Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > New method monitors semiconductor etching as it happens – with light

Photo by Chris Edwards, Amir Arbabi, Gabriel Popescu, and Lynford Goddard

A three-dimensional image of an etched gallium-arsenide semiconductor, taken during etching with a new microscopy technique that monitors the etching process on the nanometer scale. The height difference between the orange and purple regions is approximately 250 nanometers.
Photo by Chris Edwards, Amir Arbabi, Gabriel Popescu, and Lynford Goddard

A three-dimensional image of an etched gallium-arsenide semiconductor, taken during etching with a new microscopy technique that monitors the etching process on the nanometer scale. The height difference between the orange and purple regions is approximately 250 nanometers.

Abstract:
University of Illinois researchers have a new low-cost method to carve delicate features onto semiconductor wafers using light - and watch as it happens.

New method monitors semiconductor etching as it happens – with light

Champaign, IL | Posted on September 29th, 2012

"You can use light to image the topography and you can use light to sculpture the topography," said electrical and computer engineering professor Gabriel Popescu. "It could change the future of semiconductor etching."

Chip makers and semiconductor researchers need to very precisely control the dimensions of their devices. The dimensions of the components affect performance, speed, error rate and time to failure.

Semiconductors are commonly shaped by etching with chemicals. Etching errors, such as residual layers, can affect the ability to further process and etch as well as hamper device performance. Thus, researchers use time-consuming and costly processes to ensure precise etching - for some applications, to within a scant few nanometers.

The Illinois researchers' new technique can monitor a semiconductor's surface as it is etched, in real time, with nanometer resolution. It uses a special type of microscope that uses two beams of light to very precisely measure topography.

"The idea is that the height of the structure can be determined as the light reflects off the different surfaces," said electrical and computer engineering professor Lynford Goddard, who co-led the group with Popescu. "Looking at the change in height, you figure out the etch rate. What this allows us to do is monitor it while it's etching. It allows us to figure out the etch rate both across time and across space, because we can determine the rate at every location within the semiconductor wafer that's in our field of view."

The new method is faster, lower in cost, and less noisy than the widely used methods of atomic force microscopy or scanning tunneling microscopy, which cannot monitor etching in progress but only compare before and after measurements. In addition, the new method is purely optical, so there's no contact with the semiconductor surface and the researchers can monitor the whole wafer at once instead of point-by-point.

"I would say the main advantage of our optical technique is that it requires no contact," Popescu said. "We're just sending light, reflected off the sample, as opposed to an AFM where you need to come with a probe close to the sample."

In addition to monitoring the etching process, the light catalyzes the etching process itself, called photochemical etching. Traditional chemical etching creates features in steps or plateaus. For curved surfaces or other shapes, semiconductor researchers use photochemical etching. Usually, light shines though very expensive glass plates called masks that have distinct patterns of gray to let light through by degrees. A researcher must purchase or make a mask for each tweak of a pattern until the correct pattern of features is achieved.

By contrast, the new method uses a projector to shine a grayscale image onto the sample being etched. This allows the researchers to create complex patterns quickly and easily, and adjust them as needed.

"To create each mask is very expensive. That's impractical for research," Goddard said. "Because our technique is controlled by the computer, it can be dynamic. So you can start off etching one particular shape, midway through realize that you want to make some change, and then change the projector pattern to get the desired outcome."

The researchers envision this technology applied beyond etching, to real-time monitoring of other processes in materials science and life science - for example, watching carbon nanotubes self-assemble, or error monitoring during large-scale computer chip manufacturing. It could help chip manufacturers reduce costs and processing time by ensuring that equipment stays calibrated.

The National Science Foundation supported this work, published Sept. 28 in the journal Light: Science and Applications. Goddard and Popescu are also affiliated with the Beckman Institute for Advanced Science and Technology at the U. of I.

Graduate students Chris Edwards and Amir Arbabi were also co-authors of the paper.

####

For more information, please click here

Contacts:
Liz Ahlberg
Physical Sciences Editor
217-244-1073


Lynford Goddard
217-244-0799


To reach
Gabriel Popescu
217-333-4840

Copyright © University of Illinois at Urbana-Champaign

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

The paper, “Optically Monitoring and Controlling Nanoscale Topography During Semiconductor Etching,” is available online:

Beckman Institute for Advanced Science and Technology at the U. of I.:

Related News Press

News and information

First Observation of Electronic Structure in Ag-Rh Alloy Nanoparticles Having Hydrogen Absorbing: Storage Property –Attempting to solve the mystery of why Ag-Rh alloy nanoparticles have a similar property to Pd– October 30th, 2014

Iranians Present Model to Predict Photocatalytic Process in Removal of Pollutants October 30th, 2014

Production of Biocompatible Polymers in Iran October 30th, 2014

Amorphous Coordination Polymer Particles as alternative to classical nanoplatforms for nanomedicine October 30th, 2014

Videos/Movies

Novel Rocket Design Flight Tested: New Rocket Propellant and Motor Design Offers High Performance and Safety October 23rd, 2014

Ucore's McKenzie to Deliver Presentation to Rare Earths Conference in Singapore as Highlight of Fall 2014 Marketplace Schedule October 19th, 2014

Australian teams set new records for silicon quantum computing October 12th, 2014

Nanoparticles get a magnetic handle: New method produces particles that can glow with color-coded light and be manipulated with magnets October 9th, 2014

Govt.-Legislation/Regulation/Funding/Policy

'Electronic skin' could improve early breast cancer detection October 29th, 2014

New solar power material converts 90 percent of captured light into heat: SunShot Project aims to make solar cost competitive October 29th, 2014

Tiny carbon nanotube pores make big impact October 29th, 2014

Microrockets fueled by water neutralize chemical and biological warfare agents October 29th, 2014

Chip Technology

Sussex physicists find simple solution for quantum technology challenge October 28th, 2014

Watching the hidden life of materials: Ultrafast electron diffraction experiments open a new window on the microscopic world October 27th, 2014

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

QuantumWise guides the semiconductor industry towards the atomic scale October 24th, 2014

Self Assembly

NYU Researchers Break Nano Barrier to Engineer the First Protein Microfiber October 23rd, 2014

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

‘Designer’ nanodevice could improve treatment options for cancer sufferers October 22nd, 2014

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

Nanotubes/Buckyballs

Tiny carbon nanotube pores make big impact October 29th, 2014

Materials for the next generation of electronics and photovoltaics: MacArthur Fellow develops new uses for carbon nanotubes October 21st, 2014

Special UO microscope captures defects in nanotubes: University of Oregon chemists provide a detailed view of traps that disrupt energy flow, possibly pointing toward improved charge-carrying devices October 21st, 2014

Imaging electric charge propagating along microbial nanowires October 20th, 2014

Discoveries

First Observation of Electronic Structure in Ag-Rh Alloy Nanoparticles Having Hydrogen Absorbing: Storage Property –Attempting to solve the mystery of why Ag-Rh alloy nanoparticles have a similar property to Pd– October 30th, 2014

Iranians Present Model to Predict Photocatalytic Process in Removal of Pollutants October 30th, 2014

Production of Biocompatible Polymers in Iran October 30th, 2014

Amorphous Coordination Polymer Particles as alternative to classical nanoplatforms for nanomedicine October 30th, 2014

Announcements

First Observation of Electronic Structure in Ag-Rh Alloy Nanoparticles Having Hydrogen Absorbing: Storage Property –Attempting to solve the mystery of why Ag-Rh alloy nanoparticles have a similar property to Pd– October 30th, 2014

Iranians Present Model to Predict Photocatalytic Process in Removal of Pollutants October 30th, 2014

Production of Biocompatible Polymers in Iran October 30th, 2014

Amorphous Coordination Polymer Particles as alternative to classical nanoplatforms for nanomedicine October 30th, 2014

Tools

A new cheap and efficient method to improve SERS, an ultra-sensitive chemical detection technique October 28th, 2014

New Compact SIMS at 61st AVS | Visit us on Booth 311 October 28th, 2014

New nanodevice to improve cancer treatment monitoring October 27th, 2014

Haydale Secures Exclusive Development and Supply Agreement with Tantec A/S: New reactors to be built and commissioned by Tantec A/S represent another step forward towards the commercialisation of graphene October 24th, 2014

Industrial

Iranians Present Model to Predict Photocatalytic Process in Removal of Pollutants October 30th, 2014

Researchers patent a nanofluid that improves heat conductivity October 22nd, 2014

New Nanocomposites Help Elimination of Toxic Dyes October 15th, 2014

Perpetuus Carbon Group Receives Independent Verification of its Production Capacity for Graphenes at 140 Tonnes per Annum: Perpetuus Becomes the First Manufacturer in the Sector to Allow Third Party Audit October 7th, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE