Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Abstract:
SEMATECH announced today that Applied Seals North America (ASNA) has joined SEMATECH's Manufacturing Technology Center, which is designed to improve semiconductor equipment manufacturing productivity, yield and cost.

Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools

Albany, NY | Posted on June 12th, 2013

The Manufacturing Technology Center is working on particle management solutions to reduce the number of particle excursions that are found in vacuum process tools. As a part of this project, fab participants identified chemical vapor deposition (CVD) systems as the largest contributor to the failure rate and shallow trench isolation (STI) gap fill as the most problematic process application within the CVD tool group.

As a member of SEMATECH's Manufacturing Technology Center, ASNA will collaborate with SEMATECH engineers to reduce the number of particle excursions by identifying seal designs and materials for STI gap fill process tools that are used in both 200 mm and 300 mm semiconductor manufacturing facilities. Additionally, ASNA and SEMATECH will work together to develop and introduce new material solutions that will help to significantly extend the life of the seals and reduce the number of particles that are shed from them.

"We are excited to collaborate with SEMATECH on innovative technology development to help address current and future technology challenges for sealing of vacuum systems," said Dalia Vernikovsky, CEO of ASNA. "This project will help spearhead initiatives and collaborative efforts to drastically improve sealing performance while significantly decreasing defects that are attributed to seals. As the complexity of the technology increases, innovations in materials, seal design and particle control is essential for successful manufacturing."

"Particle excursions are a major cost-of-ownership issue for vacuum tools and there is a technology gap that ASNA can help address to enable fabs to squeeze additional productivity from their very expensive vacuum tools," said Julian Richards, Manufacturing Technology project manager. "We look forward to working closely with ASNA in a collaborative effort to engineer sealing solutions that reduce the number of down events caused by particle excursions."

####

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech

About Applied Seals North America (ASNA)

Applied Seals North America pushes the limit with elastomeric technology, innovation and expertise. Their expansive selection of materials offer resistance to a multitude of chemistries, temperature and offers the sealing performance demanded in the most arduous applications. Years of quality seal manufacturing have represented Applied Seals’ products that bring expertise with state of the art compounding, in-house tool creation, design, molding and manufacturing superiority. Their engineering skill, design proficiency and application ‘know-how’ leads to the highest level of sealing performance and integrity that will meet current and future sealing challenges.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Marketing Communications
Phone: 518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

University of Minnesota engineers make sound loud enough to bend light on a computer chip: Device could improve wireless communications systems November 28th, 2014

Study details laser pulse effects on behavior of electrons November 28th, 2014

Single-atom gold catalysts may offer path to low-cost production of fuel and chemicals November 28th, 2014

Production of Anticancer Drug from Nanofibers in Iran November 28th, 2014

Chip Technology

University of Minnesota engineers make sound loud enough to bend light on a computer chip: Device could improve wireless communications systems November 28th, 2014

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Nanometrics Announces Upcoming Investor Events November 19th, 2014

Announcements

University of Minnesota engineers make sound loud enough to bend light on a computer chip: Device could improve wireless communications systems November 28th, 2014

Study details laser pulse effects on behavior of electrons November 28th, 2014

Single-atom gold catalysts may offer path to low-cost production of fuel and chemicals November 28th, 2014

Production of Anticancer Drug from Nanofibers in Iran November 28th, 2014

Tools

Renishaw receives Queen's Award for spectroscopy developments November 25th, 2014

JPK reports on the use of AFM and the CellHesion module to study plant cells at the University of Queensland November 25th, 2014

A*STAR SIMTech wins international award for breaking new ground in actuators: SIMTech invention can be used in an array of industries, and is critical for next generation ultra-precision systems November 24th, 2014

Professional AFM Images with a Three Step Click SmartScan by Park Systems Revolutionizes Atomic Force Microscopy by Automatizing the Imaging Process November 24th, 2014

Alliances/Partnerships/Distributorships

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

New research project supports internationalisation in nano-research: Launch of new “Baltic Sea Network” November 22nd, 2014

UO-industry collaboration points to improved nanomaterials: University of Oregon microscope puts spotlight on the surface structure of quantum dots for designing new solar devices November 20th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More












ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE