Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template
Copyright : A*STAR
Fine arrays of nanopillars can be patterned onto a silicon surface using a self-assembling polymer template

Copyright : A*STAR

Abstract:
The ever-increasing demand for enhanced performance in electronic devices such as solar cells, sensors and batteries is matched by a need to find ways to make smaller electrical components. Several techniques have been proposed for creating tiny, nanoscale structures on silicon, but these types of ‘nanopatterning' tend to involve low-throughput, high-cost approaches not suited to large-scale production. Sivashankar Krishnamoorthy and co-workers at the A*STAR Institute of Materials Research and Engineering have now found a simple and robust method for nanopatterning the entire surface of a silicon wafer.

Nanomaterials: Pillars of the assembly - Advanced electronics beckon thanks to self-assembling templates that allow the creation of nanoscale features on silicon wafers

Singapore | Posted on October 1st, 2011

Krishnamoorthy's technique exploits the self-assembling properties of polymeric nanoparticles, known as reverse micelles. These unconventional particles have a structure consisting of a polar core and an outer layer of non-polar ‘arms'. Reverse micelles can form highly ordered arrays on the surface of a silicon wafer. The resulting ‘coating' can be used as a lithographic resist to mask the silicon surface during the etching process.

Although other groups have developed similar approaches in previous studies, Krishnamoorthy and co-workers are the first to develop a process that can pattern the entire surface of a silicon wafer with highly uniform nanostructures (see image). The authors have further developed a method to quantify nanostructure variations across large areas using simple optical tools, paving the way for high-throughput nanometrology.

In an additional improvement to the process, the researchers exposed the self-assembled polymer layer to a titanium chloride vapour. The titanium chloride selectively accumulates within each micelle's polar core. A blast of oxygen plasma then strips away the polymer to leave a pattern of tiny titanium oxide dots. This process converts a soft organic template into a hard inorganic mask much more suited to etching ultra-fine features into the silicon, producing arrays of nanopillars less than 10 nanometers apart.

The findings are expected to be highly adaptable. "Although we have demonstrated the process for creating silicon nanopillars, it is very versatile and can be readily extended to achieve nanopatterns of most other materials, for example, metals, semiconductors and polymers through appropriate post-processing of the initial copolymer templates," explains Krishnamoorthy. "Other patterns besides nanopillars could also be created, depending on the pattern-transfer processing employed."

Krishnamoorthy and his team are already exploring the potential applications of their technique. "We are currently making use of this process to create nanodevices for sensing, data storage, and energy applications, such as batteries and solar cells," Krishnamoorthy says.

The A*STAR-affiliated researchers contributing to this research are from the Institute of Materials Research and Engineering

References

Krishnamoorthy, S., Manipaddy, K. K., and Yap, F. L. Wafer-level self-organized copolymer templates for nanolithography with sub-50 nm feature and spatial resolutions. Advanced Functional Materials 21, 1102-1112 (2011).

####

For more information, please click here

Copyright © A*STAR Institute of Microelectronics (IME)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Link to article on A*STAR research:

Link to research paper “Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions”:

Institute of Materials Research and Engineering:

A*STAR

Related News Press

News and information

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Novel 'converter' heralds breakthrough in ultra-fast data processing at nanoscale: Invention bagged four patents and could potentially make microprocessor chips work 1,000 times faster October 20th, 2017

Strange but true: turning a material upside down can sometimes make it softer October 20th, 2017

Leti Coordinating Project to Develop Innovative Drivetrains for 3rd-generation Electric Vehicles: CEA Tech’s Contribution Includes Liten’s Knowhow in Magnetic Materials and Simulation And Leti’s Expertise in Wide-bandgap Semiconductors October 20th, 2017

Chip Technology

Novel 'converter' heralds breakthrough in ultra-fast data processing at nanoscale: Invention bagged four patents and could potentially make microprocessor chips work 1,000 times faster October 20th, 2017

MIPT scientists revisit optical constants of ultrathin gold films October 20th, 2017

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Self Assembly

Physicists gain new insights into nanosystems with spherical confinement: Enormous potential for the targeted delivery of pharmaceutical agents and the creation of tailored nanoparticles July 27th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Nanotubes that build themselves April 14th, 2017

Nanocages for gold particles: what is happening inside? March 16th, 2017

Nanoelectronics

Nanometrics Announces Preliminary Results for the Third Quarter of 2017: Quarterly Results Impacted by Delays in Revenue Recognition on Multiple Systems into Japan October 12th, 2017

Seeing the next dimension of computer chips: Researchers image perfectly smooth side-surfaces of 3-D silicon crystals with a scanning tunneling microscope, paving the way for smaller and faster computing devices October 11th, 2017

Columbia engineers invent breakthrough millimeter-wave circulator IC October 6th, 2017

Tungsten offers nano-interconnects a path of least resistance: Crystalline tungsten shows insight and promise in addressing the challenges of electrical interconnects that have high resistivity at the nanoscale October 4th, 2017

Announcements

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Novel 'converter' heralds breakthrough in ultra-fast data processing at nanoscale: Invention bagged four patents and could potentially make microprocessor chips work 1,000 times faster October 20th, 2017

Strange but true: turning a material upside down can sometimes make it softer October 20th, 2017

Leti Coordinating Project to Develop Innovative Drivetrains for 3rd-generation Electric Vehicles: CEA Tech’s Contribution Includes Liten’s Knowhow in Magnetic Materials and Simulation And Leti’s Expertise in Wide-bandgap Semiconductors October 20th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project