Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Plasma Diagnostics for the Researcher

EQP Plasma Monitor with Integrated Driven Electrode
EQP Plasma Monitor with Integrated Driven Electrode

Abstract:
Hiden Analytical mass spectrometers provide direct real-time plasma monitoring for analysis of both process ion and process neutral species, addressing a pressure range from 10E-3mbar to atmosphere and all featuring our latest, fastest Series 8 PC interface. All systems are fully compatible with Windows 7 and XP operating systems.

Plasma Diagnostics for the Researcher

Warrington, UK | Posted on April 3rd, 2012

The EQ/PS Series offer optional positive/negative ion or positive ion-only measurement of process ion intensity, mass and ion energy, the pulse ion counting detector giving a continuous dynamic range of a full seven decades. Atomic mass range is up to 1000amu with energy ranges of +/-100eV and +/-1000eV. The advanced low-diameter ion transfer optic enables deep penetration of the sampling orifice up to 750mm within the process chamber. Multiple scan modes provides scanning of all key parameters for system setup optimisation, including scanning of mass range, process ion energy, electron multiplier voltage against ion intensity. An internal electron bombardment ion source enables ionisation of neutral species.

Pressure reduction stages with turbomolecular pumping are used to maintain mass spectrometer operation in a UHV environment - single stage, double stage or triple stage dependent on the process pressure. System options include magnetic screening, integrated driven electrodes, electron attachment mode for electro-negative species, linear motion drives and water cooling for high-power applications.

Applications include diverse areas of plasma etching, deposition, coating and process development including atmospheric plasma needle performance quantification.

####

For more information, please click here

Contacts:
Hiden Analytical Ltd
420 Europa Boulevard
Warrington, WA5 7UN, England
tel: +44 (0)1925 445 225

Copyright © Hiden Analytical Ltd

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Like us on Facebook:

Follow us on Twitter:

Related News Press

News and information

NUS researchers invent new test kit for quick, accurate and low-cost screening of diseases: Test results are denoted by a color change and could be further analyzed by a smartphone app, making it attractive as a point-of-care diagnostic device September 19th, 2018

Silver nanoparticles are toxic for aquatic organisms: A research team at the UPV/EHU-University of the Basque Country has analysed how zebrafish are affected in the long term by exposure to silver particles September 19th, 2018

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Researchers develop microbubble scrubber to destroy dangerous biofilms September 19th, 2018

Announcements

NUS researchers invent new test kit for quick, accurate and low-cost screening of diseases: Test results are denoted by a color change and could be further analyzed by a smartphone app, making it attractive as a point-of-care diagnostic device September 19th, 2018

Silver nanoparticles are toxic for aquatic organisms: A research team at the UPV/EHU-University of the Basque Country has analysed how zebrafish are affected in the long term by exposure to silver particles September 19th, 2018

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Researchers develop microbubble scrubber to destroy dangerous biofilms September 19th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project