Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, reports successful process for preparation of gold thin films with plasma-enhanced ALD (PEALD) method first time in the world. Gold films were grown in Picosun's SUNALE˙ ALD reactor equipped with the same company‚s Picoplasma˙ plasma source system on top of ruthenium underlayers, as illustrated in the photograph below, from precursor chemicals developed and synthesized by Prof. Sean Barry and Ph.D. student Jason Coyle from Carleton University, Ottawa, Canada.

Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Espoo, Finland | Posted on July 11th, 2011

Picosun has worked with precursor and process development with Carleton University also before. Copper films of excellent quality and uniformity have been deposited on top of TiN underlayers and on silicon trench wafers, on the bottom of trenches of aspect ratio 1:15. Moreover, high quality silver thin films have been successfully manufactured in a Picosun SUNALE˙ reactor from precursors developed at the University of Helsinki, Finland.

Production of ultra-thin, highly uniform and conformal metal films even on high aspect ratio structures such as Through-Silicon-Vias (TSV) and other 3D nanoscale architectures is becoming crucial in today's electronics manufacturing. As the component sizes keep decreasing but at the same time, the level of system integration increasing, metal deposition by ALD is the only method with which conductive layers and contact points can be manufactured on the nm-scale patterned, 3D-integrated, highly complex modern MEMS/NEMS (Micro/NanoElectroMechanical) devices.

"Coinage metals (Cu, Ag, Au) are poised to play a significant role also in sensing technologies, where they will be crucial in signal enhancement and as anchor surfaces for organic sensing elements. Using plasma to deposit these metals as an ALD process widens drastically the deposition temperature window, permitting the employment of such sensitive substrates as modified fiber optic filaments and plastics. The design of the Picoplasma˙ tool allows for excellent uniformity over a wide deposition area, while minimizing substrate damage from the plasma source", states Prof. Barry from Carleton University.

Picosun's Picoplasma˙, innovative and revolutionary "ion-free" remote plasma source was just recently launched to the market and it has been a huge success right from the start, being already chosen by several key customers on three continents.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun is based in Espoo, Finland, its production facilities are located in Kirkkonummi, Finland, and its US headquarters in Detroit, Michigan. Picosun‚s SUNALE˙ ALD process tools are in daily use in various top level universities, research institutes and high profile companies across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Thin films

New optical sensor can determine if molecules are left or right 'handed' June 13th, 2018

Organic solar cells reach record efficiency, benchmark for commercialization April 23rd, 2018

High efficiency solar power conversion allowed by a novel composite material: A composite thin film developed at INRS improves significantly solar cells' power conversion efficiency April 10th, 2018

Researchers develop nanoparticle films for high-density data storage: April 3rd, 2018

NEMS

One string to rule them all April 17th, 2018

Leti Scientists Participating in Sessions on Med Tech, Automotive Technologies, MEMS, Si-photonics and Lithography at SEMICON Europa: Teams also Will Demonstrate Technology Advances in Telecom, Data Fusion, Energy, Silicon Photonics and 3D Integration October 18th, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

Nano-photonics meets nano-mechanics: Controlling on-chip nano-optics by graphene nano-opto-mechanics January 22nd, 2016

MEMS

Executives Explore Key Megatrends and Innovations in MEMS, Sensors, Imaging Tech at SEMI-MSIG European Summits: Speakers to share developments in smart automotive, smart cities, smart industrial, biomedical, consumer and IoT, September 19-21, 2018 in Grenoble, France June 19th, 2018

HTA to Present European Strategy for Competitive Micro- and Nanotechnologies & Smart Systems: Special Event in Brussels on April 24 Gathers Research Institutes’ CEOs, European Commissioners and Key European Industrials April 17th, 2018

New approach to measuring stickiness could aid micro-device design March 8th, 2018

MEMS chips get metatlenses: Combining metasurface lenses with MEMS technology could add high-speed scanning and enhance focusing capability of optical systems February 21st, 2018

Discoveries

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Camouflaged nanoparticles used to deliver killer protein to cancer June 17th, 2018

Announcements

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Tools

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

JPK talks with Dr Frank Lafont, Director of the BioImaging Center Lille (BICeL) about the use of the NanoWizard® AFM together with fluorescence microscopy in the study of living cells June 19th, 2018

Executives Explore Key Megatrends and Innovations in MEMS, Sensors, Imaging Tech at SEMI-MSIG European Summits: Speakers to share developments in smart automotive, smart cities, smart industrial, biomedical, consumer and IoT, September 19-21, 2018 in Grenoble, France June 19th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project