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Home > Press > Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Abstract:
SEMATECH announced today that Applied Seals North America (ASNA) has joined SEMATECH's Manufacturing Technology Center, which is designed to improve semiconductor equipment manufacturing productivity, yield and cost.

Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Albany, NY | Posted on June 12th, 2013

The Manufacturing Technology Center is working on particle management solutions to reduce the number of particle excursions that are found in vacuum process tools. As a part of this project, fab participants identified chemical vapor deposition (CVD) systems as the largest contributor to the failure rate and shallow trench isolation (STI) gap fill as the most problematic process application within the CVD tool group.

As a member of SEMATECH's Manufacturing Technology Center, ASNA will collaborate with SEMATECH engineers to reduce the number of particle excursions by identifying seal designs and materials for STI gap fill process tools that are used in both 200 mm and 300 mm semiconductor manufacturing facilities. Additionally, ASNA and SEMATECH will work together to develop and introduce new material solutions that will help to significantly extend the life of the seals and reduce the number of particles that are shed from them.

"We are excited to collaborate with SEMATECH on innovative technology development to help address current and future technology challenges for sealing of vacuum systems," said Dalia Vernikovsky, CEO of ASNA. "This project will help spearhead initiatives and collaborative efforts to drastically improve sealing performance while significantly decreasing defects that are attributed to seals. As the complexity of the technology increases, innovations in materials, seal design and particle control is essential for successful manufacturing."

"Particle excursions are a major cost-of-ownership issue for vacuum tools and there is a technology gap that ASNA can help address to enable fabs to squeeze additional productivity from their very expensive vacuum tools," said Julian Richards, Manufacturing Technology project manager. "We look forward to working closely with ASNA in a collaborative effort to engineer sealing solutions that reduce the number of down events caused by particle excursions."

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About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About Applied Seals North America (ASNA)

Applied Seals North America pushes the limit with elastomeric technology, innovation and expertise. Their expansive selection of materials offer resistance to a multitude of chemistries, temperature and offers the sealing performance demanded in the most arduous applications. Years of quality seal manufacturing have represented Applied Seals’ products that bring expertise with state of the art compounding, in-house tool creation, design, molding and manufacturing superiority. Their engineering skill, design proficiency and application ‘know-how’ leads to the highest level of sealing performance and integrity that will meet current and future sealing challenges.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Marketing Communications
Phone: 518-649-1041

Copyright © SEMATECH

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