Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International

Wikipedia Affiliate Button

Home > Press > Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template
Copyright : A*STAR
Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template

Copyright : A*STAR

Abstract:
The ever-increasing demand for enhanced performance in electronic devices such as solar cells, sensors and batteries is matched by a need to find ways to make smaller electrical components. Several techniques have been proposed for creating tiny, nanoscale structures on silicon, but these types of ‘nanopatterning' tend to involve low-throughput, high-cost approaches not suited to large-scale production. Sivashankar Krishnamoorthy and co-workers at the A*STAR Institute of Materials Research and Engineering have now found a simple and robust method for nanopatterning the entire surface of a silicon wafer.

Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Singapore | Posted on October 1st, 2011

Krishnamoorthy's technique exploits the self-assembling properties of polymeric nanoparticles, known as reverse micelles. These unconventional particles have a structure consisting of a polar core and an outer layer of non-polar ‘arms'. Reverse micelles can form highly ordered arrays on the surface of a silicon wafer. The resulting ‘coating' can be used as a lithographic resist to mask the silicon surface during the etching process.

Although other groups have developed similar approaches in previous studies, Krishnamoorthy and co-workers are the first to develop a process that can pattern the entire surface of a silicon wafer with highly uniform nanostructures (see image). The authors have further developed a method to quantify nanostructure variations across large areas using simple optical tools, paving the way for high-throughput nanometrology.

In an additional improvement to the process, the researchers exposed the self-assembled polymer layer to a titanium chloride vapour. The titanium chloride selectively accumulates within each micelle's polar core. A blast of oxygen plasma then strips away the polymer to leave a pattern of tiny titanium oxide dots. This process converts a soft organic template into a hard inorganic mask much more suited to etching ultra-fine features into the silicon, producing arrays of nanopillars less than 10 nanometers apart.

The findings are expected to be highly adaptable. "Although we have demonstrated the process for creating silicon nanopillars, it is very versatile and can be readily extended to achieve nanopatterns of most other materials, for example, metals, semiconductors and polymers through appropriate post-processing of the initial copolymer templates," explains Krishnamoorthy. "Other patterns besides nanopillars could also be created, depending on the pattern-transfer processing employed."

Krishnamoorthy and his team are already exploring the potential applications of their technique. "We are currently making use of this process to create nanodevices for sensing, data storage, and energy applications, such as batteries and solar cells," Krishnamoorthy says.

The A*STAR-affiliated researchers contributing to this research are from the Institute of Materials Research and Engineering

References

Krishnamoorthy, S., Manipaddy, K. K., and Yap, F. L. Wafer-level self-organized copolymer templates for nanolithography with sub-50 nm feature and spatial resolutions. Advanced Functional Materials 21, 1102-1112 (2011).

####

For more information, please click here

Copyright © A*STAR Institute of Microelectronics (IME)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Link to article on A*STAR research:

Link to research paper “Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions”:

Institute of Materials Research and Engineering:

A*STAR

Related News Press

News and information

Perfect diamagnetism observation of high-temperature superconductivity in compressed H2S June 14th, 2019

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

University of Konstanz researchers create uniform-shape polymer nanocrystals: Researchers from the University of Konstanz's CRC 1214 'Anisotropic Particles as Building Blocks: Tailoring Shape, Interactions and Structures' generate uniform-shape nanocrystals using direct polymeriz June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

Chip Technology

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

UCI scientists create new class of two-dimensional materials: Fabrication could help unlock new quantum computing and energy technologies June 6th, 2019

Analog Bits and GLOBALFOUNDRIES Deliver Differentiated Analog and Mixed Signal IP for High-Performance Mobile and Compute Applications: Analog Bits’ Analog and Mixed Signal IPs Including Various PLLs, PCIe Reference Clock, Sensors and Power Circuits with GLOBALFOUNDRIES 12nm Fin June 5th, 2019

Self Assembly

University of Konstanz researchers create uniform-shape polymer nanocrystals: Researchers from the University of Konstanz's CRC 1214 'Anisotropic Particles as Building Blocks: Tailoring Shape, Interactions and Structures' generate uniform-shape nanocrystals using direct polymeriz June 14th, 2019

DNA origami to scale-up molecular motors June 13th, 2019

Multistep self-assembly opens door to new reconfigurable materials April 19th, 2019

Can a flowing liquid-like material maintain its structural order like crystals? February 27th, 2019

Nanoelectronics

Beyond 1 and 0: Engineers boost potential for creating successor to shrinking transistors May 30th, 2019

Laser technique could unlock use of tough material for next-generation electronics: Researchers make graphene tunable, opening up its band gap to a record 2.1 electronvolts May 30th, 2019

From 2D to 1D: Atomically quasi '1D' wires using a carbon nanotube template: New bulk synthesis method for nanowires of molybdenum telluride for nanoelectronics April 19th, 2019

2D borophene gets a closer look: Rice, Northwestern find new ways to image, characterize unique material April 11th, 2019

Announcements

Perfect diamagnetism observation of high-temperature superconductivity in compressed H2S June 14th, 2019

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

University of Konstanz researchers create uniform-shape polymer nanocrystals: Researchers from the University of Konstanz's CRC 1214 'Anisotropic Particles as Building Blocks: Tailoring Shape, Interactions and Structures' generate uniform-shape nanocrystals using direct polymeriz June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project