Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Picosun’s new Picoflow™ diffusion enhancer expands the borders of ALD

Abstract:
ESPOO, Finland, 30th August, 2012 − Picosun Oy, Finnish, globally operating manufacturer of top-quality Atomic Layer Deposition (ALD) systems reports excellent deposition results with its new Picoflow™ diffusion enhancer feature. At customer sites in Asia and Europe, ultra-high conformality and uniformity ALD metal oxide thin films were deposited on extremely challenging high aspect ratio (HAR) trenches on silicon wafers and complicated microchannel structures on silicon chip.

Picosun’s new Picoflow™ diffusion enhancer expands the borders of ALD

Espoo, Finland | Posted on August 30th, 2012

The highest aspect ratios of the trenches were 1:300 and even 1:1000. In such deep structures conventional diffusion is not fast enough to carry the precursors to the bottom of the trench. Picosun's novel, innovative Picoflow™ diffusion enhancer feature lengthens the time the precursors stay in the reaction chamber ("stopped-flow") without risk of precursor back-diffusion to the inlets or particle formation. In addition to HAR structures, this feature is very useful also when coating powders or through-porous samples such as microchannel plates. Titanium dioxide film thickness variation down to only ±2 nm for 100 nm thick film has been achieved with Picoflow™ technology.

Microchannel silicon chips have several applications in e.g. microfluidistics, sensors and MEMS devices. With ALD thin films they can be protected, passivated or functionalized, changing the hydrophilicity, chemical, electrical or optical behaviour.

Silicon trench structures have a crucial function in today's micro- and nanoelectronics. The level of system integration and the amount of individual components in the devices has increased so much that the traditional 2D component stacking is not enough anymore. Therefore the production has moved towards 3D packaging where the components are piled on top of each other and the necessary connections are realized through so-called through-silicon-via (TSV) structures. TSVs are a prime example of trench structures and typically conductive metal films, seed layers or passivation layers are required to cover uniformly and conformally the insides of the trench. Picosun's Picoflow™ expands the possibilities of ALD in these new industrial applications for more efficient future electronics devices.

####

About Picosun Oy
Picosun Oy is Finland-based, world-wide operating manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of pioneering, exclusive ALD reactor design and manufacturing. Picosun’s global headquarters are located in Espoo, Finland, its production facilities in Kirkkonummi, Finland, its US headquarters in Detroit, Michigan, and its Asian headquarters in Singapore. Today, PICOSUN™ ALD tools are in continuous production and R&D use in numerous frontline industries and research organizations across four continents.

For more information, please click here

Contacts:
Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 9 297 6116

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Nanotechnology identifies brain tumor types through MRI 'virtual biopsy' in animal studies: If results are confirmed in humans, tumor cells could someday be diagnosed by MRI imaging and treated with tumor-specific IV injections; new NIH grant will fund future study May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Controlled Release of Anticorrosive Materials in Spot by Nanocarriers May 27th, 2015

Thin films

Sandia researchers first to measure thermoelectric behavior by 'Tinkertoy' materials May 20th, 2015

Defects can 'Hulk-up' materials: Berkeley lab study shows properly managed damage can boost material thermoelectric performances May 20th, 2015

Efficiency record for black silicon solar cells jumps to 22.1 percent: Aalto University's researchers improved their previous record by over 3 absolute percents in cooperation with Universitat Politècnica de Catalunya May 18th, 2015

Science and Technology of Advanced Materials (STAM): Reported successes and failures aid hot pursuit of superconductivity May 15th, 2015

Chip Technology

Advance in quantum error correction: Protocol corrects virtually all errors in quantum memory, but requires little measure of quantum states May 27th, 2015

Technology for Tomorrow’s Market Opportunities and Challenges: LetiDays Grenoble Presents the Possibilities: June 24-25 Event Includes Focus on IoT-Augmented Mobility and Leti’s Latest Results on Silicon Technologies, Sensors, Health Applications and Smart Cities May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Nanoelectronics

Technology for Tomorrow’s Market Opportunities and Challenges: LetiDays Grenoble Presents the Possibilities: June 24-25 Event Includes Focus on IoT-Augmented Mobility and Leti’s Latest Results on Silicon Technologies, Sensors, Health Applications and Smart Cities May 27th, 2015

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Announcements

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Nanotechnology identifies brain tumor types through MRI 'virtual biopsy' in animal studies: If results are confirmed in humans, tumor cells could someday be diagnosed by MRI imaging and treated with tumor-specific IV injections; new NIH grant will fund future study May 27th, 2015

Who needs water to assemble DNA? Non-aqueous solvent supports DNA nanotechnology May 27th, 2015

Controlled Release of Anticorrosive Materials in Spot by Nanocarriers May 27th, 2015

Tools

Seeing the action: UCSB researchers develop a novel device to image the minute forces and actions involved in cell membrane hemifusion May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project