Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Inpria Joins SEMATECH’s Resist Center at UAlbany NanoCollege for Advanced EUV Resist Development

Abstract:
SEMATECH, a global consortium of chipmakers, announced today that Inpria, a developer of chemical materials for the deposition of high-performance oxide thin films, has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

Inpria Joins SEMATECH’s Resist Center at UAlbany NanoCollege for Advanced EUV Resist Development

Albany, NY and Corvallis, OR | Posted on April 24th, 2012

As a resist member of SEMATECH's lithography program, Inpria will collaborate with SEMATECH engineers on critical issues for resist in extreme ultraviolet (EUV) lithography. Inpria's inorganic resists have resolved 11 nm line/space features and exhibit extremely high etch resistance. In this collaboration, Inpria and SEMATECH will extend such high-resolution resists to qualify the 0.5 NA EUV imaging optics at the heart of the major upgrades underway to support resist research for 11 nm half-pitch and below in the RMDC facilities. Inpria will also work to increase the photosensitivity of its resist materials to meet productivity requirements for future manufacturing applications.

"Our partnership with SEMATECH provides Inpria the opportunity to rapidly increase the rate of development for our EUV lithography materials," said Andrew Grenville, CEO of Inpria. "We are excited to combine SEMATECH's proven track record operating leading-edge patterning facilities with our experience creating novel chemistries for high-resolution inorganic resist. This collaboration further demonstrates our commitment to tackle the grand challenges in lithography faced by the semiconductor industry."

"We're looking forward to working with Inpria in our mutual effort to develop leading‑edge resists and materials, and accelerate process availability for EUV pilot line manufacturing," said Stefan Wurm, director of Lithography, SEMATECH. "This partnership will help strengthen the RMDC's ability to address critical resist issues in advanced materials and accelerate the search for new solutions to our common technology challenges."

"Further supporting Governor Andrew Cuomo's declaration that New York is open for business, we are delighted to welcome Inpria as the newest global technology partner at CNSE's Albany NanoTech Complex," said Richard Brilla, CNSE vice president for strategy, alliances and consortia. "The critical effort to enable advanced lithographic technologies for manufacturing will be enhanced by the addition of Inpria, which strengthens the CNSE-SEMATECH partnership and New York's recognition as the worldwide hub for nanotechnology innovation and commercialization."

The partnership will be based on SEMATECH's extensive network of hardware and research expertise, semiconductor experience, and highly respected market leadership and on Inpria's transformational semiconductor patterning materials and processes. SEMATECH's RMDC will provide access to two micro-exposure tools (METs) as well as several metrology tools located at the College of Nanoscale Science and Engineering of the University at Albany and the University of California, Berkeley.

At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.

####

About SEMATECH
SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, this year celebrates 25 years of excellence in accelerating the commercialization of technology innovations into manufacturing solutions. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org.

Twitter: www.twitter.com/sematechnews

About Inpria

Inpria designs and synthesizes solution precursors for the deposition of high-performance inorganic thin films, addressing critical needs in device fabrication and patterning across multiple industries. Our core materials technology provides the unique ability to deposit from solution extremely smooth dense metal oxide films that are directly photopatternable. Working together with our global network of partners, we are committed to developing a new class of electronic materials for the semiconductor industry. Information about Inpria Corporation can be found at www.inpria.com.

About CNSE

The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 2,700 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Novellus Systems. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells. CNSE’s Smart Systems Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse. For information, visit www.cnse.albany.edu.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Media Relations
257 Fuller Road, Suite 2200
Albany, NY 12203
o: 518-649-1041
m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Small but heading for the big time: Nanobiotix half year results for the six months ended 30 June 2015, in line with expectations: Major clinical achievements and corporate developments August 28th, 2015

A new technique to make drugs more soluble August 28th, 2015

Nanocatalysts improve processes for the petrochemical industry August 28th, 2015

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

Thin films

Electrospray solves longstanding problem in Langmuir-Blodgett assembly: The electrospray spreads water-soluble solvents on water while minimizing mixing August 20th, 2015

Scientists achieve major breakthrough in thin-film magnetism August 17th, 2015

Rice, Penn State open center for 2-D coatings: National Science Foundation selects universities to develop atom-thin materials with industry partners August 13th, 2015

Thin films offer promise for ferroelectric devices: Researchers at Tokyo Institute of Technology demystify the ferroelectric properties observed in hafnium-oxide-based thin films, revealing a potentially useful device material August 3rd, 2015

Chip Technology

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

Kwansei Gakuin University in Hyogo, Japan, uses Raman microscopy to study crystallographic defects in silicon carbide wafers August 25th, 2015

A little light interaction leaves quantum physicists beaming August 25th, 2015

'Magic' sphere for information transfer: Professor at the Lomonosov Moscow State University made the «magic» sphere for information transfer August 24th, 2015

Announcements

Small but heading for the big time: Nanobiotix half year results for the six months ended 30 June 2015, in line with expectations: Major clinical achievements and corporate developments August 28th, 2015

A new technique to make drugs more soluble August 28th, 2015

Nanocatalysts improve processes for the petrochemical industry August 28th, 2015

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

Alliances/Trade associations/Partnerships/Distributorships

National Space Society Welcomes Janet Ivey As New NSS Governor: Janet Ivey of Janet's Planet is NOW IN ORBIT as a member of the Board of Governors of the National Space Society August 27th, 2015

National Space Society Welcomes Geoff Notkin As New NSS Governor August 26th, 2015

XEI Scientific appoints EM Resolutions as Distributor for the UK & Irish markets August 11th, 2015

Omni Nano and Time Warner Cable Partner to Provide Nanotechnology Education to the Boys & Girls Clubs of Los Angeles: A $10,000 Donation to Benefit Youth of Los Angeles County's Boys & Girls Clubs August 4th, 2015

Research partnerships

Nanocatalysts improve processes for the petrochemical industry August 28th, 2015

Announcing Oxford Instruments and School of Physics signing a Memorandum of Understanding August 26th, 2015

Researchers combine disciplines, computational programs to determine atomic structure August 26th, 2015

Developing Component Scale Composites Using Nanocarbons August 26th, 2015

Printing/Lithography/Inkjet/Inks

These microscopic fish are 3-D-printed to do more than swim: Researchers demonstrate a novel method to build microscopic robots with complex shapes and functionalities August 26th, 2015

New research may enhance display & LED lighting technology: Large-area integration of quantum dots and photonic crystals produce brighter and more efficient light August 9th, 2015

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

2015 Bulk Graphene Pricing Webinar:The Graphene Council to Host Webinar in Collaboration with Fullerex July 15th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic