Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, has successfully scaled up several new, important ALD processes. Of compound materials, various new sulfides, e.g. Gd2O2S (based on the process originally developed by Prof. Mikko Ritala's group at University of Helsinki, Finland), indium sulfide and zinc sulfide, and oxides, e.g. antimony oxide and Al2O3/Ta2O5 nanolaminates and mixed oxides (also at lower temperatures), are now available for industrial scale processes. Of metals, gold, copper, silver and ruthenium, and of metallic compound materials, TiAlCN and TiN, have also been successfully deposited by novel ALD processes on industrial scale wafer sizes.

Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Espoo, Finland | Posted on November 30th, 2011

The new sulfides and oxides have various applications in e.g. optics, electronics and display industries and as multifunctional protective layers. ALD deposited metal/metallic layers, on the other hand, find their customers especially in MEMS/NEMS (Micro/Nanoelectromechanical systems) and other electronics and integrated circuits industries, where e.g. through-silicon-vias (TSV) and other high aspect ratio (HAR) structures are a common approach in modern 3D-stacked chip architectures. When the via or HAR trench dimensions narrow down to nanometer scale, ALD is the only possible thin film coating method with which e.g. contact metallization, seed, barrier or adhesion layers can be deposited with satisfactory conformality, uniformity and pinhole-free quality.

"In order to keep our spearheading position in serving world-class industrial customers, it is of utmost importance to stay in the lead also in ALD process development. Picosun's close connections to top level ALD research groups worldwide and the unrivaled ALD expertise of our own personnel make Picosun always your number one partner, not only as ALD equipment provider, but also in ALD process development. With Picosun's efficient and innovative production-scale high throughput ALD tool design, the process scale-up is fast and easy and never compromises Picosun's trademark, unparalleledly excellent film and process quality," summarizes Picosun's Managing Director Juhana Kostamo.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of dedicated, exclusive ALD reactor design and manufacturing. Picosunís global headquarters are located in Espoo, Finland, its production facilities in Masala, Kirkkonummi, and its US headquarters in Detroit, Michigan. Picosunís SUNALEô ALD tools are chosen for production by various industries across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Rutgers, NIST physicists report technology with potential for sub-micron optical switches March 31st, 2015

Prototype 'nanoneedles' generate new blood vessels in mice: Scientists have developed tiny 'nanoneedles' that have successfully prompted parts of the body to generate new blood vessels, in a trial in mice March 31st, 2015

Super sensitive measurement of magnetic fields March 31st, 2015

Nanomedicine pioneer Mauro Ferrari at ETH Zurich March 31st, 2015

Chip Technology

Rutgers, NIST physicists report technology with potential for sub-micron optical switches March 31st, 2015

Next important step toward quantum computer: Scientists at the University of Bonn have succeeded in linking 2 different quantum systems March 30th, 2015

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

Announcements

Rutgers, NIST physicists report technology with potential for sub-micron optical switches March 31st, 2015

Prototype 'nanoneedles' generate new blood vessels in mice: Scientists have developed tiny 'nanoneedles' that have successfully prompted parts of the body to generate new blood vessels, in a trial in mice March 31st, 2015

Super sensitive measurement of magnetic fields March 31st, 2015

Nanomedicine pioneer Mauro Ferrari at ETH Zurich March 31st, 2015

Tools

New Applications Brochure on Complex Motion Control Systems for Scientific Research March 31st, 2015

'Atomic chicken-wire' is key to faster DNA sequencing March 30th, 2015

LAMDAMAP 2015 hosted by the University March 26th, 2015

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Societyís Annual Meeting, held 18-21 March 2015 March 26th, 2015

Industrial

Industrial Nanotech, Inc. Announces Next Large Order from the Oil and Gas Industry March 26th, 2015

Young NTU Singapore spin-off clinches S$4.3 million joint venture with Chinese commercial giant March 23rd, 2015

Nanodevice Invented in Iran to Detect Hydrogen Sulfide in Oil, Gas Industry March 20th, 2015

Industrial Production of Nano-Based PVC Products in Iran March 20th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE