Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, has successfully scaled up several new, important ALD processes. Of compound materials, various new sulfides, e.g. Gd2O2S (based on the process originally developed by Prof. Mikko Ritala's group at University of Helsinki, Finland), indium sulfide and zinc sulfide, and oxides, e.g. antimony oxide and Al2O3/Ta2O5 nanolaminates and mixed oxides (also at lower temperatures), are now available for industrial scale processes. Of metals, gold, copper, silver and ruthenium, and of metallic compound materials, TiAlCN and TiN, have also been successfully deposited by novel ALD processes on industrial scale wafer sizes.

Picosun introduces several industrially scalable ALD processes Source: Picosun Oy

Espoo, Finland | Posted on November 30th, 2011

The new sulfides and oxides have various applications in e.g. optics, electronics and display industries and as multifunctional protective layers. ALD deposited metal/metallic layers, on the other hand, find their customers especially in MEMS/NEMS (Micro/Nanoelectromechanical systems) and other electronics and integrated circuits industries, where e.g. through-silicon-vias (TSV) and other high aspect ratio (HAR) structures are a common approach in modern 3D-stacked chip architectures. When the via or HAR trench dimensions narrow down to nanometer scale, ALD is the only possible thin film coating method with which e.g. contact metallization, seed, barrier or adhesion layers can be deposited with satisfactory conformality, uniformity and pinhole-free quality.

"In order to keep our spearheading position in serving world-class industrial customers, it is of utmost importance to stay in the lead also in ALD process development. Picosun's close connections to top level ALD research groups worldwide and the unrivaled ALD expertise of our own personnel make Picosun always your number one partner, not only as ALD equipment provider, but also in ALD process development. With Picosun's efficient and innovative production-scale high throughput ALD tool design, the process scale-up is fast and easy and never compromises Picosun's trademark, unparalleledly excellent film and process quality," summarizes Picosun's Managing Director Juhana Kostamo.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun’s global headquarters are located in Espoo, Finland, its production facilities in Masala, Kirkkonummi, and its US headquarters in Detroit, Michigan. Picosun’s SUNALE™ ALD tools are chosen for production by various industries across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Review of the recent advances of 2D nanomaterials in Lit-ion batteries March 15th, 2019

Converting biomass by applying mechanical force Nanoscientists discover new mechanism to cleave cellulose effectively and in an environmentally friendly way March 15th, 2019

Exotic “second sound” phenomenon observed in pencil lead: At relatively balmy temperatures, heat behaves like sound when moving through graphite, study reports March 15th, 2019

Quantum sensing method measures minuscule magnetic fields: MIT researchers find a new way to make nanoscale measurements of fields in more than one dimension March 15th, 2019

Chip Technology

Exotic “second sound” phenomenon observed in pencil lead: At relatively balmy temperatures, heat behaves like sound when moving through graphite, study reports March 15th, 2019

Pushing Past Limits: Junkai Jiang receives prestigious Ph.D. Student Fellowship from IEEE Electron Devices Society March 14th, 2019

Nanometrics Announces $80 Million Share Repurchase Program March 14th, 2019

When semiconductors stick together, materials go quantum: A new study led by Berkeley Lab reveals how aligned layers of atomically thin semiconductors can yield an exotic new quantum material March 12th, 2019

Announcements

Review of the recent advances of 2D nanomaterials in Lit-ion batteries March 15th, 2019

Converting biomass by applying mechanical force Nanoscientists discover new mechanism to cleave cellulose effectively and in an environmentally friendly way March 15th, 2019

Exotic “second sound” phenomenon observed in pencil lead: At relatively balmy temperatures, heat behaves like sound when moving through graphite, study reports March 15th, 2019

Quantum sensing method measures minuscule magnetic fields: MIT researchers find a new way to make nanoscale measurements of fields in more than one dimension March 15th, 2019

Tools

Lightweight metal foams become bone hard and explosion proof after being nanocoated March 14th, 2019

Nanometrics Announces $80 Million Share Repurchase Program March 14th, 2019

New optical imaging system could be deployed to find tiny tumors: Near-infrared technology pinpoints fluorescent probes deep within living tissue; may be used to detect cancer earlier March 8th, 2019

New blueprint for understanding, predicting and optimizing complex nanoparticles: Guidelines have the potential to transform the fields of optoelectronics, bio-imaging and energy harvesting March 1st, 2019

Industrial

Defects help nanomaterial soak up more pollutant in less time: Rice U. researchers find new way to remove PFOS from industrial wastewater March 13th, 2019

Zips on the nanoscale: New method of synthesising nanographene on metal oxide surfaces March 5th, 2019

Picosun’s ALD encapsulation prevents electronics degradation February 15th, 2019

Rice U. lab adds porous envelope to aluminum plasmonics: Scientists marry gas-trapping framework to light-powered nanocatalysts February 10th, 2019

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project