Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > New Etch Process Developed at the CNST uses Argon Pulsing to Improve Silicon Etch Rate and Selectivity

Abstract:
Engineers in the CNST NanoFab have developed a new plasma etching technique for silicon which improves the etch rate, the mask selectivity, and the sidewall profile by optimizing the addition of argon to the process flow.

New Etch Process Developed at the CNST uses Argon Pulsing to Improve Silicon Etch Rate and Selectivity

Gaithersburg, MD | Posted on September 30th, 2011

Small and high aspect ratio silicon structures can now be easily and more rapidly fabricated in the NanoFab using fluorinated plasma chemistry that is inherently isotropic. Directly adding argon to a typical SF6/C4F8 plasma primarily causes dilution and reduces the etch rate. By alternating the etch step with an argon-only step, both high selectivity and high etch rates were obtained while maintaining anisotropic etching. In a deep silicon etch, C4F8 is used to protect the Si sidewalls and SF6 is used to etch. Mixing argon with the etchant gases provides very limited or no improvement to the etch rate due to dilution. However, alternating argon surface bombardment steps with the chemical etch steps results in a four-fold increase in the silicon etch rate while maintaining vertical sidewalls. The silicon etch rate increases with the argon step time, independent of the SF6 step time, and the argon bombardment step is rate-determining. It influences the etch rate, as well as the selectivity and etching profile. The engineers postulate that argon surface bombardment renders the top atomic layers of the silicon amorphous, and then gas phase fluorine can react with and remove the silicon. With the long etch times associated with deep silicon trench etching, this faster process is likely to become widely used.

Effect of alternating Ar and SF6/C4F8 gas flow in Si nano-structure plasma etching, L. Chen, V. Luciani, and H. Miao, Microelectronic Engineering 88, 2470-2473 (2011).

####

For more information, please click here

Contacts:
Lei Chen
301-975-2908

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Laboratories

NREL’s Advanced Atomic Layer Deposition Enables Lithium-Ion Battery Technology: May 10th, 2017

Discovery of new transparent thin film material could improve electronics and solar cells: Conductivity is highest-ever for thin film oxide semiconductor material May 6th, 2017

Sandia develops math techniques to improve computational efficiency in quantum chemistry May 5th, 2017

Scientists Set Record Resolution for Drawing at the One-Nanometer Length Scale: An electron microscope-based lithography system for patterning materials at sizes as small as a single nanometer could be used to create and study materials with new properties May 1st, 2017

Govt.-Legislation/Regulation/Funding/Policy

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Stanford scientists use nanotechnology to boost the performance of key industrial catalyst May 18th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Chip Technology

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

Discoveries

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Sensors detect disease markers in breath May 19th, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

Announcements

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

New stem cell technique shows promise for bone repair January 25th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Nanowire 'inks' enable paper-based printable electronics: Highly conductive films make functional circuits without adding high heat January 4th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project