Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

Abstract:
Three-Year Agreement Aims to Commercialise SiC-On-Si as a Viable Semiconductor Material for LED, Power and MEMS Devices.

SPP Process Technology Systems (SPTS) and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide (SiC) on Silicon Technology

San Jose, CA and Brisbane, Australia | Posted on May 27th, 2011

SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch and deposition, and thermal processing equipment for the semiconductor and related industries, and Griffith University in Australia today announced a joint development agreement (JDA) targeting the commercialization of Silicon Carbide (SiC) on Silicon (Si) technology. SiC on Si substrates have a wide variety of applications for the rapidly growing light-emitting diode (LED), micro-electro-mechanical systems (MEMS) and Power markets.

SiC is an important substrate for growing the GaN films used to manufacture LEDs. The increased radiation hardness, mechanical strength and thermal properties of SiC also make it a suitable replacement for silicon in MEMS devices for harsh environments. In addition, SiC is used to create semiconductor devices for high power, high frequency applications where the electrical properties of SiC are significantly superior to common silicon. Technology created by the research team at Queensland Microtechnology Facility (QMF) at the Griffith University's Queensland Micro- and Nanotechnology Centre (QMNC), has demonstrated the ability to grow crystalline SiC directly onto low cost silicon wafers. Through the JDA, SPTS will develop the thermal process and equipment expertise necessary to commercialize the technology.

Three key technologies required for SiC on Si devices are SiC deposition, etch and oxidation. The QMNC has commercially orientated research into all these areas. "The JDA enables transfer of this SiC deposition process technology to device research and development activities, and provides a bridge to volume production through batch processing for up to 300mm diameter Si wafers. SPTS's strength in thermal processing makes them an attractive partner," said Alan Iacopi, Operations Director of QMNC. "This JDA is an important step in the commercialization of our SiC research efforts, especially with a partner with the global reach of SPTS" agreed Sima Dimitrijev, Project Leader and Deputy Director of QMNC.

"As a market leader in providing capital equipment to the MEMS, LED and Power markets, SPTS is constantly looking at cutting-edge development opportunities. We are very pleased to have this opportunity to work with leading researchers at Griffith University to commercialize their SiC on Si technology," said William Johnson, president and CEO of SPTS. "Providing production knowledge to this collaboration and helping to develop and deliver new materials processing technology is an important business strategy. This JDA further enhances the portfolio of offerings to our served markets and will help to broaden our customer base."

####

About SPP Process Technology Systems
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd., and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications.

For more information about SPTS, please visit www.spp-pts.com.

About QMNC and QMF

The Queensland Micro- and Nanotechnology Centre is a science and engineering research centre based at Griffith University focusing on micro- and nanotechnology issues integral to the development of clean and intelligent systems. The Centre brings together researchers with expertise in materials development, sensing, microelectronic engineering and microtechnology and the fundamental theory of condensed matter, across the disciplines of physics, chemistry, applied mathematics and engineering. The Queensland Microtechnology Facility, within the QMNC, is focused on leading SiC on Si technology to commercialisation. Funded by Queensland State Government and Australia's National Fabrication Facility, it houses a large silicon wafer fabrication processing capability and enables research and development of SiC on Si material for mechanical and semiconductor devices.

For more information please visit www.griffith.edu.au/qmnc.

For more information, please click here

Contacts:
SPP Process Technology Systems (SPTS)
Evelyn Tay
+ 65-8383-0393

www.spp-pts.com

Griffith University
Debra Bernhardt
+61 7-3735-3921

www.griffith.edu.au/qmnc

Copyright © Marketwire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Display technology/LEDs/SS Lighting/OLEDs

Haydale Announce Dedicated Graphene Inks Manufacturing Capability March 25th, 2015

Caltech scientists develop cool process to make better graphene March 18th, 2015

Engineers create chameleon-like artificial 'skin' that shifts color on demand March 12th, 2015

Breakthrough in OLED technology March 2nd, 2015

MEMS

ASIC Development for MEMS Applications: A Platform Approach March 25th, 2015

STMicroelectronics Executive Vice-President Benedetto Vigna Awarded IEEE Frederik Philips Award March 12th, 2015

MIG Takes a Roll-Up-Your-Sleeves Approach with Revamped MEMS/Sensors Technical Event -- MIG welcomes technologists to MEMS Technical Congress, emphasizes working groups and breakout sessions on emerging MEMS & sensors, tech transfer and integration March 6th, 2015

French Institutes IRT Nanoelec and CMP Team up to Offer World’s First Service for Post-process 3D Technologies on Multi-Project-Wafer March 5th, 2015

Chip Technology

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Building shape inspires new material discovery March 24th, 2015

Announcements

UT Dallas engineers twist nanofibers to create structures tougher than bulletproof vests March 27th, 2015

Novel nanoparticle therapy promotes wound healing March 27th, 2015

Designer's toolkit for dynamic DNA nanomachines: Arm-waving nanorobot signals new flexibility in DNA origami March 27th, 2015

Using magnetic fields to understand high-temperature superconductivity: Los Alamos explores experimental path to potential 'next theory of superconductivity' March 27th, 2015

Alliances/Partnerships/Distributorships

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Young NTU Singapore spin-off clinches S$4.3 million joint venture with Chinese commercial giant March 23rd, 2015

Halas, Nordlander awarded Optical Society's R.W. Wood Prize: Rice University researchers recognized for pioneering nanophotonics March 21st, 2015

EU Funded PCATDES Project has completed its half-period with success March 19th, 2015

Research partnerships

SUNY Poly & M+W Make Major Announcement: Major Expansion To Include M+W Owned Gehrlicher Solar America Corporation That Will Create up to 400 Jobs to Develop Solar Power Plants at SUNY Poly Sites Across New York State March 26th, 2015

ORNL-led team demonstrates desalination with nanoporous graphene membrane March 25th, 2015

New kind of 'tandem' solar cell developed: Researchers combine 2 types of photovoltaic material to make a cell that harnesses more sunlight March 24th, 2015

UW scientists build a nanolaser using a single atomic sheet March 24th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE