Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

Abstract:
Three-Year Agreement Aims to Commercialise SiC-On-Si as a Viable Semiconductor Material for LED, Power and MEMS Devices.

SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

San Jose, CA and Brisbane, Australia | Posted on May 27th, 2011

SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch and deposition, and thermal processing equipment for the semiconductor and related industries, and Griffith University in Australia today announced a joint development agreement (JDA) targeting the commercialization of Silicon Carbide (SiC) on Silicon (Si) technology. SiC on Si substrates have a wide variety of applications for the rapidly growing light-emitting diode (LED), micro-electro-mechanical systems (MEMS) and Power markets.

SiC is an important substrate for growing the GaN films used to manufacture LEDs. The increased radiation hardness, mechanical strength and thermal properties of SiC also make it a suitable replacement for silicon in MEMS devices for harsh environments. In addition, SiC is used to create semiconductor devices for high power, high frequency applications where the electrical properties of SiC are significantly superior to common silicon. Technology created by the research team at Queensland Microtechnology Facility (QMF) at the Griffith University's Queensland Micro- and Nanotechnology Centre (QMNC), has demonstrated the ability to grow crystalline SiC directly onto low cost silicon wafers. Through the JDA, SPTS will develop the thermal process and equipment expertise necessary to commercialize the technology.

Three key technologies required for SiC on Si devices are SiC deposition, etch and oxidation. The QMNC has commercially orientated research into all these areas. "The JDA enables transfer of this SiC deposition process technology to device research and development activities, and provides a bridge to volume production through batch processing for up to 300mm diameter Si wafers. SPTS's strength in thermal processing makes them an attractive partner," said Alan Iacopi, Operations Director of QMNC. "This JDA is an important step in the commercialization of our SiC research efforts, especially with a partner with the global reach of SPTS" agreed Sima Dimitrijev, Project Leader and Deputy Director of QMNC.

"As a market leader in providing capital equipment to the MEMS, LED and Power markets, SPTS is constantly looking at cutting-edge development opportunities. We are very pleased to have this opportunity to work with leading researchers at Griffith University to commercialize their SiC on Si technology," said William Johnson, president and CEO of SPTS. "Providing production knowledge to this collaboration and helping to develop and deliver new materials processing technology is an important business strategy. This JDA further enhances the portfolio of offerings to our served markets and will help to broaden our customer base."

####

About SPP Process Technology Systems
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd., and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications.

For more information about SPTS, please visit www.spp-pts.com.

About QMNC and QMF

The Queensland Micro- and Nanotechnology Centre is a science and engineering research centre based at Griffith University focusing on micro- and nanotechnology issues integral to the development of clean and intelligent systems. The Centre brings together researchers with expertise in materials development, sensing, microelectronic engineering and microtechnology and the fundamental theory of condensed matter, across the disciplines of physics, chemistry, applied mathematics and engineering. The Queensland Microtechnology Facility, within the QMNC, is focused on leading SiC on Si technology to commercialisation. Funded by Queensland State Government and Australia's National Fabrication Facility, it houses a large silicon wafer fabrication processing capability and enables research and development of SiC on Si material for mechanical and semiconductor devices.

For more information please visit www.griffith.edu.au/qmnc.

For more information, please click here

Contacts:
SPP Process Technology Systems (SPTS)
Evelyn Tay
+ 65-8383-0393

www.spp-pts.com

Griffith University
Debra Bernhardt
+61 7-3735-3921

www.griffith.edu.au/qmnc

Copyright © Marketwire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Display technology/LEDs/SS Lighting/OLEDs

Environmentally friendly photoluminescent nanoparticles for more vivid display colors: Osaka University-led researchers created a new type of light-emitting nanoparticle that is made of ternary non-toxic semiconductors to help create displays and LED lighting with better colors t August 29th, 2018

Carbon in color: First-ever colored thin films of nanotubes created: A method developed at Aalto University, Finland, can produce large quantities of pristine single-walled carbon nanotubes in select shades of the rainbow; the secret is a fine-tuned fabrication process -- and a s August 29th, 2018

Future electronic components to be printed like newspapers July 20th, 2018

DNA drives design principles for lighter, thinner optical displays: Lighter gold nanoparticles could replace thicker, heavier layered polymers used in displays’ back-reflectors June 27th, 2018

MEMS

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

Cleaning or Etching Items with Unique Geometries Requires Specialized Expertise June 27th, 2018

Chip Technology

Researchers managed to prevent the disappearing of quantum information September 14th, 2018

New devices based on rust could reduce excess heat in computers: Physicists explore long-distance information transmission in antiferromagnetic iron oxide September 14th, 2018

New photonic chip promises more robust quantum computers September 14th, 2018

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Announcements

NUS researchers invent new test kit for quick, accurate and low-cost screening of diseases: Test results are denoted by a color change and could be further analyzed by a smartphone app, making it attractive as a point-of-care diagnostic device September 19th, 2018

Silver nanoparticles are toxic for aquatic organisms: A research team at the UPV/EHU-University of the Basque Country has analysed how zebrafish are affected in the long term by exposure to silver particles September 19th, 2018

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Researchers develop microbubble scrubber to destroy dangerous biofilms September 19th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Leti & EFI Aim to Dramatically Improve Reliability & Speed of Low-Cost Electronic Devices for Autos: Project Will Extend Model Predictive Control Technique to Microcontrollers, Digital Signal Processors and Other Devices that Lack Powerful Computation Capabilities September 18th, 2018

Silvaco, Purdue team up to bring scalable atomistic TCAD solutions for next generation semiconductor devices and materials August 24th, 2018

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Research partnerships

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Researchers develop microbubble scrubber to destroy dangerous biofilms September 19th, 2018

Leti & EFI Aim to Dramatically Improve Reliability & Speed of Low-Cost Electronic Devices for Autos: Project Will Extend Model Predictive Control Technique to Microcontrollers, Digital Signal Processors and Other Devices that Lack Powerful Computation Capabilities September 18th, 2018

Tiny camera lens may help link quantum computers to network September 14th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project