Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template
Copyright : A*STAR
Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template

Copyright : A*STAR

Abstract:
The ever-increasing demand for enhanced performance in electronic devices such as solar cells, sensors and batteries is matched by a need to find ways to make smaller electrical components. Several techniques have been proposed for creating tiny, nanoscale structures on silicon, but these types of ‘nanopatterning' tend to involve low-throughput, high-cost approaches not suited to large-scale production. Sivashankar Krishnamoorthy and co-workers at the A*STAR Institute of Materials Research and Engineering have now found a simple and robust method for nanopatterning the entire surface of a silicon wafer.

Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Singapore | Posted on October 1st, 2011

Krishnamoorthy's technique exploits the self-assembling properties of polymeric nanoparticles, known as reverse micelles. These unconventional particles have a structure consisting of a polar core and an outer layer of non-polar ‘arms'. Reverse micelles can form highly ordered arrays on the surface of a silicon wafer. The resulting ‘coating' can be used as a lithographic resist to mask the silicon surface during the etching process.

Although other groups have developed similar approaches in previous studies, Krishnamoorthy and co-workers are the first to develop a process that can pattern the entire surface of a silicon wafer with highly uniform nanostructures (see image). The authors have further developed a method to quantify nanostructure variations across large areas using simple optical tools, paving the way for high-throughput nanometrology.

In an additional improvement to the process, the researchers exposed the self-assembled polymer layer to a titanium chloride vapour. The titanium chloride selectively accumulates within each micelle's polar core. A blast of oxygen plasma then strips away the polymer to leave a pattern of tiny titanium oxide dots. This process converts a soft organic template into a hard inorganic mask much more suited to etching ultra-fine features into the silicon, producing arrays of nanopillars less than 10 nanometers apart.

The findings are expected to be highly adaptable. "Although we have demonstrated the process for creating silicon nanopillars, it is very versatile and can be readily extended to achieve nanopatterns of most other materials, for example, metals, semiconductors and polymers through appropriate post-processing of the initial copolymer templates," explains Krishnamoorthy. "Other patterns besides nanopillars could also be created, depending on the pattern-transfer processing employed."

Krishnamoorthy and his team are already exploring the potential applications of their technique. "We are currently making use of this process to create nanodevices for sensing, data storage, and energy applications, such as batteries and solar cells," Krishnamoorthy says.

The A*STAR-affiliated researchers contributing to this research are from the Institute of Materials Research and Engineering

References

Krishnamoorthy, S., Manipaddy, K. K., and Yap, F. L. Wafer-level self-organized copolymer templates for nanolithography with sub-50 nm feature and spatial resolutions. Advanced Functional Materials 21, 1102-1112 (2011).

####

For more information, please click here

Copyright © A*STAR Institute of Microelectronics (IME)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Link to article on A*STAR research:

Link to research paper “Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions”:

Institute of Materials Research and Engineering:

A*STAR

Related News Press

News and information

The relationship between charge density waves and superconductivity? It's complicated July 19th, 2018

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Chip Technology

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Nanometrics to Announce Second Quarter Financial Results on July 31, 2018 July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

GLOBALFOUNDRIES Surpasses $2 Billion in Design Win Revenue on 22FDX® Technology : With 50 client designs and growing, 22FDX proves its value as a cost-effective solution for power-sensitive applications July 9th, 2018

Self Assembly

DNA drives design principles for lighter, thinner optical displays: Lighter gold nanoparticles could replace thicker, heavier layered polymers used in displays’ back-reflectors June 27th, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Self-assembling 3D battery would charge in seconds May 22nd, 2018

Engineered polymer membranes could be new option for water treatment May 6th, 2018

Nanoelectronics

GLOBALFOUNDRIES Surpasses $2 Billion in Design Win Revenue on 22FDX® Technology : With 50 client designs and growing, 22FDX proves its value as a cost-effective solution for power-sensitive applications July 9th, 2018

High-power electronics keep their cool with new heat-conducting crystals July 6th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

Quantum Interference May Be Key to Smaller Insulators: Breakthrough could jumpstart further miniaturization of transistors June 6th, 2018

Announcements

The relationship between charge density waves and superconductivity? It's complicated July 19th, 2018

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project