Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Plasma Diagnostics for the Researcher

EQP Plasma Monitor with Integrated Driven Electrode
EQP Plasma Monitor with Integrated Driven Electrode

Abstract:
Hiden Analytical mass spectrometers provide direct real-time plasma monitoring for analysis of both process ion and process neutral species, addressing a pressure range from 10E-3mbar to atmosphere and all featuring our latest, fastest Series 8 PC interface. All systems are fully compatible with Windows 7 and XP operating systems.

Plasma Diagnostics for the Researcher

Warrington, UK | Posted on April 3rd, 2012

The EQ/PS Series offer optional positive/negative ion or positive ion-only measurement of process ion intensity, mass and ion energy, the pulse ion counting detector giving a continuous dynamic range of a full seven decades. Atomic mass range is up to 1000amu with energy ranges of +/-100eV and +/-1000eV. The advanced low-diameter ion transfer optic enables deep penetration of the sampling orifice up to 750mm within the process chamber. Multiple scan modes provides scanning of all key parameters for system setup optimisation, including scanning of mass range, process ion energy, electron multiplier voltage against ion intensity. An internal electron bombardment ion source enables ionisation of neutral species.

Pressure reduction stages with turbomolecular pumping are used to maintain mass spectrometer operation in a UHV environment - single stage, double stage or triple stage dependent on the process pressure. System options include magnetic screening, integrated driven electrodes, electron attachment mode for electro-negative species, linear motion drives and water cooling for high-power applications.

Applications include diverse areas of plasma etching, deposition, coating and process development including atmospheric plasma needle performance quantification.

####

For more information, please click here

Contacts:
Hiden Analytical Ltd
420 Europa Boulevard
Warrington, WA5 7UN, England
tel: +44 (0)1925 445 225

Copyright © Hiden Analytical Ltd

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Like us on Facebook:

Follow us on Twitter:

Related News Press

News and information

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Groundbreaking research to help control liquids at micro and nano scales July 3rd, 2015

Discovery of nanotubes offers new clues about cell-to-cell communication July 2nd, 2015

Announcements

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Groundbreaking research to help control liquids at micro and nano scales July 3rd, 2015

NIST Group Maps Distribution of Carbon Nanotubes in Composite Materials July 2nd, 2015

Tools

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

NIST ‘How-To’ Website Documents Procedures for Nano-EHS Research and Testing July 1st, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project