Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > CAMECA Unveils News Semiconductor Metrology Tool

Cameca EX-300 LEXES metrology tool
Cameca EX-300 LEXES metrology tool

Abstract:
Versatile Metrology Tool for Front-End Process Control Of 22nm Technology Nodes and Beyond

CAMECA Unveils News Semiconductor Metrology Tool

Gennevillers, France | Posted on January 27th, 2011

CAMECA, a world leader in scientific instrumentation and metrology solutions for semiconductor labs and fabs, has unveiled the latest addition to its line of high-end metrology systems-the EX-300 metrology tool targeted for front-end process control of 22 nm technology nodes and beyond.

"CAMECA is very proud to introduce the EX-300," notes Dr. Michel Schuhmacher, CAMECA Vice President and Chief Technical Officer. "This highly versatile metrology tool benefits from CAMECA's 10-years of experience with LEXES (Low-energy Electron induced X-ray Emission Spectrometry) technology."

"We are convinced that the EX-300 will become the metrology tool of choice for semiconductor fabs integrating new challenging processes," adds Dr. Schuhmacher. "The EX-300 offers unique capabilities for front-end compositional control at and near the surface. The instrument targets front-end process control for 22nm technology nodes and performs metrology of patterned wafers down to 30x30µm."

The EX-300 utilizes LEXES, a unique surface probing technique pioneered by CAMECA. The technology is now well-established for addressing challenges in elemental composition, thickness determination and dopant dosimetry. With dozens of CAMECA LEXFAB 300 instruments currently installed at the top-ten semiconductor fabrication facilities worldwide, the technology is considered the standard for semiconductor R&D and ramping-up phases at the most advanced nodes as well as for high-volume production monitoring.

CAMECA optimized the performance of the EX-300 for challenging High K Metal Gate (HKMG), epitaxial layers such as Boron in Silcon Germanium(B:SiGe) and shallow implants, fulfilling requirements of both rapid device development and high-yield mass production. In addition, the instrument is designed to deliver enhanced long-term stability and minimize mean time to repair (MTTR).

####

About CAMECA
CAMECA has more than 50 years of experience in the design, manufacture and servicing of scientific instruments for material micro- and nano-analysis. Since pioneering Secondary Ion Mass Spectrometry (SIMS) and Electron Probe Microanalysis (EPMA) instrumentation in the 1950s, CAMECA has remained an undisputed world leader, while achieving numerous breakthrough innovations in such complementary techniques as LEXES and Atom Probe Tomography.

More recently CAMECA has evolved successfully from a provider of scientific instrumentation for the international research community to a provider of metrology solutions for the semiconductor industry. Headquartered near Paris, CAMECA has subsidiaries in China, Germany, Japan, Korea, Taiwan and the United States along with a global network of agents. Acquired in 2007 by AMETEK, Inc, a leading global manufacturer of electronic instrument and electromechanical products, CAMECA is now a unit of AMETEK’s Materials Analysis Division.

For more information, please click here

Contacts:
Marion Chopin
+33 (1) 43 34 62 00

Copyright © CAMECA

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Dream Chip Technologies Presents First 22nm FD-SOI Silicon of New Automotive Driver Assistance SoC: Advanced driver assistance system (ADAS) computer vision SoC developed for European THINGS2DO project with working first silicon fabricated on GLOBALFOUNDRIES’ 22nm FD-SOI Platfor February 27th, 2017

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Chip Technology

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Dream Chip Technologies Presents First 22nm FD-SOI Silicon of New Automotive Driver Assistance SoC: Advanced driver assistance system (ADAS) computer vision SoC developed for European THINGS2DO project with working first silicon fabricated on GLOBALFOUNDRIES’ 22nm FD-SOI Platfor February 27th, 2017

GLOBALFOUNDRIES Announces Availability of 45nm RF SOI to Advance 5G Mobile Communications: Optimized RF features deliver high-performance solutions for mmWave beam forming applications in 5G smartphones and base stations February 22nd, 2017

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

Memory Technology

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

Research opens door to smaller, cheaper, more agile communications tech February 16th, 2017

Scientists determine precise 3-D location, identity of all 23,000 atoms in a nanoparticle: Berkeley Lab researchers help to map iron-platinum particle in unprecedented detail February 6th, 2017

Investigations of the skyrmion Hall effect reveal surprising results: One step further towards the application of skyrmions in spintronic devices December 28th, 2016

Nanoelectronics

GLOBALFOUNDRIES Announces Availability of 45nm RF SOI to Advance 5G Mobile Communications: Optimized RF features deliver high-performance solutions for mmWave beam forming applications in 5G smartphones and base stations February 22nd, 2017

Particles from outer space are wreaking low-grade havoc on personal electronics February 19th, 2017

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

1,000 times more efficient nano-LED opens door to faster microchips February 5th, 2017

Announcements

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Dream Chip Technologies Presents First 22nm FD-SOI Silicon of New Automotive Driver Assistance SoC: Advanced driver assistance system (ADAS) computer vision SoC developed for European THINGS2DO project with working first silicon fabricated on GLOBALFOUNDRIES’ 22nm FD-SOI Platfor February 27th, 2017

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Tools

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Molecular phenomenon discovered by advanced NMR facility: Cutting edge technology has shown a molecule self-assembling into different forms when passing between solution state to solid state, and back again - a curious phenomenon in science - says research by the University of Wa February 22nd, 2017

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project