Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Nanometrics Introduces Atlas II OCD System: New Capabilities Enable Metrology of Device Structures at 1x Nodes

Abstract:
Nanometrics Incorporated (NASDAQ: NANO), a leading supplier of advanced metrology systems, today introduced the Atlas® II optical critical dimension (OCD) system, a next-generation tool for high-performance process control metrology. Incorporating innovations in optical components, precision wafer positioning, and new software analysis, the Atlas II enables measurements of the smallest semiconductor design features in development, including complex device structures at 1x nm technology nodes.

Nanometrics Introduces Atlas II OCD System: New Capabilities Enable Metrology of Device Structures at 1x Nodes

Milpitas, CA | Posted on November 8th, 2011

New optical components provide metrology users with unprecedented stability in focus performance, allowing precise and repeatable measurements of critical device features. The technology innovations broaden the system's application to a range of structures, including asymmetric spacers and 3-D gratings such as those used in double patterning lithography. The Atlas II is also capable of on-device measurement, which eliminates the need for scribe-line marks and complicated correlations and enables direct and reliable process control of device manufacturing.

A doubling of wafer throughput, along with an order of magnitude improvement in wafer positioning precision, enables significant increases in data volume required to control next-generation semiconductor processes, and lowers the system's cost of ownership. Atlas II systems are installed with Nanometrics' new NanoCD™ Suite, to enable analysis of the most critical and complex process steps in advanced technology nodes, supporting combined film thickness and OCD metrology.

The Atlas II is compatible with Nanometrics' Lynx™ cluster metrology platform, which allows customers to combine other complementary metrology modules with the thin film and OCD system.

"This is a significant milestone for Nanometrics. With the introduction of Atlas II, our OCD metrology platform takes a large step forward to enable essential features of our customers' next-generation devices," said David Doyle, vice president of Nanometrics' Semiconductor Business Unit. "These advancements are important to both performance and improved device yields, especially for 3-D device architectures, including FinFET, where data richness and sensitivity to critical parameters is paramount."

Nanometrics has installed the first Atlas II at a major semiconductor manufacturer and anticipates fan out of the product to high volume manufacturing in early 2012.

"OCD technology has demonstrated its ability to be a disruptive force in process control metrology," said Dr. Timothy J. Stultz, president and chief executive officer. "Our customers are already validating benefits the Atlas II offers them in throughput and performance. These benefits translate directly into faster ramps to yield and lower manufacturing costs."

####

About Nanometrics Incorporated
Nanometrics is a leading provider of advanced, high-performance process control metrology systems used primarily in the fabrication of semiconductors, high-brightness LEDs, data storage devices and solar photovoltaics. Nanometrics’ automated and integrated metrology systems measure critical dimensions, device structures, overlay registration, topography and various thin film properties, including film thickness as well as optical, electrical and material properties. The company’s process control solutions are deployed throughout the fabrication process, from front-end-of-line substrate manufacturing, to high-volume production of semiconductors and other devices, to advanced wafer-scale packaging applications. Nanometrics’ systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Select Global Market under the symbol NANO. Nanometrics’ website is http://www.nanometrics.com.

Forward Looking Statements

This press release contains forward-looking statements including, but not limited to, statements regarding the capabilities of the company’s metrology products, market leadership and growth of OCD metrology. Although Nanometrics believes that the expectations reflected in the forward-looking statements are reasonable, expectations regarding product capabilities, market share and growth are subject to a number of risks, including changes in customer spending plans and technology roadmaps, worldwide economic conditions and the continued technological leadership of our products. For additional information and considerations regarding the risks faced by Nanometrics, see its annual report on Form 10-K for the year ended January 1, 2011 as filed with the Securities and Exchange Commission, as well as other periodic reports filed with the SEC from time to time. Nanometrics disclaims any obligation to update information contained in any forward-looking statement.

Nanometrics, Atlas, Lynx and NanoCD are trademarks or registered trademarks of Nanometrics, Inc.

For more information, please click here

Contacts:
Company Contact:
Dave Viera
408-545-6000 tel


Investor Relations Contact:
Claire McAdams
Headgate Partners LLC
530.265.9899 tel

Copyright © Nanometrics Incorporated

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Conductive Inks: booming to $2.8 billion by 2024 April 17th, 2014

High-temperature plasmonics eyed for solar, computer innovation April 17th, 2014

INSCX™ exchange to present Exchange trade reporting mechanism for engineered nanomaterials (NMs) to UK regulation agencies, insurers and upstream/downstream users April 17th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Chip Technology

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Obducat has launched a new generation of SINDRE® Nano Imprint production system April 11th, 2014

Scientists in Singapore develop novel ultra-fast electrical circuits using light-generated tunneling currents April 10th, 2014

Clean Shot at Manufacturing Course…For Less April 9th, 2014

Announcements

More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014

High-temperature plasmonics eyed for solar, computer innovation April 17th, 2014

INSCX™ exchange to present Exchange trade reporting mechanism for engineered nanomaterials (NMs) to UK regulation agencies, insurers and upstream/downstream users April 17th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Tools

More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014

Scientists Capture Ultrafast Snapshots of Light-Driven Superconductivity: X-rays reveal how rapidly vanishing 'charge stripes' may be behind laser-induced high-temperature superconductivity April 16th, 2014

Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014

Malvern reports on the publication of the 1000th peer-reviewed paper to cite NanoSight’s Nanoparticle Tracking Analysis, NTA April 16th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE