Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > FUJIFILM Joins SEMATECHís Resist Center for Advanced EUV Resist Development at UAlbany NanoCollege

Abstract:
SEMATECH, a global consortium of chipmakers, announced today that FUJIFILM Electronic Materials, a leading global supplier of photoresists, developers, cleaners and removers, polyimides and thin film chemicals and equipment for the semiconductor industry, has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

FUJIFILM Joins SEMATECHís Resist Center for Advanced EUV Resist Development at UAlbany NanoCollege

Albany, NY and Tokyo, Japan | Posted on May 19th, 2011

As a resist member of SEMATECH's lithography program, FUJIFILM will collaborate with SEMATECH engineers on critical resist issues in extreme ultraviolet (EUV) lithography. Specific areas include reduction or elimination of line edge roughness (LER) in images below 22nm; ultimate resolution of new resists; and testing imaging materials for EUV sensitivity.

"Our partnership with SEMATECH provides FUJIFILM the opportunity for a new level of collaboration to further support the semiconductor manufacturing and electronic materials markets," said Takahiro Goto, General Manager of Electronic Materials Research Laboratories, FUJIFILM Corporation. "FUJIFILM is committed to ensure that they have the enabling materials and processes they need to foster greater innovation."

"We're looking forward to working with FUJIFILM in our mutual effort to develop leading‑edge resists and materials, and accelerate process availability for EUV pilot line manufacturing," said John Warlaumont, vice president of Advanced Technologies, SEMATECH. "This partnership will help strengthen the RMDC's ability to address critical resist issues in advanced materials and accelerate the search for new solutions to our common technology challenges."

"The leading-edge research and development at the UAlbany NanoCollege that is critical for the commercialization of EUVL technologies will be enhanced by the addition of FUJIFILM," said Richard Brilla, CNSE vice president for strategy, alliances and consortia. "This further builds on the world-class capabilities enabled by the SEMATECH-CNSE partnership to support the advanced technology needs of our global corporate partners and the industry."

The partnership will be based on SEMATECH's extensive network of hardware and research expertise, semiconductor experience, and highly respected market leadership and on FUJIFILM's proven, industry-leading semiconductor materials and processes. SEMATECH's RMDC will provide access to two micro-exposure tools (METs) as well as several metrology tools located at the University at Albany's College of Nanoscale Science and Engineering and the University of California, Berkeley.

At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.

####

About SEMATECH
For over 20 years, SEMATECHģ (www.sematech.org), the international consortium of leading semiconductor manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

About CNSE

The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSEís Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $7 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSEís Albany NanoTech, from companies including IBM, GlobalFoundries, SEMATECH, Toshiba, Samsung, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. An expansion now underway is projected to increase the size of CNSEís Albany NanoTech Complex to over 1,250,000 square feet of next-generation infrastructure housing over 135,000 square feet of Class 1 capable cleanrooms and more than 3,750 scientists, researchers and engineers from CNSE and global corporations. For more information, visit www.cnse.albany.edu.

FUJIFILM Corporation is one of the major operating companies of FUJIFILM Holdings. Since its founding in 1934, the company has built up a wealth of advanced technologies in the field of photo imaging, and in line with its efforts to become a comprehensive healthcare company, FUJIFILM is now applying these technologies to the prevention, diagnosis and treatment of diseases in the Medical and Life Science fields. FUJIFILM is also expanding growth in the highly functional materials business, including electronic materials, flat panel display materials, and in the graphic systems and optical devices businesses.

FUJIFILM's corporate philosophy is: We will use leading-edge, proprietary technologies to provide top-quality products and services that contribute to the advancement of culture, science, technology and industry, as well as improved health and environmental protection in society. Our overarching aim is to help enhance the quality of life of people worldwide. Through its corporate philosophy, FUJIFILM demonstrates its commitment to making a significant contribution to society.

For more information, please visit fujifilm.jp.

For more information, please click here

Contacts:
Erica McGill
SEMATECH
Media Relations
257 Fuller Road | Suite 2200
Albany, NY | 12203
o: 518-649-1041
m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Nanotechnology and math deliver two-in-one punch for cancer therapy resistance June 24th, 2016

Researchers discover new chemical sensing technique: Technique allows sharper detail -- and more information -- with near infrared light June 24th, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Chip Technology

GraphExeter illuminates bright new future for flexible lighting devices June 23rd, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Particle zoo in a quantum computer: First experimental quantum simulation of particle physics phenomena June 23rd, 2016

Nanometrics to Participate in the 8th Annual CEO Investor Summit: Investor Event Held Concurrently with SEMICON West 2016 in San Francisco June 22nd, 2016

Announcements

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Nanotechnology and math deliver two-in-one punch for cancer therapy resistance June 24th, 2016

Researchers discover new chemical sensing technique: Technique allows sharper detail -- and more information -- with near infrared light June 24th, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Alliances/Trade associations/Partnerships/Distributorships

FEI and University of Liverpool Announce QEMSCAN Research Initiative: University of Liverpool will utilize FEIís QEMSCAN technology to gain a better insight into oil and gas reserves & potentially change the approach to evaluating them June 22nd, 2016

French Research Team Helps Extend MRI Detection of Diseases & Lower Health-Care Costs: CEA, INSERM and G2ELab Brings Grenoble Regionís Expertise In Advanced Medicine & Magnetism Applications to H2020 IDentIFY Project June 21st, 2016

Research showing why hierarchy exists will aid the development of artificial intelligence June 13th, 2016

UK NANOSAFETY GROUP publishes 2nd Edition of guidance to support safe working with nanomaterials May 30th, 2016

Research partnerships

Soft decoupling of organic molecules on metal June 23rd, 2016

FEI and University of Liverpool Announce QEMSCAN Research Initiative: University of Liverpool will utilize FEIís QEMSCAN technology to gain a better insight into oil and gas reserves & potentially change the approach to evaluating them June 22nd, 2016

Tailored DNA shifts electrons into the 'fast lane': DNA nanowire improved by altering sequences June 22nd, 2016

French Research Team Helps Extend MRI Detection of Diseases & Lower Health-Care Costs: CEA, INSERM and G2ELab Brings Grenoble Regionís Expertise In Advanced Medicine & Magnetism Applications to H2020 IDentIFY Project June 21st, 2016

Printing/Lithography/Inkjet/Inks

Perovskite solar cells surpass 20 percent efficiency: EPFL researchers are pushing the limits of perovskite solar cell performance by exploring the best way to grow these crystals June 13th, 2016

'On-the-fly' 3-D print system prints what you design, as you design it June 1st, 2016

Physicists create first metamaterial with rewritable magnetic ordering May 23rd, 2016

Electrically Conductive Graphene Ink Enables Printing of Biosensors April 23rd, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic