Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > The Evactron Decontaminator from XEI Scientific cleans carbon contamination with hydrogen

XEI Scientific's Evactron E45 decontamination system for lithographic applications
XEI Scientific's Evactron E45 decontamination system for lithographic applications

Abstract:
XEI Scientific Inc, maker of the popular EVACTRON® Plasma Cleaning System for electron microscopes and other vacuum chambers, reports the use for cleaning carbon decontamination using hydrogen.

The Evactron Decontaminator from XEI Scientific cleans carbon contamination with hydrogen

Redwood City, CA | Posted on April 5th, 2011

XEI Scientific, Inc. continues to expand the uses of the Evactron® E45 Decontamination system. A presentation by Dr. Gabe Morgan at the SPIE Advanced Lithography meeting in early March showed that using atomic hydrogen created by the Evactron plasma is effective in cleaning carbon contamination from EUV optics.

For the semiconductor industry to continue making smaller features, lithographic systems are moving to shorter wavelengths such as EUV and the very elaborate and expensive optics required may be damaged by oxygen cleaning. Using the Evactron Plasma Cleaning system with hydrogen gas has produced atomic hydrogen and been successful in removing hydrocarbon contamination from EUV mirrors. Cleaning rates were seen in the nanometers per minute range and at distances of up to 30 cm from the remote plasma source.

Work is continuing both at XEI and with selected partners in the field to optimize the system parameters for well characterized and reliable downstream plasma cleaning for this important solution for future semiconductor production.

XEI's rack-mounted models can be embedded into SEMs, FIBs, and other electron beam systems. They remove carbon contamination such as hydrocarbons or atmospheric contamination. All Evactron De-Contaminator (D-Cs) Systems use RF plasma to produce oxygen radicals that flow downstream through the chamber, removing contamination. They are also safe for use on X-ray windows and are delivered with a free 5 year limited warranty and factory repair service.

XEI continues to develop better support for its clients worldwide. New partners have been appointed for countries in Europe, China and Latin America. Please visit the company's website for the latest details, www.evactron.com.

####

About XEI Scientific, Inc.
XEI Scientific Inc. invented the Evactron De-Contaminator in 1999 as the first plasma cleaner to use a downstream cleaning process to remove carbon from electron microscopes. A proprietary plasma source uses air to produce oxygen radicals for oxidation of carbon compounds for removal by the pumps. Carbon-free-vacuum produces the highest quality images and analytical results from SEMs and other vacuum analytical instruments. XEI innovations include a unique RF plasma generator, a patented RF electrode, and easy start programmed plasma cleaning. All XEI products come with a 5 year warranty and are compliant with CE, NRTL, and Semi-S2 safety standards. XEI offers a variety of Evactron systems to meet user needs. For more information on products and services offered by XEI Scientific, Inc., see their website (www.evactron.com).

For more information, please click here

Contacts:
XEI Scientific, Inc.
1755 E Bayshore Road
Redwood City
CA 94063
USA
T +1 (972) 318 0196
F +1 (650) 363 1659
Tom Levesque


NetDyaLog Limited
39 de Bohun Court
Saffron Walden
Essex CB10 2BA
United Kingdom
T +44 (0) 1799 521881
M +44 (0) 7843 012997

Copyright © XEI Scientific, Inc.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Thanks for the memory: NIST takes a deep look at memristors January 20th, 2018

New Method Uses DNA, Nanoparticles and Top-Down Lithography to Make Optically Active Structures: Technique could lead to new classes of materials that can bend light, such as for those used in cloaking devices January 18th, 2018

Arrowhead Pharmaceuticals Announces Pricing of Underwritten Public Offering of Common Stock January 18th, 2018

Leti to Demo New Curving Technology at Photonics West that Improves Performance of Optical Components January 18th, 2018

Ultra-thin memory storage device paves way for more powerful computing January 17th, 2018

Imaging

Leti to Demo New Curving Technology at Photonics West that Improves Performance of Optical Components January 18th, 2018

Nanowrinkles could save billions in shipping and aquaculture Surfaces inspired by carnivorous plants delay degradation by marine fouling January 17th, 2018

The nanoscopic structure that locks up our genes January 16th, 2018

Announcements

Thanks for the memory: NIST takes a deep look at memristors January 20th, 2018

New Method Uses DNA, Nanoparticles and Top-Down Lithography to Make Optically Active Structures: Technique could lead to new classes of materials that can bend light, such as for those used in cloaking devices January 18th, 2018

Arrowhead Pharmaceuticals Announces Pricing of Underwritten Public Offering of Common Stock January 18th, 2018

Leti to Demo New Curving Technology at Photonics West that Improves Performance of Optical Components January 18th, 2018

Tools

Leti to Demo New Curving Technology at Photonics West that Improves Performance of Optical Components January 18th, 2018

Nanowrinkles could save billions in shipping and aquaculture Surfaces inspired by carnivorous plants delay degradation by marine fouling January 17th, 2018

Ultra-thin optical fibers offer new way to 3-D print microstructures: Novel approach lays groundwork for using 3-D printing to repair tissue in the body January 17th, 2018

The nanoscopic structure that locks up our genes January 16th, 2018

Printing/Lithography/Inkjet/Inks/Bio-printing

Printing Flexible Graphene Supercapacitors December 1st, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Graphene based terahertz absorbers: Printable graphene inks enable ultrafast lasers in the terahertz range September 13th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project