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Home > Press > Air Liquide Electronics strengthens patent portfolio on Zirconium based high-k dielectric precursors

Abstract:
Air Liquide Electronics today announced that the Chinese Patents Office has granted a patent related to the application of ZyALD™ in semiconductor processing. This follows the recent granting of patents in several other states, including South Korea, Singapore, Taiwan and several European countries, with a favorable outcome also expected in various other jurisdictions. The usage of ZyALD™ and other similar molecules for high-k deposition is now covered by 11 granted patents worldwide and 13 additional pending applications.

Air Liquide Electronics strengthens patent portfolio on Zirconium based high-k dielectric precursors

Paris, France | Posted on March 21st, 2013

ZyALD™ - Tris(dimethylamino)cyclopentadienyl Zirconium - is a key zirconium precursor (functionalized molecule) in the family of molecules addressed in the granted patents. It is engineered to enable high temperature Atomic Layer Deposition (ALD) processes for deposition of zirconium based dielectrics in the manufacturing of semiconductors. First introduced to the industry in 2006, ZyALD™ has now become the mainstream high-k precursor in DRAM manufacturing worldwide, replacing conventional molecules which do not provide the required functionalities at high temperatures. ZyALD™ has also found applications for the high-k layer in for BEOL MIM structure and e-DRAM.

With its superior physico-chemical properties, including its high volatility, thermal stability and high growth rate, ZyALD™ has served as a drop-in replacement, allowing end users to transition seamlessly from conventional chemistries while benefiting from an expanded process window in the manufacturing process.

ZyALD™ is manufactured at Air Liquide's ALOHA™ Manufacturing centers, which are located in California (US), Chalon (France) and Tsukuba (Japan), serving the global customer base. Addressing the challenges of advanced semiconductor manufacturing, the ALOHA product line of precursorshas helped increase the electrical and mechanical performance of film materials used in microelectronics fabrication, accelerating a variety of emerging applications. The ALOHA product line includes all the advanced CVD and ALD precursors for sub-45 nm device manufacturing, with capabilities ranging from ton-level of silicon precursors and high-k materials down to a few grams of experimental R&D products. ALOHA™ precursors come in a comprehensive package including ultra-high purity canisters, extremely tight specifications, backed by its world-class Air Liquide-BALAZS™ analytical expertise, and when applicable, with the license to use the precursor according to Air Liquide's intellectual property rights.

Jean-Marc Girard, CTO of Air Liquide Electronics said "Air Liquide is strongly committed to bringing innovative products to our customers, enabling their ever more challenging process requirements.. ZyALD™ is one of the highly successful products introduced by ALOHA™, and we expect our continued investment in R&D to bring additional unique products to the market."

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About Air Liquide Electronics
Air Liquide is the world leader in gases for industry, health and the environment, and is present in 80 countries with close to 50,000 employees. Oxygen, nitrogen, hydrogen and rare gases have been at the core of Air Liquide's activities since its creation in 1902. Using these molecules, Air Liquide continuously reinvents its business, anticipating the needs of current and future markets.The Group innovates for the good of society while delivering profitable growth and consistent performance.

Innovative technologies that curb polluting emissions, lower industry's energy use, recover and reuse natural resources or develop the energies of tomorrow, such as hydrogen, biofuels or photovoltaic energy... Oxygen for hospitals, home healthcare, fighting nosocomial infections... Air Liquide combines many products and technologies to develop valuable applications and services not only for its customers but also for society.

A partner for the long term, Air Liquide relies on employee commitment, customer trust and shareholder support to pursue its vision of sustainable, competitive growth. The diversity of Air Liquide's teams, businesses, markets and geographic presence provides a solid and sustainable base for its development and strengthens its ability to push back its own limits, conquer new territories and build its future.

Air Liquide explores the best that air can offer to preserve life, staying true to its Corporate Social Responsibility and sustainable development approach. In 2012, the Group's revenues amounted to € 15.3 billion of which 82% were generated outside France. Air Liquide is listed on the Paris Euronext stock exchange (compartment A) and is a member of the CAC 40 and Dow Jones Euro Stoxx 50 indexes.

For more information, please click here

Contacts:
Air Liquide Electronics
CTO
Jean-Marc Girard
+81 (0)3 5573 8081

ALOHA™ Director
Ashutosh Misra
+1 972 995 7552

Copyright © Air Liquide Electronics

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