Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SMI Economical Plasma Source Receives R&D 100 Award

Example structures grown using the LFRF 501 plasma source - (left to right) Doped Si nanowires, ErSb nanoparticles embedded in Zn doped InAsSb, and phase change material GeSbTe.
Example structures grown using the LFRF 501 plasma source - (left to right) Doped Si nanowires, ErSb nanoparticles embedded in Zn doped InAsSb, and phase change material GeSbTe.

Abstract:
Structured Materials Industries, Inc. (SMI) announced today, September, 10th 2012, that its recently developed "LFRF-501 (Low Frequency RF Plasma Source)" has been selected by an independent judging panel and the editors of R&D Magazine as a recipient of a 2012 R&D 100 Award. This award recognizes the 100 most technologically significant products introduced in the past year.

SMI Economical Plasma Source Receives R&D 100 Award

Posted on September 10th, 2012

Electronic devices utilize advanced materials in the form of thin films, nanowires and nanoparticles which are prepared by chemical vapor deposition (CVD), Metal Organic CVD (MOCVD), and Alternating Layer Deposition (ALD). In these processes, specific gases are reacted under low pressure and high temperature conditions either in the gas phase or on a substrate to produce nanomaterials, films, and coatings. Growth reactions can often be enhanced through the application of a plasma to increase the reaction rate, lower the deposition temperature, and improve the properties of the deposited materials. While these techniques are routinely used in the production of semiconductors, production scale tools are not suited for research scale efforts. Research efforts on next generation materials and structures are best begun in low cost, small but scalable, tools.

Typical apparatus for plasma processing of thin films and nanomaterials are large, expensive and complex to install and operate. SMI's LFRF-501 is designed for the small scale low budget researcher; it is low cost, portable, and can be easily installed on existing equipment. SMI and partners Oak Ridge National Laboratory (ORNL) and the University of California at Santa Cruz (UCSC) received a 2012 R&D 100 award for developing and demonstrating this technology.



With funding from DOE offices of Electricity Delivery and Energy Reliability and Advanced Manufacturing, ORNL demonstrated use of the product in thin film deposition of GaN and related materials. UCSC is developing complex nanoscale semiconductors, benefiting from the use of plasma enhancement. SMI is focused on process demonstration with the LFRF 501 unit and packaging the unit for the researcher.


Technology Achievements

Compatible with multiple processes - chemical vapor deposition (CVD), metal organic chemical vapor deposition (MOCVD), atomic layer deposition (ALD) and hydride vapor phase epitaxy (HVPE). Materials systems the LFRF 501 system has been demonstrated with: Si/Ge films and nanowires, ErSb nanoparticles embedded in InGaAsSbP films, films of GeSbTe, GeS, LaAlO, ZnO, Graphene, and CNTs among others.



Plasma advantages - reduce the deposition temperature, increase the deposition rates, enhance catalyzed reaction path rates, reduce the amount of thermal energy input to the reactor, enable non-equilibrium chemistry not possible with purely thermal processes, enable the use of temperature sensitive substrate materials, improve material properties such as density and adhesion. The plasma source can also be used to clean the substrate before growth or post growth to treat produced materials.

The R&D 100 awards will be presented at this years Black Tie Gala Awards Banquet

the evening of Nov. 1, 2012, at the Renaissance Orlando Hotel at SeaWorld in Florida.

This year marks the 50th anniversary of the R&D 100 Awards and a special commemoration of the technologies honored in past years is also planned.

Dr. Tompa, SMI's founder, stated, "SMI works to develop and produce user friendly growth tools and components and process enhancements for researchers addressing a wide range of material systems and applications. The LFRF 501 system has been a natural outgrowth of those efforts - SMI has sold multiple LFRF 501 units enabling researchers to economically perform advanced and SMI offers proof of concept deposition services - using in-house deposition tools."

####

About Structured Materials Industries, Inc. (SMI)
Structured Materials Industries, Incorporated is a leader in advanced and custom Chemical Vapor Deposition (CVD) tools and related technologies. SMI offers for sale: systems, components, materials, and process development services. SMI has an in-house applications laboratory featuring multi-reactor deposition systems and analytic capabilities, has developed a range of strategic partnerships to develop and implement CVD, MOCVD, PECVD, and ALD technologies and looks forward to continuing to grow and expand upon mutually advantageous relationships.

For more information, please click here

Contacts:
General and Technical Information this release:

Structured Materials Industries, Inc.
Unit 102/103, 201 Circle Drive N.
Piscataway, New Jersey 08854
Phone: 732.302.9274
Fax: 732.302.9275

Copyright © Structured Materials Industries, Inc. (SMI)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Gold nanostars and immunotherapy vaccinate mice against cancer: New treatment cures, vaccinates mouse in small proof-of-concept study August 18th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

Thin films

Rice University chemists make laser-induced graphene from wood July 31st, 2017

Graduate Students from Across the Country Attend Hands-on NanoCamp: Prominent scientists Warren Oliver, Ph.D., and George Pharr, Ph.D., presented a weeklong NanoCamp for hand-picked graduate students across the United States July 26th, 2017

Studying Argon Gas Trapped in Two-Dimensional Array of Tiny "Cages": Understanding how individual atoms enter and exit the nanoporous frameworks could help scientists design new materials for gas separation and nuclear waste remediation July 17th, 2017

Thinking thin brings new layering and thermal abilities to the semiconductor industry: In a breakthrough for the semiconductor industry, researchers demonstrate a new layer transfer technique called "controlled spalling" that creates many thin layers from a single gallium nitride July 11th, 2017

Chip Technology

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

Freeze-dried foam soaks up carbon dioxide: Rice University scientists lead effort to make novel 3-D material August 16th, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Surprise discovery in the search for energy efficient information storage August 10th, 2017

Announcements

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Gold nanostars and immunotherapy vaccinate mice against cancer: New treatment cures, vaccinates mouse in small proof-of-concept study August 18th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

Tools

Scientists from the University of Manchester and Diamond Light Source work with Deben to develop and test a new compression stage to study irradiated graphite at elevated temperatures August 15th, 2017

FRITSCH Milling and Sizing! Innovations at POWTECH 2017 - Hall 2 Stand 227 August 9th, 2017

Thermo Fisher Scientific Advances Cryo-EM Leadership to Drive Structural Biology Discoveries: New Thermo Scientific Krios G3i raises bar for performance, automation and time-to-results Breakthrough Thermo Scientific Glacios provides a cryo-EM entry path for a broader range of res August 8th, 2017

New Quattro Field Emission ESEM Emphasizes Versatility and Ease of Use: Thermo Scientific Quattro ESEM allows materials science researchers to study nanoscale structure in almost any material under a range of environmental conditions August 8th, 2017

Grants/Sponsored Research/Awards/Scholarships/Gifts/Contests/Honors/Records

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

2-faced 2-D material is a first at Rice: Rice University materials scientists create flat sandwich of sulfur, molybdenum and selenium August 14th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Landscapes give latitude to 2-D material designers: Rice University, Oak Ridge scientists show growing atom-thin sheets on cones allows control of defects August 9th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project