Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Abstract:
SEMATECH announced today that Applied Seals North America (ASNA) has joined SEMATECH's Manufacturing Technology Center, which is designed to improve semiconductor equipment manufacturing productivity, yield and cost.

Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Albany, NY | Posted on June 12th, 2013

The Manufacturing Technology Center is working on particle management solutions to reduce the number of particle excursions that are found in vacuum process tools. As a part of this project, fab participants identified chemical vapor deposition (CVD) systems as the largest contributor to the failure rate and shallow trench isolation (STI) gap fill as the most problematic process application within the CVD tool group.

As a member of SEMATECH's Manufacturing Technology Center, ASNA will collaborate with SEMATECH engineers to reduce the number of particle excursions by identifying seal designs and materials for STI gap fill process tools that are used in both 200 mm and 300 mm semiconductor manufacturing facilities. Additionally, ASNA and SEMATECH will work together to develop and introduce new material solutions that will help to significantly extend the life of the seals and reduce the number of particles that are shed from them.

"We are excited to collaborate with SEMATECH on innovative technology development to help address current and future technology challenges for sealing of vacuum systems," said Dalia Vernikovsky, CEO of ASNA. "This project will help spearhead initiatives and collaborative efforts to drastically improve sealing performance while significantly decreasing defects that are attributed to seals. As the complexity of the technology increases, innovations in materials, seal design and particle control is essential for successful manufacturing."

"Particle excursions are a major cost-of-ownership issue for vacuum tools and there is a technology gap that ASNA can help address to enable fabs to squeeze additional productivity from their very expensive vacuum tools," said Julian Richards, Manufacturing Technology project manager. "We look forward to working closely with ASNA in a collaborative effort to engineer sealing solutions that reduce the number of down events caused by particle excursions."

####

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About Applied Seals North America (ASNA)

Applied Seals North America pushes the limit with elastomeric technology, innovation and expertise. Their expansive selection of materials offer resistance to a multitude of chemistries, temperature and offers the sealing performance demanded in the most arduous applications. Years of quality seal manufacturing have represented Applied Seals’ products that bring expertise with state of the art compounding, in-house tool creation, design, molding and manufacturing superiority. Their engineering skill, design proficiency and application ‘know-how’ leads to the highest level of sealing performance and integrity that will meet current and future sealing challenges.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Marketing Communications
Phone: 518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Nanotechnology identifies brain tumor types through MRI 'virtual biopsy' in animal studies: If results are confirmed in humans, tumor cells could someday be diagnosed by MRI imaging and treated with tumor-specific IV injections; new NIH grant will fund future study May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Controlled Release of Anticorrosive Materials in Spot by Nanocarriers May 27th, 2015

Chip Technology

Advance in quantum error correction: Protocol corrects virtually all errors in quantum memory, but requires little measure of quantum states May 27th, 2015

Technology for Tomorrow’s Market Opportunities and Challenges: LetiDays Grenoble Presents the Possibilities: June 24-25 Event Includes Focus on IoT-Augmented Mobility and Leti’s Latest Results on Silicon Technologies, Sensors, Health Applications and Smart Cities May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Announcements

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Nanotechnology identifies brain tumor types through MRI 'virtual biopsy' in animal studies: If results are confirmed in humans, tumor cells could someday be diagnosed by MRI imaging and treated with tumor-specific IV injections; new NIH grant will fund future study May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Controlled Release of Anticorrosive Materials in Spot by Nanocarriers May 27th, 2015

Tools

Seeing the action: UCSB researchers develop a novel device to image the minute forces and actions involved in cell membrane hemifusion May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

Alliances/Partnerships/Distributorships

Samtec, Global Provider of Interconnect Systems, Joins IRT Nanoelec Silicon Photonics Program May 21st, 2015

SUNY Poly CNSE and NIOSH Launch Federal Nano Health and Safety Consortium: May 20th, 2015

Industrial Nanotech, Inc. Announces Official Launch of the Eagle Platinum Tile™ May 19th, 2015

DiATOME enables surface preparation for AFM and FIB May 19th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project