Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH and TNO Establish Partnership to Enable Development of Measurement Standards for Semiconductor Component and Material Outgassing: oint research project aims to reduce the effect of outgassing and meet stringent industry requirements

Abstract:
SEMATECH and TNO, an organization for applied scientific research, announced today that they have established a strategic partnership aimed to enable measurement standards for establishing traceability for outgassing rates and leak rate measurement in semiconductor tools and processing.

SEMATECH and TNO Establish Partnership to Enable Development of Measurement Standards for Semiconductor Component and Material Outgassing: oint research project aims to reduce the effect of outgassing and meet stringent industry requirements

Albany, NY and Netherlands | Posted on July 10th, 2013

Semiconductor manufacturers are facing new contamination control and monitoring challenges, including component and materials' outgassing which can introduce a variety of contaminants into semiconductor fabs, impacting many processes. The objective of the project is to develop metrological procedures and guidelines for the measurement of equipment that will help the industry to have recommended practices for comparing measuring and reporting outgassing data. In the course of the project, metrological procedures for the measurement of outgassing and qualification of material will be defined and validated to address nanoscale defectivity. The major gaps in the types of component and material that are currently limiting the performance of the tools due to outgassing resulting in nanosize contamination will be identified.

"Since there is currently no industry standard for quantifying outgassing performance, SEMATECH and TNO have partnered to develop a standardized method for characterizing outgassing rates of components and material for semiconductor processing applications," said Michael Lercel, senior director of Nanodefectivity and Metrology, SEMATECH. "This joint project builds on SEMATECH's proven technical expertise in nanoscale defect detection and characterization and TNO's experience and innovative ability to deliver contamination free solutions to enable equipment solutions that can meet future challenges."

"Collaboration between TNO and SEMATECH combines our respective strengths and expertise in the development of standard test for measuring outgassing and contaminants," said Roland van Vliet, Business Line Manager Semicon at TNO. "We are pleased to have an industry leader in nanodefectivity and characterization of materials as a collaborator, whose considerable research and development network and exposure to industry problems can help us to develop a much needed solution to accelerate the equipment productivity and performance for the industry."

####

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About TNO

TNO is an independent innovation organization. TNO connects people and knowledge to create innovations that sustainably boost the competitive strength of industry and the welfare of society.

TNO’s more than 4000 professionals work on practicable knowledge and solutions for the problems of global scarcity. TNO focuses its efforts on seven themes Including Industrial Innovation : TNO reinforces the innovative strength of industry through innovation in products and processes, with a strong focus on sustainability. www.tno.nl

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Marketing Communications
O: 518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultrasensitive sensor using N-doped graphene July 26th, 2016

The NanoWizard® AFM from JPK is applied for interdisciplinary research at the University of South Australia for applications including smart wound healing and how plants can protect themselves from toxins July 26th, 2016

Accurate design of large icosahedral protein nanocages pushes bioengineering boundaries: Scientists used computational methods to build ten large, two-component, co-assembling icosahedral protein complexes the size of small virus coats July 25th, 2016

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

Chip Technology

Ultra-flat circuits will have unique properties: Rice University lab studies 2-D hybrids to see how they differ from common electronics July 25th, 2016

Attosecond physics: Mapping electromagnetic waveforms July 25th, 2016

Borrowing from pastry chefs, engineers create nanolayered composites: Method to stack hundreds of nanoscale layers could open new vistas in materials science July 25th, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

Announcements

Ultrasensitive sensor using N-doped graphene July 26th, 2016

The NanoWizard® AFM from JPK is applied for interdisciplinary research at the University of South Australia for applications including smart wound healing and how plants can protect themselves from toxins July 26th, 2016

Designing climate-friendly concrete, from the nanoscale up: New understanding of concrete’s properties could increase lifetime of the building material, decrease emissions July 25th, 2016

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

Tools

The NanoWizard® AFM from JPK is applied for interdisciplinary research at the University of South Australia for applications including smart wound healing and how plants can protect themselves from toxins July 26th, 2016

Attosecond physics: Mapping electromagnetic waveforms July 25th, 2016

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

An accelerated pipeline to open materials research: ORNL workflow system unites imaging, algorithms, and HPC to advance materials discovery and design July 24th, 2016

Alliances/Trade associations/Partnerships/Distributorships

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

Leti and Korea Institute of Science and Technology to Explore Collaboration on Advanced Technologies for Digital Era July 14th, 2016

Nanosystem and Digital Surf launch NanoMap Alpha: New surface imaging & metrology software based on Mountains® Technology July 14th, 2016

FEI and King Abdullah University of Science and Technology Establish New Electron Microscopy ‘Centre of Excellence’: Centre of Excellence involves materials and life sciences research and technical collaboration July 5th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic