Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, reports successful process for preparation of gold thin films with plasma-enhanced ALD (PEALD) method first time in the world. Gold films were grown in Picosun's SUNALE˙ ALD reactor equipped with the same company‚s Picoplasma˙ plasma source system on top of ruthenium underlayers, as illustrated in the photograph below, from precursor chemicals developed and synthesized by Prof. Sean Barry and Ph.D. student Jason Coyle from Carleton University, Ottawa, Canada.

Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Espoo, Finland | Posted on July 11th, 2011

Picosun has worked with precursor and process development with Carleton University also before. Copper films of excellent quality and uniformity have been deposited on top of TiN underlayers and on silicon trench wafers, on the bottom of trenches of aspect ratio 1:15. Moreover, high quality silver thin films have been successfully manufactured in a Picosun SUNALE˙ reactor from precursors developed at the University of Helsinki, Finland.

Production of ultra-thin, highly uniform and conformal metal films even on high aspect ratio structures such as Through-Silicon-Vias (TSV) and other 3D nanoscale architectures is becoming crucial in today's electronics manufacturing. As the component sizes keep decreasing but at the same time, the level of system integration increasing, metal deposition by ALD is the only method with which conductive layers and contact points can be manufactured on the nm-scale patterned, 3D-integrated, highly complex modern MEMS/NEMS (Micro/NanoElectroMechanical) devices.

"Coinage metals (Cu, Ag, Au) are poised to play a significant role also in sensing technologies, where they will be crucial in signal enhancement and as anchor surfaces for organic sensing elements. Using plasma to deposit these metals as an ALD process widens drastically the deposition temperature window, permitting the employment of such sensitive substrates as modified fiber optic filaments and plastics. The design of the Picoplasma˙ tool allows for excellent uniformity over a wide deposition area, while minimizing substrate damage from the plasma source", states Prof. Barry from Carleton University.

Picosun's Picoplasma˙, innovative and revolutionary "ion-free" remote plasma source was just recently launched to the market and it has been a huge success right from the start, being already chosen by several key customers on three continents.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun is based in Espoo, Finland, its production facilities are located in Kirkkonummi, Finland, and its US headquarters in Detroit, Michigan. Picosun‚s SUNALE˙ ALD process tools are in daily use in various top level universities, research institutes and high profile companies across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanoscale view of energy storage January 16th, 2017

Seeing the quantum future... literally: What if big data could help you see the future and prevent your mobile phone from breaking before it happened? January 16th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Manchester scientists tie the tightest knot ever achieved January 13th, 2017

Thin films

New material with ferroelectricity and ferromagnetism may lead to better computer memory December 21st, 2016

ANU invention to inspire new night-vision specs December 7th, 2016

Ultra-thin ferroelectric material for next-generation electronics October 12th, 2016

Continuous roll-process technology for transferring and packaging flexible LSI August 29th, 2016

NEMS

Leti Scientists Participating in Sessions on Med Tech, Automotive Technologies, MEMS, Si-photonics and Lithography at SEMICON Europa: Teams also Will Demonstrate Technology Advances in Telecom, Data Fusion, Energy, Silicon Photonics and 3D Integration October 18th, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

Nano-photonics meets nano-mechanics: Controlling on-chip nano-optics by graphene nano-opto-mechanics January 22nd, 2016

Mechanical quanta see the light January 20th, 2016

MEMS

Manufacturing platform makes intricate biocompatible micromachines January 7th, 2017

STMicroelectronics Peps Up Booming Social-Fitness Scene with Smart Motion Sensors for Better Accuracy, Longer Battery Life, and Faster Time to Market January 2nd, 2017

Movable microplatform floats on a sea of droplets: New technique offers precise, durable control over tiny mirrors or stages December 19th, 2016

Vesper a Finalist for Two ACE Awards: Ultimate Products and Innovator of the Year -- Industry’s first piezoelectric MEMS microphone and Vesper CTO Bobby Littrell recognized for prestigious electronics-industry awards November 10th, 2016

Discoveries

Nanoscale view of energy storage January 16th, 2017

Seeing the quantum future... literally: What if big data could help you see the future and prevent your mobile phone from breaking before it happened? January 16th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Nanoscale Modifications can be used to Engineer Electrical Contacts for Nanodevices January 13th, 2017

Announcements

Nanoscale view of energy storage January 16th, 2017

Seeing the quantum future... literally: What if big data could help you see the future and prevent your mobile phone from breaking before it happened? January 16th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Nanoscale Modifications can be used to Engineer Electrical Contacts for Nanodevices January 13th, 2017

Tools

Distinguishing truth under the surface: electrostatic or mechanic December 31st, 2016

Nanomechanics Inc. Continues Growth in Revenue and Market Penetration: Leading nanoindentation company reports continued growth in revenues and distribution channels on national and international scales December 27th, 2016

Nanometrics to Present at the 19th Annual Needham Growth Conference December 22nd, 2016

Safe and inexpensive hydrogen production as a future energy source: Osaka University researchers develop efficient 'green' hydrogen production system that operates at room temperature in air December 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project