Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Fraunhofer CNT Signs Joint Development Framework Agreement with Major Equipment Supplier

Abstract:
Fraunhofer CNT today announced the signing of a Joint Development Agreement with ASM International N.V. (ASM). The agreement provides a framework within which a variety of new projects will be executed over the course of the coming five years.

Fraunhofer CNT Signs Joint Development Framework Agreement with Major Equipment Supplier

Dresden, Germany | Posted on December 7th, 2011

Under the terms of the agreement, Fraunhofer CNT and ASM will develop new processes and integration methods, starting on ASM's Advance® series A412 300 mm vertical batch furnace configured for atomic layer deposition (ALD) and low pressure chemical vapor deposition (LPCVD). Fraunhofer CNT will provide space and infrastructure for the A412 system in its clean room. In the first project, the objective is to develop and integrate novel batch ALD processes and materials for use in CMOS logic technology.

In addition to 40 clean room tools, scientists at Fraunhofer CNT offer considerable expertise in process and materials characterization as well as the characterization of nano-electronic devices. Pre-processed test or product wafers provided by ASM or its customers will be processed at Fraunhofer CNT under strict cross contamination requirements as developed through several years in cooperation with leading edge IC manufacturers. Thus, the results can be transferred immediately into production. This enables our partners to reduce their capital expenditures and accelerate their developments.

Prof. Peter Kücher, head of the Fraunhofer CNT stated, "We are looking forward to a successful long term cooperation in developing innovative, cost competitive processes for CVD and ALD together with a leading global equipment supplier such as ASM".

Ivo Raaijmakers, Chief Technology Officer of ASM added, "We have successfully collaborated with CNT for over 5 years, and are confident that this new cooperative R&D framework will enable other successful projects".

####

About Fraunhofer CNT / ASM
Fraunhofer CNT, which was established on 31st May 2005, is an example of the close cooperation between research and manufacturing for which Dresden offers excellent conditions. Due to its advantageous location within the “Silicon Saxony”, it provides ideal collaboration opportunities for research institutes and material/equipment manufacturers in the field of micro- and nanoelectronics.

Within the premises of Infineon there is a clean room area (clean room class 1000) of about 800 m² available for the research of Fraunhofer CNT as well as an infrastructure which meets industry standard. The main focus is on the development of special process steps for the manufacturing of high performance chips as well as process modules to be integrated in micro- or nanoelectronic systems. Furthermore, Fraunhofer CNT works on the development of new analytic and metrology methods and on the analysis of wafer processing results for which considerable laboratories are available.

www.cnt.fraunhofer.de

For more information, please click here

Contacts:
Peter Felten

Copyright © Fraunhofer CNT / ASM

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Engineers develop new sensor to detect tiny individual nanoparticles September 2nd, 2014

Future solar panels September 2nd, 2014

Nano-forests to reveal secrets of cells September 2nd, 2014

Raman Whispering Gallery Detects Nanoparticles September 1st, 2014

Nanoelectronics

Competition for Graphene: Berkeley Lab Researchers Demonstrate Ultrafast Charge Transfer in New Family of 2D Semiconductors August 26th, 2014

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

3-D nanostructure could benefit nanoelectronics, gas storage: Rice U. researchers predict functional advantages of 3-D boron nitride July 15th, 2014

Announcements

Engineers develop new sensor to detect tiny individual nanoparticles September 2nd, 2014

Future solar panels September 2nd, 2014

Nano-forests to reveal secrets of cells September 2nd, 2014

Raman Whispering Gallery Detects Nanoparticles September 1st, 2014

Tools

Raman Whispering Gallery Detects Nanoparticles September 1st, 2014

New analytical technology reveals 'nanomechanical' surface traits August 29th, 2014

Ultra-Low Frequency Vibration Isolation Stabilizes Scanning Tunneling Microscopy at UCLA’s Nano-Research Group August 28th, 2014

Measure Both Elastic and Viscous Properties with AFM Using Asylum Research’s Exclusive AM-FM Viscoelastic Mapping Mode August 28th, 2014

Alliances/Partnerships/Distributorships

Leading European communications companies and research organizations have launched an EU project developing the future 5th Generation cellular mobile networks August 28th, 2014

JPK expands availability of instrumentation in the USA – appointing new distributors – launched a new web site to support the US market - AFM now available to US users August 26th, 2014

Sunblock poses potential hazard to sea life August 20th, 2014

SouthWest NanoTechnologies Appoints Matteson-Ridolfi for U.S. Distribution of its SMW™ Specialty Multiwall Carbon Nanotubes August 13th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE