Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > The Evactron Decontaminator from XEI Scientific cleans carbon contamination with hydrogen

XEI Scientific's Evactron E45 decontamination system for lithographic applications
XEI Scientific's Evactron E45 decontamination system for lithographic applications

Abstract:
XEI Scientific Inc, maker of the popular EVACTRON® Plasma Cleaning System for electron microscopes and other vacuum chambers, reports the use for cleaning carbon decontamination using hydrogen.

The Evactron Decontaminator from XEI Scientific cleans carbon contamination with hydrogen

Redwood City, CA | Posted on April 5th, 2011

XEI Scientific, Inc. continues to expand the uses of the Evactron® E45 Decontamination system. A presentation by Dr. Gabe Morgan at the SPIE Advanced Lithography meeting in early March showed that using atomic hydrogen created by the Evactron plasma is effective in cleaning carbon contamination from EUV optics.

For the semiconductor industry to continue making smaller features, lithographic systems are moving to shorter wavelengths such as EUV and the very elaborate and expensive optics required may be damaged by oxygen cleaning. Using the Evactron Plasma Cleaning system with hydrogen gas has produced atomic hydrogen and been successful in removing hydrocarbon contamination from EUV mirrors. Cleaning rates were seen in the nanometers per minute range and at distances of up to 30 cm from the remote plasma source.

Work is continuing both at XEI and with selected partners in the field to optimize the system parameters for well characterized and reliable downstream plasma cleaning for this important solution for future semiconductor production.

XEI's rack-mounted models can be embedded into SEMs, FIBs, and other electron beam systems. They remove carbon contamination such as hydrocarbons or atmospheric contamination. All Evactron De-Contaminator (D-Cs) Systems use RF plasma to produce oxygen radicals that flow downstream through the chamber, removing contamination. They are also safe for use on X-ray windows and are delivered with a free 5 year limited warranty and factory repair service.

XEI continues to develop better support for its clients worldwide. New partners have been appointed for countries in Europe, China and Latin America. Please visit the company's website for the latest details, www.evactron.com.

####

About XEI Scientific, Inc.
XEI Scientific Inc. invented the Evactron De-Contaminator in 1999 as the first plasma cleaner to use a downstream cleaning process to remove carbon from electron microscopes. A proprietary plasma source uses air to produce oxygen radicals for oxidation of carbon compounds for removal by the pumps. Carbon-free-vacuum produces the highest quality images and analytical results from SEMs and other vacuum analytical instruments. XEI innovations include a unique RF plasma generator, a patented RF electrode, and easy start programmed plasma cleaning. All XEI products come with a 5 year warranty and are compliant with CE, NRTL, and Semi-S2 safety standards. XEI offers a variety of Evactron systems to meet user needs. For more information on products and services offered by XEI Scientific, Inc., see their website (www.evactron.com).

For more information, please click here

Contacts:
XEI Scientific, Inc.
1755 E Bayshore Road
Redwood City
CA 94063
USA
T +1 (972) 318 0196
F +1 (650) 363 1659
Tom Levesque


NetDyaLog Limited
39 de Bohun Court
Saffron Walden
Essex CB10 2BA
United Kingdom
T +44 (0) 1799 521881
M +44 (0) 7843 012997

Copyright © XEI Scientific, Inc.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Spintronics for future information technologies: Spin currents in topological insulators controlled May 2nd, 2016

Nanoparticles present sustainable way to grow food crops May 1st, 2016

Searching for a nanotech self-organizing principle May 1st, 2016

Clay nanotube-biopolymer composite scaffolds for tissue engineering May 1st, 2016

Imaging

The Translational Research Center at the University Hospital of Erlangen in Germany uses the ZetaView from Particle Metrix to quantify extracellular vesicles such as exosomes April 28th, 2016

JPK reports on the use of a NanoWizard AFM system at the University of Kaiserslautern to study the interaction of bacteria with microstructured surfaces April 28th, 2016

Bruker Introduces First of Its Kind Dimensional Analysis System: The Novel Contour CMM™ System Fully Integrates 3D Coordinate Measurements with Nanoscale Surface Height, Texture, Waviness and Form Characterization April 26th, 2016

Bruker Introduces Dimension FastScan Pro Industrial AFM: Providing Nanometer-Resolution at High Scan Rates for up to 300-mm Samples April 26th, 2016

Announcements

Spintronics for future information technologies: Spin currents in topological insulators controlled May 2nd, 2016

Nanoparticles present sustainable way to grow food crops May 1st, 2016

Clay nanotube-biopolymer composite scaffolds for tissue engineering May 1st, 2016

Cooling graphene-based film close to pilot-scale production April 30th, 2016

Tools

Exploring phosphorene, a promising new material April 29th, 2016

JPK reports on the use of a NanoWizard AFM system at the University of Kaiserslautern to study the interaction of bacteria with microstructured surfaces April 28th, 2016

Chemists use DNA to build the world's tiniest thermometer April 27th, 2016

Bruker Introduces Dimension FastScan Pro Industrial AFM: Providing Nanometer-Resolution at High Scan Rates for up to 300-mm Samples April 26th, 2016

Printing/Lithography/Inkjet/Inks

Electrically Conductive Graphene Ink Enables Printing of Biosensors April 23rd, 2016

Highlights from the Graphene Flagship April 22nd, 2016

Penn engineers develop first transistors made entirely of nanocrystal 'inks April 11th, 2016

Researchers use 3-D printing to create structure with active chemistry April 4th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic