Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Fraunhofer CNT Signs Joint Development Framework Agreement with Major Equipment Supplier

Abstract:
Fraunhofer CNT today announced the signing of a Joint Development Agreement with ASM International N.V. (ASM). The agreement provides a framework within which a variety of new projects will be executed over the course of the coming five years.

Fraunhofer CNT Signs Joint Development Framework Agreement with Major Equipment Supplier

Dresden, Germany | Posted on December 7th, 2011

Under the terms of the agreement, Fraunhofer CNT and ASM will develop new processes and integration methods, starting on ASM's Advance® series A412 300 mm vertical batch furnace configured for atomic layer deposition (ALD) and low pressure chemical vapor deposition (LPCVD). Fraunhofer CNT will provide space and infrastructure for the A412 system in its clean room. In the first project, the objective is to develop and integrate novel batch ALD processes and materials for use in CMOS logic technology.

In addition to 40 clean room tools, scientists at Fraunhofer CNT offer considerable expertise in process and materials characterization as well as the characterization of nano-electronic devices. Pre-processed test or product wafers provided by ASM or its customers will be processed at Fraunhofer CNT under strict cross contamination requirements as developed through several years in cooperation with leading edge IC manufacturers. Thus, the results can be transferred immediately into production. This enables our partners to reduce their capital expenditures and accelerate their developments.

Prof. Peter Kücher, head of the Fraunhofer CNT stated, "We are looking forward to a successful long term cooperation in developing innovative, cost competitive processes for CVD and ALD together with a leading global equipment supplier such as ASM".

Ivo Raaijmakers, Chief Technology Officer of ASM added, "We have successfully collaborated with CNT for over 5 years, and are confident that this new cooperative R&D framework will enable other successful projects".

####

About Fraunhofer CNT / ASM
Fraunhofer CNT, which was established on 31st May 2005, is an example of the close cooperation between research and manufacturing for which Dresden offers excellent conditions. Due to its advantageous location within the “Silicon Saxony”, it provides ideal collaboration opportunities for research institutes and material/equipment manufacturers in the field of micro- and nanoelectronics.

Within the premises of Infineon there is a clean room area (clean room class 1000) of about 800 m² available for the research of Fraunhofer CNT as well as an infrastructure which meets industry standard. The main focus is on the development of special process steps for the manufacturing of high performance chips as well as process modules to be integrated in micro- or nanoelectronic systems. Furthermore, Fraunhofer CNT works on the development of new analytic and metrology methods and on the analysis of wafer processing results for which considerable laboratories are available.

www.cnt.fraunhofer.de

For more information, please click here

Contacts:
Peter Felten

Copyright © Fraunhofer CNT / ASM

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Leti to Demo Wristband with Embedded Sensors to Diagnose Sleep Apnea: APNEAband, Which Will Be Demonstrated at CES 2018, Also Monitors Mountain Sickness, Dehydration, Dialysis Treatment Response and Epileptic Seizures December 12th, 2017

Leti Develops World’s First Micro-Coolers for CERN Particle Detectors: Leti Design, Fabrication and Packaging Expertise Extends to Very Large Scientific Instruments December 11th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

Nanoelectronics

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Leti Will Present 11 Papers and Host More-than-Moore Technologies Workshop November 14th, 2017

The next generation of power electronics? Gallium nitride doped with beryllium: How to cut down energy loss in power electronics? The right kind of doping November 9th, 2017

Researchers bring optical communication onto silicon chips: Ultrathin films of a semiconductor that emits and detects light can be stacked on top of silicon wafers October 23rd, 2017

Announcements

Leti to Demo Wristband with Embedded Sensors to Diagnose Sleep Apnea: APNEAband, Which Will Be Demonstrated at CES 2018, Also Monitors Mountain Sickness, Dehydration, Dialysis Treatment Response and Epileptic Seizures December 12th, 2017

Leti Develops World’s First Micro-Coolers for CERN Particle Detectors: Leti Design, Fabrication and Packaging Expertise Extends to Very Large Scientific Instruments December 11th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

Tools

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

Deben reports on a new publication from scientists at La Trobe University in Australia where their CT500 stage is used in micro scanning tomography experiments to better understand ceramic matrix composites under load November 29th, 2017

Alliances/Trade associations/Partnerships/Distributorships

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Nano Global, Arm Collaborate on Artificial Intelligence Chip to Drive Health Revolution by Capturing and Analyzing Molecular Data in Real Time November 21st, 2017

EC Project Aims at Creating and Commercializing Cyber-Physical-System Solutions November 14th, 2017

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project