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Home > Press > FEI Announces New Verios Extreme High Resolution SEM: System Delivers Powerful Resolution and Contrast on a Fast, Easy-to-Use Platform for Precise Measurement of Sensitive Materials in Semiconductor and Materials Science Applications

Abstract:
FEI (Nasdaq:FEIC), a leading instrumentation company providing imaging and analysis systems
for research and industry, extends its leadership in the high-resolution scanning electron microscopy (SEM) market with the launch of the new Verios(TM) XHR SEM. The Verios provides the
sub-nanometer resolution and enhanced contrast needed for precise measurements on beam-sensitive materials in advanced semiconductor
manufacturing and materials science applications.

FEI Announces New Verios Extreme High Resolution SEM: System Delivers Powerful Resolution and Contrast on a Fast, Easy-to-Use Platform for Precise Measurement of Sensitive Materials in Semiconductor and Materials Science Applications

Hillsboro, OR | Posted on July 30th, 2012

"The Verios XHR SEM extends the lifetime of SEM as an important
measurement tool in semiconductor process control labs by allowing
engineers to measure beam-sensitive materials and structures that are
too small for conventional SEM," stated Rudy Kellner, vice president &
general manager, Electronics Business Unit, FEI. "When combined with
our IC3D(TM) software, the Verios is a robust instrument that can
provide the precise measurements they need to control processes at the
22nm technology node and below."

Trisha Rice, FEI's vice president & general manager of the Materials
Science Business Unit adds, "For materials scientists, the Verios will
also enable important new insights by extending sub-nanometer imaging
and characterization to novel materials being developed today. This
will allow researchers to capture the high resolution, high contrast
images required, without the need to transition to TEM or other imaging
techniques."

The Verios is the second generation of FEI's leading XHR SEM family. At
low kV, where the performance of conventional SEM degrades
significantly, the Verios system's advanced optics deliver impressive
sensitivity to surface detail. It allows any user to switch quickly
between various operating conditions, maintain sample cleanliness, and
obtain sub-nanometer resolution at any accelerating voltage from 1 kV
to 30 kV.

In addition to its extreme high-resolution performance, the Verios
introduces new detection technologies. The optimized signal collection
and advanced filtering abilities not only provide higher and more
flexible contrast generation, but also allow for a greater range of
samples to be investigated. Many beam-sensitive or non-conductive
materials can now be accurately observed at the nanoscale, without any
preparation.

For more information, please visit: www.fei.com/Verios.

####

About FEI Company
FEI (Nasdaq:FEIC) is a leading diversified scientific instruments
company. It is a premier provider of electron- and ion-beam microscopes
and solutions for nanoscale applications across many industries:
industrial and academic materials research, life sciences,
semiconductors, data storage, natural resources and more. With more
than 60 years of technological innovation and leadership, FEI has set
the performance standard in transmission electron microscopes (TEM),
scanning electron microscopes (SEM) and DualBeams(TM), which combine a
SEM with a focused ion beam (FIB). Headquartered in Hillsboro, Ore.,
USA, FEI has over 2,200 employees and sales and service operations in
more than 50 countries around the world.

FEI Safe Harbor Statement

This news release contains forward-looking statements that include
statements regarding the performance capabilities and benefits of the
Verios XHR SEM system and extending the life of SEM technology. Factors
that could affect these forward-looking statements include but are not
limited to failure of the product or technology to perform as expected
and achieve anticipated results, the inability of customers to develop
and deploy the tool in a manner to take advantage of its features for
expected applications and our ability to manufacture, ship and deliver
the tools or software as expected. Please also refer to our Form 10-K,
Forms 10-Q, Forms 8-K and other filings with the U.S. Securities and
Exchange Commission for additional information on these factors and
other factors that could cause actual results to differ materially from
the forward-looking statements. FEI assumes no duty to update
forward-looking statements.

For more information, please click here

Contacts:
Sandy Fewkes, Principal (media contact)
MindWrite Communications, Inc
+1 408 224 4024


FEI Company
Fletcher Chamberlin (investors and analysts)
Investor Relations
+1 503 726 7710

Copyright © FEI Company

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