Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

Abstract:
The RASIRC poster describes the advantages of water vapor over ozone in the use of ALD and provides results from Fraunhofer's testing that shows 14% faster growth rates with water vapor compared to ozone.

RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

San Diego, CA | Posted on September 17th, 2011

RASIRC®, the steam purification company, announced that the company presented a poster on the topic "Water Vapor Versus Ozone for the Growth of ALD Films" at the 26th European Photovoltaic Solar Energy Conference and Exhibitionheld September 5-9, 2011 in Hamburg, Germany. The RASIRC poster presentation describes the advantages of water vapor over ozone in the use of Atomic Layer Deposition (ALD) and provides results from testing that show faster growth rates with water vapor compared to ozone. RASIRC products deliver ultrapure water vapor for photovoltaics, nanotechnology, semiconductor, and other manufacturing applications.

"Passivation layers are a major component of next generation crystalline solar cell devices. Al2O3 films grown through ALD is one technology path," said Jeff Spiegelman, president and founder of RASIRC. "Our poster shows ALD layers can be grown effectively using water vapor instead of ozone, which is more expensive, equipment intensive, and hazardous. The major limitation to commercial acceptance of ALD is the slow growth rate. The replacement of ozone with the faster growth rate of water vapor is one step towards commercialization."

The testing, performed by the Fraunhofer Institute in Dresden, Germany, ran 100 ALD cycles of trimethyl aluminum (TMA)/Water and TMA/Ozone precursors. Water vapor grew at a rate of 10.25 Å/cycle while ozone grew 0.9 Å/cycle. The growth rate was 14% faster with water vapor. The water vapor generated less than 40 particles added in random pattern, typical with this process. A RASIRC RainMaker® humidification system (RHS) was used to generate the ultrapure water vapor.

The patented RASIRC RHS generates and delivers precise amounts of ultrapure water vapor purified for both ionic contaminants and dissolved gases. The RHS adds controlled amounts of pure water vapor directly into any carrier gas stream. It can humidify inert, corrosive, and flammable gases, such as hydrogen and oxygen, at a wide range of flow rates. The system can deliver into atmosphere as well as vacuum process pressures.

The 26th EU PVSEC highlighted progress in research, technological development, and production processes, bringing together all key specialists of the industry to make it the most informative platform for the global PV Solar sector.

####

About RASIRC®
RASIRC products purify and deliver ultrapure liquids and gases. RASIRC technology is the first to generate ultra-high-purity (UHP) steam from de-ionized water. It reduces cost, increases yield, and improves safety. RASIRC dryers, humidifiers, and steam generators are of critical importance for many applications in the semiconductor, pharmaceutical, medical, biological, fuel cell, and power industries. Custom systems are available upon request. Call +1-858-259-1220, e-mail , or visit www.rasirc.com.

For more information, please click here

Contacts:
RASIRC
Andrea Roberts
+1 858.451.8666

Copyright © RASIRC®

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

White Paper PDF Link:

Related News Press

News and information

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Research brief: UMN researchers use green gold to rapidly detect and identify harmful bacteria August 15th, 2018

Particles pull last drops of oil from well water: Rice University engineers find nanoscale solution to 'produced water' problem August 15th, 2018

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

Chip Technology

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Flipping the switch on supramolecular electronics August 14th, 2018

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Scientists squeeze nanocrystals in a liquid droplet into a solid-like state and back again: Simple chemical technique transforms crystal mixture where 2 liquids meet August 9th, 2018

Announcements

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Research brief: UMN researchers use green gold to rapidly detect and identify harmful bacteria August 15th, 2018

Particles pull last drops of oil from well water: Rice University engineers find nanoscale solution to 'produced water' problem August 15th, 2018

How hot is Schrödinger's coffee? August 15th, 2018

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Research brief: UMN researchers use green gold to rapidly detect and identify harmful bacteria August 15th, 2018

Particles pull last drops of oil from well water: Rice University engineers find nanoscale solution to 'produced water' problem August 15th, 2018

How hot is Schrödinger's coffee? August 15th, 2018

Tools

Nanometrics Delivers 100th: Atlas III System for Advanced Process Control Metrology Atlas III: Systems are qualified and in production for advanced devices in DRAM, 3D-NAND and Foundry/Logic August 2nd, 2018

Picosun’s ALD solutions make quality watches tick July 26th, 2018

Nanometrics Announces Participation in Upcoming Investor Conferences July 25th, 2018

Researchers use nanotechnology to improve the accuracy of measuring devices July 24th, 2018

Patents/IP/Tech Transfer/Licensing

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

Changing the grocery game: Manufacturing process provides low-cost, sustainable option for food packaging June 26th, 2018

Tunable diamond string may hold key to quantum memory: A process similar to guitar tuning improves storage time of quantum memory May 24th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project