Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

Abstract:
The RASIRC poster describes the advantages of water vapor over ozone in the use of ALD and provides results from Fraunhofer's testing that shows 14% faster growth rates with water vapor compared to ozone.

RASIRC Presents Poster on Use of Water Vapor in Atomic Layer Deposition

San Diego, CA | Posted on September 17th, 2011

RASIRC®, the steam purification company, announced that the company presented a poster on the topic "Water Vapor Versus Ozone for the Growth of ALD Films" at the 26th European Photovoltaic Solar Energy Conference and Exhibitionheld September 5-9, 2011 in Hamburg, Germany. The RASIRC poster presentation describes the advantages of water vapor over ozone in the use of Atomic Layer Deposition (ALD) and provides results from testing that show faster growth rates with water vapor compared to ozone. RASIRC products deliver ultrapure water vapor for photovoltaics, nanotechnology, semiconductor, and other manufacturing applications.

"Passivation layers are a major component of next generation crystalline solar cell devices. Al2O3 films grown through ALD is one technology path," said Jeff Spiegelman, president and founder of RASIRC. "Our poster shows ALD layers can be grown effectively using water vapor instead of ozone, which is more expensive, equipment intensive, and hazardous. The major limitation to commercial acceptance of ALD is the slow growth rate. The replacement of ozone with the faster growth rate of water vapor is one step towards commercialization."

The testing, performed by the Fraunhofer Institute in Dresden, Germany, ran 100 ALD cycles of trimethyl aluminum (TMA)/Water and TMA/Ozone precursors. Water vapor grew at a rate of 10.25 Å/cycle while ozone grew 0.9 Å/cycle. The growth rate was 14% faster with water vapor. The water vapor generated less than 40 particles added in random pattern, typical with this process. A RASIRC RainMaker® humidification system (RHS) was used to generate the ultrapure water vapor.

The patented RASIRC RHS generates and delivers precise amounts of ultrapure water vapor purified for both ionic contaminants and dissolved gases. The RHS adds controlled amounts of pure water vapor directly into any carrier gas stream. It can humidify inert, corrosive, and flammable gases, such as hydrogen and oxygen, at a wide range of flow rates. The system can deliver into atmosphere as well as vacuum process pressures.

The 26th EU PVSEC highlighted progress in research, technological development, and production processes, bringing together all key specialists of the industry to make it the most informative platform for the global PV Solar sector.

####

About RASIRC®
RASIRC products purify and deliver ultrapure liquids and gases. RASIRC technology is the first to generate ultra-high-purity (UHP) steam from de-ionized water. It reduces cost, increases yield, and improves safety. RASIRC dryers, humidifiers, and steam generators are of critical importance for many applications in the semiconductor, pharmaceutical, medical, biological, fuel cell, and power industries. Custom systems are available upon request. Call +1-858-259-1220, e-mail , or visit www.rasirc.com.

For more information, please click here

Contacts:
RASIRC
Andrea Roberts
+1 858.451.8666

Copyright © RASIRC®

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

White Paper PDF Link:

Related News Press

News and information

Prototype 'nanoneedles' generate new blood vessels in mice: Scientists have developed tiny 'nanoneedles' that have successfully prompted parts of the body to generate new blood vessels, in a trial in mice March 31st, 2015

Super sensitive measurement of magnetic fields March 31st, 2015

Nanomedicine pioneer Mauro Ferrari at ETH Zurich March 31st, 2015

From tobacco to cyberwood March 31st, 2015

Chip Technology

Next important step toward quantum computer: Scientists at the University of Bonn have succeeded in linking 2 different quantum systems March 30th, 2015

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Announcements

Prototype 'nanoneedles' generate new blood vessels in mice: Scientists have developed tiny 'nanoneedles' that have successfully prompted parts of the body to generate new blood vessels, in a trial in mice March 31st, 2015

Super sensitive measurement of magnetic fields March 31st, 2015

Nanomedicine pioneer Mauro Ferrari at ETH Zurich March 31st, 2015

From tobacco to cyberwood March 31st, 2015

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Prototype 'nanoneedles' generate new blood vessels in mice: Scientists have developed tiny 'nanoneedles' that have successfully prompted parts of the body to generate new blood vessels, in a trial in mice March 31st, 2015

Super sensitive measurement of magnetic fields March 31st, 2015

From tobacco to cyberwood March 31st, 2015

Next important step toward quantum computer: Scientists at the University of Bonn have succeeded in linking 2 different quantum systems March 30th, 2015

Tools

'Atomic chicken-wire' is key to faster DNA sequencing March 30th, 2015

LAMDAMAP 2015 hosted by the University March 26th, 2015

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015

Square ice filling for a graphene sandwich March 26th, 2015

Patents/IP/Tech Transfer/Licensing

From tobacco to cyberwood March 31st, 2015

Roll up your screen and stow it away? Tel Aviv University researchers develop molecular backbone of super-slim, bendable digital displays March 30th, 2015

Novel nanoparticle therapy promotes wound healing March 27th, 2015

New processing technology converts packing peanuts to battery components March 22nd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE