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1E15 atoms cm-3 24 Mg implant in silicon analysed with 5 keV O2+ primary ions

1E15 atoms cm-3 24 Mg implant in silicon analysed with 5 keV O2+ primary ions

Abstract:
The Hiden IG20 high-brightness gas ion gun is further enhanced by the introduction of a new beam optic and ion source configuration to enable both increased beam brightness AND beam contrast, together with a significant reduction in ultimate spot size.

O2/Ar Ion Gun Spots the Difference

Warrington, UK | Posted on February 21st, 2013

With a raster scanning area of 4x4 mm the IG20 is equally suited to depth profiling and to surface imaging applications, and is the preferred gas ion gun for secondary ion and secondary neutral mass spectrometry, for Auger and for XPS. Parameter selection and gun operation are fully under PC control, and the gun is operable with both oxygen and with inert gas primary sources.

Two interchangeable ion sources are available for operation with the same beam optic configuration. One is optimised for general analysis with maximum brightness and a beam current of 800 nA, one is optimised for high dynamic range depth profiling applications with minimised beam scatter and supporting a beam current of 200 nA within a beam diameter of just 80 micron.

The IG20 ion gun is differentially pumped and includes full raster scanning, incorporation of a neutrals dump, DN-35-CF (2.75 inch diameter) Conflat-type mounting flange and simple replacement of the ion source yttria-coated iridium twin-filament. Companion products include the IG-5C metal ion gun with caesium source and a choice of quadrupole SIMS detectors.

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About Hiden Analytical Ltd
For further information on this or other Hiden products please contact Hiden Analytical at or visit the main website at www.HidenAnalytical.com.

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Contacts:
Hiden Analytical Ltd
420 Europa Boulevard
Warrington, WA5 7UN, England
tel: +44 (0)1925 445 225

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