Biyikli, of the Institute of Materials Science and Nanotechnology, at Bilkent University in Turkey. The plasma source is being used to upgrade their Atomic Layer Deposition (ALD) system by replacing an inductively coupled plasma source. This enhancement will reduce the oxygen contamination in ALD systems and increase the quality of Nitride thin films grown.

Meaglow Hollow Cathode Plasma Source to Upgrade Atomic Layer Deposition at Bilkent University

Thunder Bay, Canada | Posted on July 30th, 2013

"The Bilkent system was easy to retrofit and the Meaglow Plasma source was the perfect solution for their oxygen contamination problem." Says Dr. Butcher, Chief Scientist of Meaglow.

Initial results show a significant reduction of oxygen content in compound Nitride films grown. Results will be presented October 27th-November 1st at the 224th ECS Fall Meeting in San Francisco, CA at an invited talk presented at the symposium on "Atomic Layer Deposition Applications".

Meaglow is now focused on commercializing its hollow cathode plasma technology which also has the advantage of scalability to large deposition areas. Meaglow is seeking additional ALD system owners and suppliers interested in removing the oxygen contamination in their films. The Plasma source can be used to retrofit existing systems or can be integrated with equipment manufacturers. The plasma source can be utilized in a number of different applications including MBE, and LPMOCVD among others. Interested parties should email

####

About Meaglow Ltd.
Meaglow Ltd. produces a new range of epitaxy equipment (migration enhanced afterglow), MBE & MOCVD accessories, and provides specialized semiconductor thin films to research institutes and industry.

For more information, please click here

Contacts:
Meaglow Ltd.
1-807-252-4391

Copyright © Marketwire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

The intermediates in a chemical reaction photographed 'red-handed' Researchers at the UPV/EHU-University of the Basque Country have for the first time succeeded in imaging all the steps in a complex organic reaction and have resolved the mechanisms that explain it May 4th, 2016

New tool allows scientists to visualize 'nanoscale' processes May 4th, 2016

FEI Launches Apreo Industry-Leading Versatile, High-Performance SEM: The Apreo SEM provides high-resolution surface information with excellent contrast, and the flexibility to accommodate a large range of samples, applications and conditions May 4th, 2016

An Experiment Seeks to Make Quantum Physics Visible to the Naked Eye May 3rd, 2016

Thin films

Flipping a chemical switch helps perovskite solar cells beat the heat April 26th, 2016

Thin-film solar cells: How defects appear and disappear in CIGSe cells: Concentration of copper plays a crucial role April 23rd, 2016

Making electronics out of coal: Instead of burning up this complex hydrocarbon, let's make devices from it April 20th, 2016

Atomically thin sensor detects harmful air pollution in the home April 18th, 2016

Announcements

The intermediates in a chemical reaction photographed 'red-handed' Researchers at the UPV/EHU-University of the Basque Country have for the first time succeeded in imaging all the steps in a complex organic reaction and have resolved the mechanisms that explain it May 4th, 2016

New tool allows scientists to visualize 'nanoscale' processes May 4th, 2016

FEI Launches Apreo Industry-Leading Versatile, High-Performance SEM: The Apreo SEM provides high-resolution surface information with excellent contrast, and the flexibility to accommodate a large range of samples, applications and conditions May 4th, 2016

An Experiment Seeks to Make Quantum Physics Visible to the Naked Eye May 3rd, 2016

Tools

The intermediates in a chemical reaction photographed 'red-handed' Researchers at the UPV/EHU-University of the Basque Country have for the first time succeeded in imaging all the steps in a complex organic reaction and have resolved the mechanisms that explain it May 4th, 2016

New tool allows scientists to visualize 'nanoscale' processes May 4th, 2016

FEI Launches Apreo Industry-Leading Versatile, High-Performance SEM: The Apreo SEM provides high-resolution surface information with excellent contrast, and the flexibility to accommodate a large range of samples, applications and conditions May 4th, 2016

Making invisible physics visible: The Jayich Lab has created a new sensor technology that captures nanoscale images with high spatial resolution and sensitivity May 2nd, 2016

New-Contracts/Sales/Customers

Nanometrics Achieves Record 3D-NAND Bookings Quarter: A Record 3D-NAND Bookings Quarter, both in Aggregate and for Each of Three Key Customers March 28th, 2016

Keystone Nano selected by National Cancer Institute to participate in BIO March 23rd, 2016

Heriot-Watt's Institute of Photonics & Quantum Sciences uses the Deben Microtest 2 kN tensile stage to characterise ceramics and engineering plastics January 21st, 2016

Industrial Nanotech, Inc. Begins Supplying One of World's Largest Pulp and Paper Product Companies with Patented Energy Saving and Protective Coatings for Heat Process Equipment January 4th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic