Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

Abstract:
The RASIRC poster describes the advantages of water vapor over ozone in the use of ALD and provides results from Fraunhofer's testing that shows 14% faster growth rates with water vapor compared to ozone.

RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

San Diego, CA | Posted on September 17th, 2011

RASIRC«, the steam purification company, announced that the company presented a poster on the topic "Water Vapor Versus Ozone for the Growth of ALD Films" at the 26th European Photovoltaic Solar Energy Conference and Exhibitionheld September 5-9, 2011 in Hamburg, Germany. The RASIRC poster presentation describes the advantages of water vapor over ozone in the use of Atomic Layer Deposition (ALD) and provides results from testing that show faster growth rates with water vapor compared to ozone. RASIRC products deliver ultrapure water vapor for photovoltaics, nanotechnology, semiconductor, and other manufacturing applications.

"Passivation layers are a major component of next generation crystalline solar cell devices. Al2O3 films grown through ALD is one technology path," said Jeff Spiegelman, president and founder of RASIRC. "Our poster shows ALD layers can be grown effectively using water vapor instead of ozone, which is more expensive, equipment intensive, and hazardous. The major limitation to commercial acceptance of ALD is the slow growth rate. The replacement of ozone with the faster growth rate of water vapor is one step towards commercialization."

The testing, performed by the Fraunhofer Institute in Dresden, Germany, ran 100 ALD cycles of trimethyl aluminum (TMA)/Water and TMA/Ozone precursors. Water vapor grew at a rate of 10.25 ┼/cycle while ozone grew 0.9 ┼/cycle. The growth rate was 14% faster with water vapor. The water vapor generated less than 40 particles added in random pattern, typical with this process. A RASIRC RainMaker« humidification system (RHS) was used to generate the ultrapure water vapor.

The patented RASIRC RHS generates and delivers precise amounts of ultrapure water vapor purified for both ionic contaminants and dissolved gases. The RHS adds controlled amounts of pure water vapor directly into any carrier gas stream. It can humidify inert, corrosive, and flammable gases, such as hydrogen and oxygen, at a wide range of flow rates. The system can deliver into atmosphere as well as vacuum process pressures.

The 26th EU PVSEC highlighted progress in research, technological development, and production processes, bringing together all key specialists of the industry to make it the most informative platform for the global PV Solar sector.

####

About RASIRC«
RASIRC products purify and deliver ultrapure liquids and gases. RASIRC technology is the first to generate ultra-high-purity (UHP) steam from de-ionized water. It reduces cost, increases yield, and improves safety. RASIRC dryers, humidifiers, and steam generators are of critical importance for many applications in the semiconductor, pharmaceutical, medical, biological, fuel cell, and power industries. Custom systems are available upon request. Call +1-858-259-1220, e-mail , or visit www.rasirc.com.

For more information, please click here

Contacts:
RASIRC
Andrea Roberts
+1 858.451.8666

Copyright © RASIRC«

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

White Paper PDF Link:

Related News Press

News and information

Pens filled with high-tech inks for do-it-yourself sensors March 3rd, 2015

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

Heightened Efficiency in Purification of Wastewater Using Nanomembranes March 3rd, 2015

UC research partnership explores how to best harness solar power March 2nd, 2015

Chip Technology

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

International research partnership tricks the light fantastic March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

onic Present breakthrough in CMOS-based Transceivers for mm-Wave Radar Systems March 1st, 2015

Announcements

Pens filled with high-tech inks for do-it-yourself sensors March 3rd, 2015

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

Heightened Efficiency in Purification of Wastewater Using Nanomembranes March 3rd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Pens filled with high-tech inks for do-it-yourself sensors March 3rd, 2015

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

Heightened Efficiency in Purification of Wastewater Using Nanomembranes March 3rd, 2015

Breakthrough in OLED technology March 2nd, 2015

Tools

Forbidden quantum leaps possible with high-res spectroscopy March 2nd, 2015

International research partnership tricks the light fantastic March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

Mass spectrometers with optimised hydrogen pumping March 1st, 2015

Patents/IP/Tech Transfer/Licensing

onic Present breakthrough in CMOS-based Transceivers for mm-Wave Radar Systems March 1st, 2015

New Paper-like Material Could Boost Electric Vehicle Batteries: Researchers create silicon nanofibers 100 times thinner than human hair for potential applications in batteries for electric cars and personal electronics February 20th, 2015

Nanotech Discoveries Move from Lab to Marketplace with Lintec Deal: Licensing Partnership Brings Together University Technology, New Richardson-Based Facility Directed by Alumni February 9th, 2015

Graphenea granted patent on graphene transfer February 9th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE