Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

Abstract:
Three-Year Agreement Aims to Commercialise SiC-On-Si as a Viable Semiconductor Material for LED, Power and MEMS Devices.

SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

San Jose, CA and Brisbane, Australia | Posted on May 27th, 2011

SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch and deposition, and thermal processing equipment for the semiconductor and related industries, and Griffith University in Australia today announced a joint development agreement (JDA) targeting the commercialization of Silicon Carbide (SiC) on Silicon (Si) technology. SiC on Si substrates have a wide variety of applications for the rapidly growing light-emitting diode (LED), micro-electro-mechanical systems (MEMS) and Power markets.

SiC is an important substrate for growing the GaN films used to manufacture LEDs. The increased radiation hardness, mechanical strength and thermal properties of SiC also make it a suitable replacement for silicon in MEMS devices for harsh environments. In addition, SiC is used to create semiconductor devices for high power, high frequency applications where the electrical properties of SiC are significantly superior to common silicon. Technology created by the research team at Queensland Microtechnology Facility (QMF) at the Griffith University's Queensland Micro- and Nanotechnology Centre (QMNC), has demonstrated the ability to grow crystalline SiC directly onto low cost silicon wafers. Through the JDA, SPTS will develop the thermal process and equipment expertise necessary to commercialize the technology.

Three key technologies required for SiC on Si devices are SiC deposition, etch and oxidation. The QMNC has commercially orientated research into all these areas. "The JDA enables transfer of this SiC deposition process technology to device research and development activities, and provides a bridge to volume production through batch processing for up to 300mm diameter Si wafers. SPTS's strength in thermal processing makes them an attractive partner," said Alan Iacopi, Operations Director of QMNC. "This JDA is an important step in the commercialization of our SiC research efforts, especially with a partner with the global reach of SPTS" agreed Sima Dimitrijev, Project Leader and Deputy Director of QMNC.

"As a market leader in providing capital equipment to the MEMS, LED and Power markets, SPTS is constantly looking at cutting-edge development opportunities. We are very pleased to have this opportunity to work with leading researchers at Griffith University to commercialize their SiC on Si technology," said William Johnson, president and CEO of SPTS. "Providing production knowledge to this collaboration and helping to develop and deliver new materials processing technology is an important business strategy. This JDA further enhances the portfolio of offerings to our served markets and will help to broaden our customer base."

####

About SPP Process Technology Systems
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd., and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications.

For more information about SPTS, please visit www.spp-pts.com.

About QMNC and QMF

The Queensland Micro- and Nanotechnology Centre is a science and engineering research centre based at Griffith University focusing on micro- and nanotechnology issues integral to the development of clean and intelligent systems. The Centre brings together researchers with expertise in materials development, sensing, microelectronic engineering and microtechnology and the fundamental theory of condensed matter, across the disciplines of physics, chemistry, applied mathematics and engineering. The Queensland Microtechnology Facility, within the QMNC, is focused on leading SiC on Si technology to commercialisation. Funded by Queensland State Government and Australia's National Fabrication Facility, it houses a large silicon wafer fabrication processing capability and enables research and development of SiC on Si material for mechanical and semiconductor devices.

For more information please visit www.griffith.edu.au/qmnc.

For more information, please click here

Contacts:
SPP Process Technology Systems (SPTS)
Evelyn Tay
+ 65-8383-0393

www.spp-pts.com

Griffith University
Debra Bernhardt
+61 7-3735-3921

www.griffith.edu.au/qmnc

Copyright © Marketwire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Display technology/LEDs/SS Lighting/OLEDs

The secret to improving liquid crystal's mechanical performance: Better lubricating properties of lamellar liquid crystals could stem from changing the mobility of their structural dislocations by adding nanoparticles October 13th, 2017

Missing atoms in a forgotten crystal bring luminescence October 10th, 2017

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Nanocrystalline LEDs: Red, green, yellow, blue ... August 7th, 2017

MEMS

First Capacitive Transducer with 13nm Gap July 27th, 2017

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Chip Technology

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Quantum manipulation power for quantum information processing gets a boost: Improving the efficiency of quantum heat engines involves reducing the number of photons in a cavity, ultimately impacting quantum manipulation power October 14th, 2017

Injecting electrons jolts 2-D structure into new atomic pattern: Berkeley Lab study is first to show potential of energy-efficient next-gen electronic memory October 13th, 2017

Rice U. lab surprised by ultraflat magnets: Researchers create atom-thick alloys with unanticipated magnetic properties October 13th, 2017

Announcements

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

Spinning strands hint at folding dynamics: Rice University lab uses magnetic beads to model microscopic proteins, polymers October 17th, 2017

Rice U. study: Vibrating nanoparticles interact: Placing nanodisks in groups can change their vibrational frequencies October 16th, 2017

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Alliances/Trade associations/Partnerships/Distributorships

More 22 of 59,885 Print all In new window Leti to Present Update of CoolCube/3DVLSI Technologies Development at 2017 IEEE S3S: Future Developments and Tape-Out Vehicles to Be Presented during Oct. 17 Workshop October 12th, 2017

Quorum announces new customer support and demonstration facilities for users worldwide October 10th, 2017

GLOBALFOUNDRIES and Soitec Enter Into Long-term Supply Agreement on FD-SOI Wafers: Strategic milestone to help guarantee a secure, high-volume supply of FD-SOI technology September 20th, 2017

GLOBALFOUNDRIES Unveils Vision and Roadmap for Next-Generation 5G Applications: Technology platforms are uniquely positioned to enable a new era of ‘connected intelligence’ with the transition to 5G September 20th, 2017

Research partnerships

'Find the Lady' in the quantum world: International team of researchers presents method for quantum-mechanical swapping of positions October 18th, 2017

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

Rice U. lab surprised by ultraflat magnets: Researchers create atom-thick alloys with unanticipated magnetic properties October 13th, 2017

More 22 of 59,885 Print all In new window Leti to Present Update of CoolCube/3DVLSI Technologies Development at 2017 IEEE S3S: Future Developments and Tape-Out Vehicles to Be Presented during Oct. 17 Workshop October 12th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project