Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Top quality Cu diffusion barriers from Picosun in the ENIAC JU project ESiP

Abstract:
Picosun Oy, leading Atomic Layer Deposition (ALD) equipment manufacturer, reports excellent process results for copper diffusion barrier deposition. ALD materials for copper diffusion barriers were investigated in the project ESiP (Efficient Silicon Multi-Chip System-in-Package Integration - Reliability, Failure Analysis and Test), running from May 2010 to June 2013.

Top quality Cu diffusion barriers from Picosun in the ENIAC JU project ESiP

Espoo, Finland | Posted on June 10th, 2013

In ESiP, Picosun worked in close collaboration especially with VTT Technical Research Centre of Finland, developing processes for copper diffusion barriers for Through-Silicon-Via (TSV) structures. Several different barrier materials were investigated and evaluated, e.g. tantalum oxide (Ta2O5), titanium nitride (TiN), titanium-aluminium carbonitride (TiAlCN), ruthenium (Ru), and tantalum nitride (TaN). Based on the studies made at VTT, TaN proved to be the best option for diffusion barrier application. With the results of the ESiP project Picosun's leading ALD reactor design ensures that the TaN process can now run safely and be introduced to industrial manufacturing. The TaN films deposited in the PICOSUN™ ALD tool showed high uniformity and conformality. The process is also cost-efficient because of the low price of the precursors.

"We are proud to take part in a project such as ESiP - the project addresses directly the challenges in European electronics and IC industry today and collects together the finest expertise in the field. ALD process development is in central role in our position as the leading provider of ALD solutions. The now optimized, efficient, safe, and cost-effective TaN process for copper diffusion barriers enables integration of Picosun ALD technology in the next generation TSV manufacturing," states Juhana Kostamo, Managing Director of Picosun.

The project ESiP was funded by ENIAC Joint Undertaking* and Tekes - The Finnish Funding Agency for Technology and Innovation. With its 41 partners, bringing together the biggest actors in micro- and nanoelectronics from nine EU countries, the project is the largest international R&D consortium Picosun has participated in this far.

The goal of the project ESiP, which was managed by Infineon Technologies, was to secure Europe's competitiveness on the global micro- and nanoelectronics market. One of the technological solutions for this can be found from the "More than Moore" approach. This approach pushes innovation not only by downscaling the individual electronic component size, but also by developing novel solutions for high density silicon multi-chip packaging, package stacking methods, and failure and reliability testing of the new devices - the core target of the project ESiP. This "System-in-Package" (SiP) technology allows realization of highly sophisticated, highly integrated, and highly miniaturized multifunctional micro- and nanoelectronic devices. Application areas for these novel devices can be found e.g. from the sensor, communication, automotive and healthcare industries.

TSV structures are a central part of upcoming and future SiP devices. The active layers stacked on top of each other often need to be connected and this is realized with TSV trenches the insides of which are coated with conducting material such as copper. Diffusion barriers are needed to prevent copper diffusion into underlying semiconductor material which could render the whole device nonfunctional.

*The ENIAC Joint Undertaking (JU) is a European, public-private partnership focusing on nanoelectronics that brings together ENIAC Member/Associated States, the European Commission, and AENEAS (an association representing European R&D actors in this field). www.eniac.eu/web/index.php

####

About Picosun Oy
Picosun Oy is a Finland-based, globally operating manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of pioneering, exclusive and groundbreaking ALD reactor design and manufacturing. Today, PICOSUN™ ALD systems are in daily production use in numerous prominent industries across the globe.

For more information, please click here

Contacts:
Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 9 297 6116

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Antibacterial Ceramic Nanoparticles, Appropriate Material for Medical Devices May 3rd, 2015

Oxford Instruments announces winners of the 2015 Sir Martin Wood Science Prize for China May 2nd, 2015

Time Dependant Spectroscopy of Microscopic Samples: CRAIC TimePro™ software is used with CRAIC Technologies microspectrometers to measure the kinetic UV-visible-NIR, Raman and fluorescence spectra of microscopic sample areas May 2nd, 2015

ORNL researchers probe chemistry, topography and mechanics with one instrument May 2nd, 2015

Govt.-Legislation/Regulation/Funding/Policy

ORNL researchers probe chemistry, topography and mechanics with one instrument May 2nd, 2015

Making robots more human April 29th, 2015

Artificial photosynthesis could help make fuels, plastics and medicine April 29th, 2015

Research seeks alternatives for reducing bacteria in fresh produce using nanoengineering April 29th, 2015

Chip Technology

Nanometrics to Present at the B. Riley & Co. 16th Annual Investor Conference May 2nd, 2015

SUNY Poly and Sematech Announce Air Products Joins Cutting-Edge CMP Center At Albany Nanotech Complex April 28th, 2015

Two-dimensional semiconductor comes clean April 27th, 2015

Surface matters: Huge reduction of heat conduction observed in flat silicon channels April 23rd, 2015

Announcements

Antibacterial Ceramic Nanoparticles, Appropriate Material for Medical Devices May 3rd, 2015

Nanometrics to Present at the B. Riley & Co. 16th Annual Investor Conference May 2nd, 2015

Time Dependant Spectroscopy of Microscopic Samples: CRAIC TimePro™ software is used with CRAIC Technologies microspectrometers to measure the kinetic UV-visible-NIR, Raman and fluorescence spectra of microscopic sample areas May 2nd, 2015

ORNL researchers probe chemistry, topography and mechanics with one instrument May 2nd, 2015

Tools

Oxford Instruments announces winners of the 2015 Sir Martin Wood Science Prize for China May 2nd, 2015

Nanometrics to Present at the B. Riley & Co. 16th Annual Investor Conference May 2nd, 2015

Time Dependant Spectroscopy of Microscopic Samples: CRAIC TimePro™ software is used with CRAIC Technologies microspectrometers to measure the kinetic UV-visible-NIR, Raman and fluorescence spectra of microscopic sample areas May 2nd, 2015

ORNL researchers probe chemistry, topography and mechanics with one instrument May 2nd, 2015

Alliances/Partnerships/Distributorships

How can you see an atom? (video) April 10th, 2015

FibeRio and VF Corporation Form Strategic Partnership to Lead the Apparel and Footwear Markets in Nanofiber Technology April 8th, 2015

UK National Graphene Institute Selects Bruker as Official Partner: World-Leading Graphene Research Facility Purchases Multiple Bruker AFMs April 7th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Research partnerships

Electron chirp: Cyclotron radiation from single electrons measured directly for first time: Method has potential to measure neutrino mass and look beyond the Standard Model of the universe April 29th, 2015

Weighing -- and imaging -- molecules one at a time April 28th, 2015

SUNY Poly and Sematech Announce Air Products Joins Cutting-Edge CMP Center At Albany Nanotech Complex April 28th, 2015

When mediated by superconductivity, light pushes matter million times more April 28th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project