Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > New Etch Process Developed at the CNST uses Argon Pulsing to Improve Silicon Etch Rate and Selectivity

Abstract:
Engineers in the CNST NanoFab have developed a new plasma etching technique for silicon which improves the etch rate, the mask selectivity, and the sidewall profile by optimizing the addition of argon to the process flow.

New Etch Process Developed at the CNST uses Argon Pulsing to Improve Silicon Etch Rate and Selectivity

Gaithersburg, MD | Posted on September 30th, 2011

Small and high aspect ratio silicon structures can now be easily and more rapidly fabricated in the NanoFab using fluorinated plasma chemistry that is inherently isotropic. Directly adding argon to a typical SF6/C4F8 plasma primarily causes dilution and reduces the etch rate. By alternating the etch step with an argon-only step, both high selectivity and high etch rates were obtained while maintaining anisotropic etching. In a deep silicon etch, C4F8 is used to protect the Si sidewalls and SF6 is used to etch. Mixing argon with the etchant gases provides very limited or no improvement to the etch rate due to dilution. However, alternating argon surface bombardment steps with the chemical etch steps results in a four-fold increase in the silicon etch rate while maintaining vertical sidewalls. The silicon etch rate increases with the argon step time, independent of the SF6 step time, and the argon bombardment step is rate-determining. It influences the etch rate, as well as the selectivity and etching profile. The engineers postulate that argon surface bombardment renders the top atomic layers of the silicon amorphous, and then gas phase fluorine can react with and remove the silicon. With the long etch times associated with deep silicon trench etching, this faster process is likely to become widely used.

Effect of alternating Ar and SF6/C4F8 gas flow in Si nano-structure plasma etching, L. Chen, V. Luciani, and H. Miao, Microelectronic Engineering 88, 2470-2473 (2011).

####

For more information, please click here

Contacts:
Lei Chen
301-975-2908

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Dr Barbara Armbruster promoted to Worldwide Sales and Marketing Director for XEI Scientific September 27th, 2016

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

UNAM develops successful nano edible coating which increases life food September 27th, 2016

Researchers at the Catalan Institute of Nanoscience and Nanotechnology show that bending semiconductors generates electricity September 26th, 2016

Laboratories

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

NIST Patents Single-Photon Detector for Potential Encryption and Sensing Apps September 16th, 2016

Electron beam microscope directly writes nanoscale features in liquid with metal ink September 16th, 2016

Govt.-Legislation/Regulation/Funding/Policy

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

PHENOMEN is a FET-Open Research Project aiming to lay the foundations a new information technology September 19th, 2016

NIST Patents Single-Photon Detector for Potential Encryption and Sensing Apps September 16th, 2016

Chip Technology

Researchers at the Catalan Institute of Nanoscience and Nanotechnology show that bending semiconductors generates electricity September 26th, 2016

Mexican scientist in the Netherlands seeks to achieve data transmission ... speed of light September 20th, 2016

Towards Stable Propagation of Light in Nano-Photonic Fibers September 20th, 2016

PHENOMEN is a FET-Open Research Project aiming to lay the foundations a new information technology September 19th, 2016

Discoveries

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

UNAM develops successful nano edible coating which increases life food September 27th, 2016

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Announcements

Dr Barbara Armbruster promoted to Worldwide Sales and Marketing Director for XEI Scientific September 27th, 2016

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

UNAM develops successful nano edible coating which increases life food September 27th, 2016

Printing/Lithography/Inkjet/Inks/Bio-printing

Iran to hold intl. school on application of nanomaterials in medicine September 20th, 2016

Tailored probes for atomic force microscopes: 3-D laser lithography enhances microscope for studying nanostructures in biology and engineering/ publication in Applied Physics Letters August 11th, 2016

Smarter self-assembly opens new pathways for nanotechnology: Brookhaven Lab scientists discover a way to create billionth-of-a-meter structures that snap together in complex patterns with unprecedented efficiency August 9th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic