Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > CAMECA Unveils News Semiconductor Metrology Tool

Cameca EX-300 LEXES metrology tool
Cameca EX-300 LEXES metrology tool

Abstract:
Versatile Metrology Tool for Front-End Process Control Of 22nm Technology Nodes and Beyond

CAMECA Unveils News Semiconductor Metrology Tool

Gennevillers, France | Posted on January 27th, 2011

CAMECA, a world leader in scientific instrumentation and metrology solutions for semiconductor labs and fabs, has unveiled the latest addition to its line of high-end metrology systems-the EX-300 metrology tool targeted for front-end process control of 22 nm technology nodes and beyond.

"CAMECA is very proud to introduce the EX-300," notes Dr. Michel Schuhmacher, CAMECA Vice President and Chief Technical Officer. "This highly versatile metrology tool benefits from CAMECA's 10-years of experience with LEXES (Low-energy Electron induced X-ray Emission Spectrometry) technology."

"We are convinced that the EX-300 will become the metrology tool of choice for semiconductor fabs integrating new challenging processes," adds Dr. Schuhmacher. "The EX-300 offers unique capabilities for front-end compositional control at and near the surface. The instrument targets front-end process control for 22nm technology nodes and performs metrology of patterned wafers down to 30x30µm."

The EX-300 utilizes LEXES, a unique surface probing technique pioneered by CAMECA. The technology is now well-established for addressing challenges in elemental composition, thickness determination and dopant dosimetry. With dozens of CAMECA LEXFAB 300 instruments currently installed at the top-ten semiconductor fabrication facilities worldwide, the technology is considered the standard for semiconductor R&D and ramping-up phases at the most advanced nodes as well as for high-volume production monitoring.

CAMECA optimized the performance of the EX-300 for challenging High K Metal Gate (HKMG), epitaxial layers such as Boron in Silcon Germanium(B:SiGe) and shallow implants, fulfilling requirements of both rapid device development and high-yield mass production. In addition, the instrument is designed to deliver enhanced long-term stability and minimize mean time to repair (MTTR).

####

About CAMECA
CAMECA has more than 50 years of experience in the design, manufacture and servicing of scientific instruments for material micro- and nano-analysis. Since pioneering Secondary Ion Mass Spectrometry (SIMS) and Electron Probe Microanalysis (EPMA) instrumentation in the 1950s, CAMECA has remained an undisputed world leader, while achieving numerous breakthrough innovations in such complementary techniques as LEXES and Atom Probe Tomography.

More recently CAMECA has evolved successfully from a provider of scientific instrumentation for the international research community to a provider of metrology solutions for the semiconductor industry. Headquartered near Paris, CAMECA has subsidiaries in China, Germany, Japan, Korea, Taiwan and the United States along with a global network of agents. Acquired in 2007 by AMETEK, Inc, a leading global manufacturer of electronic instrument and electromechanical products, CAMECA is now a unit of AMETEK’s Materials Analysis Division.

For more information, please click here

Contacts:
Marion Chopin
+33 (1) 43 34 62 00

Copyright © CAMECA

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Detecting small metallic contaminants in food via magnetization: A practical metallic-contaminant detecting system using three high-Tc RF superconducting quantum interference devices (SQUIDs) July 29th, 2015

Controlling phase changes in solids: Controlling phase changes in solids July 29th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

'Seeing' molecular interactions could give boost to organic electronics July 28th, 2015

Chip Technology

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

Quantum networks: Back and forth are not equal distances! July 28th, 2015

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Memory Technology

Controlling phase changes in solids: Controlling phase changes in solids July 29th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

Better memory with faster lasers July 14th, 2015

Nanoelectronics

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

ORNL researchers make scalable arrays of 'building blocks' for ultrathin electronics July 22nd, 2015

An easy, scalable and direct method for synthesizing graphene in silicon microelectronics: Korean researchers grow 4-inch diameter, high-quality, multi-layer graphene on desired silicon substrates, an important step for harnessing graphene in commercial silicon microelectronics July 21st, 2015

Announcements

Detecting small metallic contaminants in food via magnetization: A practical metallic-contaminant detecting system using three high-Tc RF superconducting quantum interference devices (SQUIDs) July 29th, 2015

Controlling phase changes in solids: Controlling phase changes in solids July 29th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

'Seeing' molecular interactions could give boost to organic electronics July 28th, 2015

Tools

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Ultra-thin hollow nanocages could reduce platinum use in fuel cell electrodes July 24th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project