Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Riber and imec extend successful collaboration on next-generation III-V logic CMOS

Abstract:
Riber, a leading supplier of Molecular Beam Epitaxy (MBE) equipment and services to the compound semiconductor industry, today signed an agreement with imec to further collaborate on epitaxy process technologies for next-generation III-V CMOS devices. The agreement follows a successful collaboration in the field of advanced channel materials for high-performance CMOS scaling, germanium and compound semiconductor (III-V) materials.

Riber and imec extend successful collaboration on next-generation III-V logic CMOS

Bezons, France and Leuven, Belgium | Posted on March 13th, 2012

In the quest for miniaturization, technology has come to a point where CMOS scaling beyond the 45nm node cannot be achieved by simply reducing transistor dimensions. Moreover, the need for small form factors coupled with the stringent requirement of low current leakage/low energy performance has become critical, especially in next-generation mobile devices. Within imec's Germanium and III-V devices program, imec and its core partners are exploring the efficacy of high-mobility channel materials for CMOS devices for advanced nodes. Together with Riber, the bottleneck issue of gate stack passivation was tackled, resulting in effective passivation techniques for Ge and GaAs. Riber's 200mm III-V and metal oxide MBE cluster offered the required extremely clean background and absence of any interfering gas phase components, enabling material and interface control on the atomic level. This resulted in the successful development of a passivation scheme for the MOS gate stack module. Amongst others, it was shown that controlling the GaAs surface reconstruction followed by a H2S passivation treatment and in-situ high-k deposition was crucial to create a well-passivated MOS structure with record-low interfacial state density. Moreover, the world's first successful MOS capacitors on a new high-mobility candidate material, GeSn, were made in the 200mm Riber MBE cluster.

In the new project, the suitability of Riber's 300 mm UHV chamber (ISA300), equipped with in-situ tools for surface analysis, and clustered with state-of-the-art 300mm Si CMOS production equipment, will be evaluated for the production of advanced CMOS devices based on high-mobility Ge and IIIV channels. The aim of the project is threefold 1) use Riber's UHV chamber for study and control of surface structures; 2) bring knowledge on gate stack passivation from a 200mm research environment to a 300mm fab compatible platform; 3) demonstrate the technological viability of a 300mm MBE-module, clustered with ‘standard' 300mm Si CMOS production equipment.

Frédérick Goutard, Riber CEO: "Participating in early stage research is intrinsic to Riber's aim to strengthen our leading position in the compound semiconductor industry. Molecular Beam Epitaxy (MBE) is considered to be most efficient technology to leverage compound semiconductors towards high-end applications with a tremendous market potential, such as mobile phones, telecom, automotive, satellite, .... Using our ISA300 chamber in a 300mm cluster configuration will allow for higher performance in terms of devices operating at high frequencies with reduced energy consumption, etc. We are therefore convinced that this project will clearly demonstrate the attractiveness of our technology in the production of next generations CMOS devices."

Hans Lebon VP fab operations and process step R&D at imec: "Through the collaboration with Riber, imec can integrate the power of UHV-systems into state-of-the-art semiconductors production equipment on large diameter wafers. This will allow the application of powerful in-situ surface analysis tools in CVD and ALD equipment which so far was not feasible due to the gas phase environment. Also, MBE-like UHV-techniques for interface control and passivation come in reach which will benefit the development of next generation CMOS technologies."

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of about 1,900 people includes more than 500 industrial residents and guest researchers. In 2010, imec's revenue (P&L) was 285 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

About Riber:

Riber designs and produces Molecular Beam Epitaxy (MBE) systems as well as evaporation sources and cells for the semiconductor industry. This high-tech equipment is essential for the manufacturing of compound semiconductor materials and new materials that are used in numerous consumer applications, such as new information technologies, OLED flat screens and new generation solar cells.

Riber is listed on Euronext Paris Compartment “C” and is part of the CAC Small, CAC Mid & Small and CAC IT indexes.

ISIN: FR0000075954 Reuters code: RIBE.PA Bloomberg code: RIB: FP

Riber has been innovation certified by OSEO, the dedicated French innovation agency, enabling it to qualify for French innovation mutual funds (FCPI).

For more information, please click here

Contacts:
Riber:
Alpana Kar / Cyril Combe

T: +33 153 65 68 68

Imec:
Hanne Degans
External Communications Officer

T: +32 16 28 17 69
M: +32 486 06 51 75

For Imec:
Barbara Kalkis
Maestro Marketing & PR
T: +1 408 996 9975
M: +1 408 529 4210

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Sandia researchers make solid ground toward better lithium-ion battery interfaces: Reducing the traffic jam in batteries December 13th, 2017

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

Leti to Demo Wristband with Embedded Sensors to Diagnose Sleep Apnea: APNEAband, Which Will Be Demonstrated at CES 2018, Also Monitors Mountain Sickness, Dehydration, Dialysis Treatment Response and Epileptic Seizures December 12th, 2017

Chip Technology

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

Leti Integrates Hybrid III-V Silicon Lasers on 200mm Wafers with Standard CMOS Process December 6th, 2017

Announcements

Sandia researchers make solid ground toward better lithium-ion battery interfaces: Reducing the traffic jam in batteries December 13th, 2017

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

Leti to Demo Wristband with Embedded Sensors to Diagnose Sleep Apnea: APNEAband, Which Will Be Demonstrated at CES 2018, Also Monitors Mountain Sickness, Dehydration, Dialysis Treatment Response and Epileptic Seizures December 12th, 2017

Alliances/Trade associations/Partnerships/Distributorships

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Nano Global, Arm Collaborate on Artificial Intelligence Chip to Drive Health Revolution by Capturing and Analyzing Molecular Data in Real Time November 21st, 2017

EC Project Aims at Creating and Commercializing Cyber-Physical-System Solutions November 14th, 2017

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Research partnerships

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Wheat gets boost from purified nanotubes: Rice University toxicity study shows plant growth enhanced by -- but only by -- purified nanotubes December 6th, 2017

Copper will replace toxic palladium and expensive platinum in the synthesis of medications: The effectiveness of copper nanoparticles as a catalyst has been proven December 5th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project