Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, has successfully scaled up several new, important ALD processes. Of compound materials, various new sulfides, e.g. Gd2O2S (based on the process originally developed by Prof. Mikko Ritala's group at University of Helsinki, Finland), indium sulfide and zinc sulfide, and oxides, e.g. antimony oxide and Al2O3/Ta2O5 nanolaminates and mixed oxides (also at lower temperatures), are now available for industrial scale processes. Of metals, gold, copper, silver and ruthenium, and of metallic compound materials, TiAlCN and TiN, have also been successfully deposited by novel ALD processes on industrial scale wafer sizes.

Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Espoo, Finland | Posted on November 30th, 2011

The new sulfides and oxides have various applications in e.g. optics, electronics and display industries and as multifunctional protective layers. ALD deposited metal/metallic layers, on the other hand, find their customers especially in MEMS/NEMS (Micro/Nanoelectromechanical systems) and other electronics and integrated circuits industries, where e.g. through-silicon-vias (TSV) and other high aspect ratio (HAR) structures are a common approach in modern 3D-stacked chip architectures. When the via or HAR trench dimensions narrow down to nanometer scale, ALD is the only possible thin film coating method with which e.g. contact metallization, seed, barrier or adhesion layers can be deposited with satisfactory conformality, uniformity and pinhole-free quality.

"In order to keep our spearheading position in serving world-class industrial customers, it is of utmost importance to stay in the lead also in ALD process development. Picosun's close connections to top level ALD research groups worldwide and the unrivaled ALD expertise of our own personnel make Picosun always your number one partner, not only as ALD equipment provider, but also in ALD process development. With Picosun's efficient and innovative production-scale high throughput ALD tool design, the process scale-up is fast and easy and never compromises Picosun's trademark, unparalleledly excellent film and process quality," summarizes Picosun's Managing Director Juhana Kostamo.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun’s global headquarters are located in Espoo, Finland, its production facilities in Masala, Kirkkonummi, and its US headquarters in Detroit, Michigan. Picosun’s SUNALE™ ALD tools are chosen for production by various industries across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Graphene holds up under high pressure: Used in filtration membranes, ultrathin material could help make desalination more productive April 24th, 2017

Nanoparticle vaccine shows potential as immunotherapy to fight multiple cancer types April 24th, 2017

Russian scientists create new system of concrete building structures: Sientists of Peter the Great Saint-Petersburg Polytechnic University developed a new construction technology April 24th, 2017

Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017

Chip Technology

'Neuron-reading' nanowires could accelerate development of drugs for neurological diseases April 12th, 2017

Nanometrics to Announce First Quarter Financial Results on May 2, 2017 April 11th, 2017

AIM Photonics Presents Cutting-Edge Integrated Photonics Technology Developments to Packed House at OFC 2017, the Optical Networking and Communication Conference & Exhibition April 11th, 2017

Photonics breakthough paving the way for improved wireless communication systems: The work could bolster the wireless revolution underway with efficiencies several orders of magnitude April 5th, 2017

Announcements

Graphene holds up under high pressure: Used in filtration membranes, ultrathin material could help make desalination more productive April 24th, 2017

Nanoparticle vaccine shows potential as immunotherapy to fight multiple cancer types April 24th, 2017

Russian scientists create new system of concrete building structures: Sientists of Peter the Great Saint-Petersburg Polytechnic University developed a new construction technology April 24th, 2017

Two-dimensional melting of hard spheres experimentally unravelled after 60 years: First definitive experimental evidence of two-dimensional melting of hard spheres April 21st, 2017

Tools

NanoMONITOR shares its latest developments concerning the NanoMONITOR Software and the Monitoring stations April 21st, 2017

Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017

MSP Corporation Announces a New Breakthrough in Monodisperse Droplet Generation April 19th, 2017

Researchers Succeed in Localizing Individual Atoms in Nanostructures Using First Cryo-Transfer LEAP Atom Probe April 19th, 2017

Industrial

Better living through pressure: Functional nanomaterials made easy April 19th, 2017

Rare-earths become water-repellent only as they age March 22nd, 2017

CRMGroup in Belgium uses a Deben three point bending stage in the development of new steel & coated steel products for automotive and other industrial applications March 21st, 2017

Imaging the inner workings of a sodium-metal sulfide battery for first time: Understanding how the structural and chemical makeup of the material changes during the charge/discharge process could help scientists advance battery design for future energy storage needs March 9th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project