Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, reports successful process for preparation of gold thin films with plasma-enhanced ALD (PEALD) method first time in the world. Gold films were grown in Picosun's SUNALE˙ ALD reactor equipped with the same company‚s Picoplasma˙ plasma source system on top of ruthenium underlayers, as illustrated in the photograph below, from precursor chemicals developed and synthesized by Prof. Sean Barry and Ph.D. student Jason Coyle from Carleton University, Ottawa, Canada.

Picosun and Carleton University Introduce the First Gold Films by Plasma-Enhanced ALD

Espoo, Finland | Posted on July 11th, 2011

Picosun has worked with precursor and process development with Carleton University also before. Copper films of excellent quality and uniformity have been deposited on top of TiN underlayers and on silicon trench wafers, on the bottom of trenches of aspect ratio 1:15. Moreover, high quality silver thin films have been successfully manufactured in a Picosun SUNALE˙ reactor from precursors developed at the University of Helsinki, Finland.

Production of ultra-thin, highly uniform and conformal metal films even on high aspect ratio structures such as Through-Silicon-Vias (TSV) and other 3D nanoscale architectures is becoming crucial in today's electronics manufacturing. As the component sizes keep decreasing but at the same time, the level of system integration increasing, metal deposition by ALD is the only method with which conductive layers and contact points can be manufactured on the nm-scale patterned, 3D-integrated, highly complex modern MEMS/NEMS (Micro/NanoElectroMechanical) devices.

"Coinage metals (Cu, Ag, Au) are poised to play a significant role also in sensing technologies, where they will be crucial in signal enhancement and as anchor surfaces for organic sensing elements. Using plasma to deposit these metals as an ALD process widens drastically the deposition temperature window, permitting the employment of such sensitive substrates as modified fiber optic filaments and plastics. The design of the Picoplasma˙ tool allows for excellent uniformity over a wide deposition area, while minimizing substrate damage from the plasma source", states Prof. Barry from Carleton University.

Picosun's Picoplasma˙, innovative and revolutionary "ion-free" remote plasma source was just recently launched to the market and it has been a huge success right from the start, being already chosen by several key customers on three continents.

####

About Picosun Oy
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun is based in Espoo, Finland, its production facilities are located in Kirkkonummi, Finland, and its US headquarters in Detroit, Michigan. Picosun‚s SUNALE˙ ALD process tools are in daily use in various top level universities, research institutes and high profile companies across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.

For more information, please click here

Contacts:
Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanostructures Increase Corrosion Resistance in Metallic Body Implants May 24th, 2015

Iranian Scientists Use Magnetic Field to Transfer Anticancer Drug to Tumor Tissue May 24th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Thin films

Sandia researchers first to measure thermoelectric behavior by 'Tinkertoy' materials May 20th, 2015

Defects can 'Hulk-up' materials: Berkeley lab study shows properly managed damage can boost material thermoelectric performances May 20th, 2015

Efficiency record for black silicon solar cells jumps to 22.1 percent: Aalto University's researchers improved their previous record by over 3 absolute percents in cooperation with Universitat Politècnica de Catalunya May 18th, 2015

Science and Technology of Advanced Materials (STAM): Reported successes and failures aid hot pursuit of superconductivity May 15th, 2015

NEMS

Weighing -- and imaging -- molecules one at a time April 28th, 2015

Scientists join forces to reveal the mass and shape of single molecules April 27th, 2015

Surface matters: Huge reduction of heat conduction observed in flat silicon channels April 23rd, 2015

Iranian Scientists Evaluate Dynamic Interaction between 2 Carbon Nanotubes April 14th, 2015

MEMS

Janusz Bryzek Joins MEMS Industry Group to Lead New TSensors Division - New Division will Focus on Accelerating Development of Emerging Ultra-high Volume Sensors Supporting Abundance, mHealth and IoT May 14th, 2015

Phonons, arise! Small electric voltage alters conductivity in key materials April 22nd, 2015

Iranian Scientists Evaluate Dynamic Interaction between 2 Carbon Nanotubes April 14th, 2015

ASIC Development for MEMS Applications: A Platform Approach March 25th, 2015

Discoveries

Nanostructures Increase Corrosion Resistance in Metallic Body Implants May 24th, 2015

Iranian Scientists Use Magnetic Field to Transfer Anticancer Drug to Tumor Tissue May 24th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Announcements

Nanostructures Increase Corrosion Resistance in Metallic Body Implants May 24th, 2015

Iranian Scientists Use Magnetic Field to Transfer Anticancer Drug to Tumor Tissue May 24th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Tools

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

Taking control of light emission: Researchers find a way of tuning light waves by pairing 2 exotic 2-D materials May 20th, 2015

DELMIC announces a workshop hosted by Phenom World on Integrated CLEM to be held on Wednesday June 24th at the Francis Crick Institute (Lincoln Inn Fields Laboratory). May 19th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project