Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > TOK Joins CEA-Leti IMAGINE Program to Develop Multiple E-Beam Lithography Sub-20nm Resists and Processes

Abstract:
TOK and CEA-Leti today announced that TOK will join the new industry/research multi-partner program IMAGINE that is developing maskless lithography for IC manufacturing.

TOK Joins CEA-Leti IMAGINE Program to Develop Multiple E-Beam Lithography Sub-20nm Resists and Processes

Kawasaki, Japan | Posted on January 17th, 2011

The three-year project is led by CEA-Leti, a research center committed to creating and commercializing innovation in micro- and nanotechnologies, and also includes semiconductor manufacturers TSMC and STMicroelectronics. It is evaluating a maskless lithography infrastructure and the use of MAPPER Lithography tools for high throughput. The multiple e-beam-lithography program covers a global approach to the technology, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.

"TOK's material development beyond the 20nm node covers a broad range of technology- platform and lithography-process candidates, such as EUVL, ML2, and DSA. The IMAGINE program at CEA-Leti, which focuses on multiple e-beam lithography, is a very attractive program especially for understanding the fundamental RLS (resolution, line edge roughness and sensitivity) issue in photoresist development," said Kazufumi Sato, TOK R&D general manager. "TOK will contribute to the program by providing a materials perspective based on our deep knowledge of the electron-beam resist and recent discoveries from the EUV resist development."

"The development of new chemically amplified resist platforms achieving resolution below 20nm with a line-edge roughness in the nanometer range is one of the main challenges for next-generation lithography," said Serge Tedesco, CEA-Leti program manager. "We have already built a long and fruitful collaboration with TOK by working together at the introduction of e-beam lithography at the STMicroelectronics Crolles Line. We are very pleased to continue this relationship with a worldwide leader in resist technology, ensuring a boost for the IMAGINE program and reinforcing the semiconductor industry's commitment to introduce ML2 in manufacturing."

####

About CEA-Leti
CEA is a French research and technology public organization, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC campus, CEA-Leti operates 8,000-m² state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, CEA-Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, CEA-Leti puts a strong emphasis on intellectual property and owns more than 1,500 patent families.

About TOK
TOK is a world’s leading supplier of photoresists inevitably required for semiconductor and flat panel display. TOK has always been at the forefront of the leading edge microprocessing technologies based on photolithography as its core technology. And TOK also expands its business, applying the microprocessing technologies developed in semiconductor manufacturing into the fields such as LCD display, semiconductor packaging and other related sectors.

In addition to the above, as proposing new fields with innovative fabrication technologies, TOK is vigorously developing the Through Silicon Via (TSV) system which connects between the frontend and backend process in semiconductor manufacturing as well as deploying materials applied for solar cells paid a lot of attention as an energy resource.

Additional information about TOK is available at www.tok.co.jp/en/

For more information, please click here

Contacts:
TOK Contact:
Tomoyuki Yazawa
Phone +31 33 454 3527


Takeyuki Yokoyama
Phone +31 33 450 6028


CEA-Leti Contacts:
Serge Tedesco
Phone: +33 4 38 78 49 89


Agency
Amélie Ravier
Phone: +33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Color effects from transparent 3D printed nanostructures: New design tool automatically creates nanostructure 3D print templates for user-given colors Scientists present work at prestigious SIGGRAPH conference August 18th, 2018

Novel nanoparticle-based approach detects and treats oral plaque without drugs August 17th, 2018

UVA multidisciplinary engineering team designs technology for smart materials: The invention could lead to devices and manufactured goods, such as fabrics, that can dynamically regulate between thermally insulating and cooling August 17th, 2018

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Chip Technology

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Flipping the switch on supramolecular electronics August 14th, 2018

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Nanoelectronics

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Flipping the switch on supramolecular electronics August 14th, 2018

Quantum chains in graphene nanoribbons: Breakthrough in nanoresearch August 9th, 2018

Nanotube 'rebar' makes graphene twice as tough: Rice University scientists test material that shows promise for flexible electronics August 3rd, 2018

Announcements

Color effects from transparent 3D printed nanostructures: New design tool automatically creates nanostructure 3D print templates for user-given colors Scientists present work at prestigious SIGGRAPH conference August 18th, 2018

Novel nanoparticle-based approach detects and treats oral plaque without drugs August 17th, 2018

UVA multidisciplinary engineering team designs technology for smart materials: The invention could lead to devices and manufactured goods, such as fabrics, that can dynamically regulate between thermally insulating and cooling August 17th, 2018

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Leti and Oscaro Partner on Leti’s New Low-Power, Low-Cost Transceiver to Track Parcels July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

Leti & Partners Launch Pilot Program to Assess New Perception Sensors for Autonomous Vehicles July 5th, 2018

Research partnerships

Color effects from transparent 3D printed nanostructures: New design tool automatically creates nanostructure 3D print templates for user-given colors Scientists present work at prestigious SIGGRAPH conference August 18th, 2018

UVA multidisciplinary engineering team designs technology for smart materials: The invention could lead to devices and manufactured goods, such as fabrics, that can dynamically regulate between thermally insulating and cooling August 17th, 2018

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Yale-NUS scientist and collaborators solve open theoretical problem on electron interactions August 10th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project