Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SEMATECH and TNO Establish Partnership to Enable Development of Measurement Standards for Semiconductor Component and Material Outgassing: oint research project aims to reduce the effect of outgassing and meet stringent industry requirements

Abstract:
SEMATECH and TNO, an organization for applied scientific research, announced today that they have established a strategic partnership aimed to enable measurement standards for establishing traceability for outgassing rates and leak rate measurement in semiconductor tools and processing.

SEMATECH and TNO Establish Partnership to Enable Development of Measurement Standards for Semiconductor Component and Material Outgassing: oint research project aims to reduce the effect of outgassing and meet stringent industry requirements

Albany, NY and Netherlands | Posted on July 10th, 2013

Semiconductor manufacturers are facing new contamination control and monitoring challenges, including component and materials' outgassing which can introduce a variety of contaminants into semiconductor fabs, impacting many processes. The objective of the project is to develop metrological procedures and guidelines for the measurement of equipment that will help the industry to have recommended practices for comparing measuring and reporting outgassing data. In the course of the project, metrological procedures for the measurement of outgassing and qualification of material will be defined and validated to address nanoscale defectivity. The major gaps in the types of component and material that are currently limiting the performance of the tools due to outgassing resulting in nanosize contamination will be identified.

"Since there is currently no industry standard for quantifying outgassing performance, SEMATECH and TNO have partnered to develop a standardized method for characterizing outgassing rates of components and material for semiconductor processing applications," said Michael Lercel, senior director of Nanodefectivity and Metrology, SEMATECH. "This joint project builds on SEMATECH's proven technical expertise in nanoscale defect detection and characterization and TNO's experience and innovative ability to deliver contamination free solutions to enable equipment solutions that can meet future challenges."

"Collaboration between TNO and SEMATECH combines our respective strengths and expertise in the development of standard test for measuring outgassing and contaminants," said Roland van Vliet, Business Line Manager Semicon at TNO. "We are pleased to have an industry leader in nanodefectivity and characterization of materials as a collaborator, whose considerable research and development network and exposure to industry problems can help us to develop a much needed solution to accelerate the equipment productivity and performance for the industry."

####

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About TNO

TNO is an independent innovation organization. TNO connects people and knowledge to create innovations that sustainably boost the competitive strength of industry and the welfare of society.

TNO’s more than 4000 professionals work on practicable knowledge and solutions for the problems of global scarcity. TNO focuses its efforts on seven themes Including Industrial Innovation : TNO reinforces the innovative strength of industry through innovation in products and processes, with a strong focus on sustainability. www.tno.nl

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Marketing Communications
O: 518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

Chip Technology

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

New method to generate arbitrary optical pulses January 21st, 2015

New signal amplification process set to transform communications, imaging, computing: UC San Diego researchers discover a mechanism to amplify signals in optoelectronic systems that is far more efficient than standard processes January 21st, 2015

Solving an organic semiconductor mystery: Berkeley Lab researchers uncover hidden structures in domain interfaces that hamper performance January 16th, 2015

Announcements

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

Tools

Graphene brings quantum effects to electronic circuits January 22nd, 2015

EnvisioNano: An image contest hosted by the National Nanotechnology Initiative (NNI) January 22nd, 2015

New Molecular Beam Epitaxy deposition equipment at the ICN2 January 22nd, 2015

New method to generate arbitrary optical pulses January 21st, 2015

Alliances/Partnerships/Distributorships

Smart keyboard cleans and powers itself -- and can tell who you are January 21st, 2015

DNA 'glue' could someday be used to build tissues, organs January 14th, 2015

GLOBALFOUNDRIES and Linear Dimensions to Offer Joint Analog Solution For Fast-Growing Wearables and MEMs Sensors Markets January 9th, 2015

Nanowire clothing could keep people warm -- without heating everything else January 7th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE