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| Impedans SEMION for pulsed plasma diagnostics |
Abstract:
Henniker Scientific are pleased to announce that the Impedans Semion retarding field ion energy and flux analysers now feature an integrated time resolved operation mode for high time resolution studies of technological plasmas.
Impedans SEMION for pulsed plasma diagnostics
Warrington, UK | Posted on March 6th, 2012Pulsed plasmas are routinely used in a wide range of nano-materials processing and production, from plasma polymerised surfaces to super-hard tribiological coatings, and there is a fundamental requirement to understand the energy and flux of the ions that contribute to the thin film coating properties.
The Semion is a compact ion energy and flux analyser that directly measures these parameters at the substrate position, with an energy range up to 2500eV and at process pressures to 300mTorr, without the need for differential pumping.
The new time resolved mode feature extends the range of plasmas that can be studied to include pulsed systems such as HIPIMS, with ion energy distributions and flux now accessible for pulse frequencies up to 500kHz at a time resolution of just 44nS
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Contacts:
Henniker Scientific Ltd
Cavendish House Birchwood Park Warrington WA3 6BU England
Tel: +44 (0) 1925 811254
Fax: +44 (0) 1925 800035
Copyright © Henniker Scientific Ltd
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