Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Imec reports customized lenslet array for KLA-Tencor’s advanced e-beam tool

Abstract:
Imec announces that it has designed and fabricated an electrostatic micro-lens (lenslet) array for KLA-Tencor's anticipated Reflective Electron Beam Lithography (REBL) tool. The REBL technology potentially enables a high throughput e-beam writing process for maskless lithography. The lenslet array is a key component for the parallelization of the e-beam writing process. Functionality of the lenslet chip was demonstrated in KLA-Tencor's REBL e-beam column.

Imec reports customized lenslet array for KLA-Tencor’s advanced e-beam tool

Leuven, Belgium | Posted on November 6th, 2012

The lenslet consists of a densely packed array of 4µm deep cylindrical holes with a 1.4 µm diameter and top spacing of only 200nm. The electron beam entering the lenslet holes is focused through a set of four ring electrodes. The ring electrodes can be tuned to focus the electron beams by applying static voltages up to 50V on the ring electrodes. The bottom of each hole consists of a small metal plate that can be switched by a CMOS circuitry below, either reflecting or absorbing the incoming electrons. In this way, the incoming electron beam is split into one million smaller beamlets, a strategy designed to enable higher throughput for the e-beam writing process through parallelization.

Via its CMORE service, imec offers companies all the services need to develop packaged customized specialty microsystem products. Imec's services range from feasibility studies, design and technology development, testing and reliability studies, to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production. The CMORE toolbox contains a wide variety of device technologies on 200mm such as CMOS, Si-photonics, MEMS, specialty image sensors and packaging.

"Many companies can benefit from specialty semiconductor devices to enhance and increase the functionality of their equipment," states Rudi Cartuyvels, Vice President Smart Systems and Energy Technology at imec. "We are pleased that our semiconductor and heterogeneous integration expertise, and our design and production service, supported the development of KLA-Tencor's REBL tool."

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

Forward Looking Statements

Statements in this press release other than historical facts, such as statements regarding the potential capabilities and performance of KLA-Tencor’s REBL technology, the functionality of imec’s lenslet array and the performance enhancements that it offers, and the potential benefits that may generally be realized by users of imec’s or KLA-Tencor’s offerings, are forward-looking statements. These forward-looking statements are based on current information and expectations, and involve a number of risks and uncertainties. Actual results may differ materially from those projected in such statements due to various factors.

This research was, in part, funded by the U.S. Government. The views and conclusions contained in this document are those of the authors and should not be viewed as representing the official policies, either express or implied, of the U.S. Government.

For more information, please click here

Contacts:
Olga Walsh
Business Technology
[ f o r m u l a ]
Formula PR, Inc.
1215 Cushman Avenue
San Diego, CA 92110
Office 619-234-0345

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

SouthWest NanoTechnologies Introduces AgeNT™ Transparent Conductor System at SID Display Week, Booth #543 May 28th, 2015

New technique speeds nanoMRI imaging: Multiplexing technique for nanoscale magnetic resonance imaging developed by researchers in Switzerland cuts normal scan time from two weeks to two days May 28th, 2015

Squeezed quantum cats May 28th, 2015

Imaging

Nano-capsules designed for diagnosing malignant tumours: Japanese researchers have developed adaptable nano-capsules that can help in the diagnosis of glioblastoma cells - a highly invasive form of brain tumours May 28th, 2015

New technique speeds nanoMRI imaging: Multiplexing technique for nanoscale magnetic resonance imaging developed by researchers in Switzerland cuts normal scan time from two weeks to two days May 28th, 2015

MEMS

Janusz Bryzek Joins MEMS Industry Group to Lead New TSensors Division - New Division will Focus on Accelerating Development of Emerging Ultra-high Volume Sensors Supporting Abundance, mHealth and IoT May 14th, 2015

Phonons, arise! Small electric voltage alters conductivity in key materials April 22nd, 2015

Iranian Scientists Evaluate Dynamic Interaction between 2 Carbon Nanotubes April 14th, 2015

ASIC Development for MEMS Applications: A Platform Approach March 25th, 2015

Chip Technology

New chip makes testing for antibiotic-resistant bacteria faster, easier: Researchers at the University of Toronto design diagnostic chip to reduce testing time from days to one hour, allowing doctors to pick the right antibiotic the first time May 28th, 2015

Collaboration could lead to biodegradable computer chips May 28th, 2015

Technology for Tomorrow’s Market Opportunities and Challenges: LetiDays Grenoble Presents the Possibilities: June 24-25 Event Includes Focus on IoT-Augmented Mobility and Leti’s Latest Results on Silicon Technologies, Sensors, Health Applications and Smart Cities May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Sensors

SouthWest NanoTechnologies Introduces AgeNT™ Transparent Conductor System at SID Display Week, Booth #543 May 28th, 2015

Technology for Tomorrow’s Market Opportunities and Challenges: LetiDays Grenoble Presents the Possibilities: June 24-25 Event Includes Focus on IoT-Augmented Mobility and Leti’s Latest Results on Silicon Technologies, Sensors, Health Applications and Smart Cities May 27th, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Record high sensitive Graphene Hall sensors May 21st, 2015

Announcements

Chemists discover key reaction mechanism behind the highly touted sodium-oxygen battery May 28th, 2015

New technique speeds nanoMRI imaging: Multiplexing technique for nanoscale magnetic resonance imaging developed by researchers in Switzerland cuts normal scan time from two weeks to two days May 28th, 2015

Squeezed quantum cats May 28th, 2015

New chip makes testing for antibiotic-resistant bacteria faster, easier: Researchers at the University of Toronto design diagnostic chip to reduce testing time from days to one hour, allowing doctors to pick the right antibiotic the first time May 28th, 2015

Tools

Seeing the action: UCSB researchers develop a novel device to image the minute forces and actions involved in cell membrane hemifusion May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

Alliances/Partnerships/Distributorships

Samtec, Global Provider of Interconnect Systems, Joins IRT Nanoelec Silicon Photonics Program May 21st, 2015

SUNY Poly CNSE and NIOSH Launch Federal Nano Health and Safety Consortium: May 20th, 2015

Industrial Nanotech, Inc. Announces Official Launch of the Eagle Platinum Tile™ May 19th, 2015

DiATOME enables surface preparation for AFM and FIB May 19th, 2015

Printing/Lithography/Inkjet/Inks

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Printing 3-D graphene structures for tissue engineering: A new ink formulation allows for the 3-D printing of graphene structures May 19th, 2015

ORNL demonstrates first large-scale graphene fabrication May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project