Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Abstract:
SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, announced a strategic collaboration with the Cornell NanoScale Science & Technology Facility (CNF), a university nanofab based in North America.

SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Garching, Germany | Posted on January 11th, 2011

As part of the cooperation, Cornell staff will perform research using SUSS lithography equipment, including enhanced contact aligner tool sets and a Gamma spray coater. The research and development facilities at CNF, which hosts up to 700 users annually, will also serve SUSS MicroTec as a support lab for research applications and customer demonstrations. The new equipment is expected to become available to users early in 2011.

The lithography equipment to be installed at CNF includes two specialized mask aligner toolsets for the SUSS MA/BA6 aligner: Substrate Conformal Imprinting Lithography (SCIL), a technology developed by SUSS MicroTec in conjunction with Philips Research, that provides an inexpensive means of defining features of 10nm or less with high reproducibility by using a full-size imprint stamp and MO Exposure Optics, a patented technique developed by SUSS MicroTec's daughter company SUSS MicroOptics. This unique illumination technology extends the performance of standard lithography processes. The Gamma lithography coater cluster will be used to support all resist processing operations at CNF. It includes facilities for development, baking, and coating, including the SUSS spray coat module for high aspect ratio structures.

According to Don Tennant, Director of Operations at Cornell's NanoScale Facility, "The Gamma system manufactured by SUSS MicroTec will bring to CNF the high end performance coat bake and develop capability that is really needed". Its stable, reproducible results and its process flexibility are a great match to the needs of our users. This agreement will also provide us with an opportunity to explore the exciting new technology that SUSS MicroTec has developed both for the Gamma system and for the MA/BA6 platform. We are anxious to learn what these advancements can do to enhance the efforts of our users."

"We are very pleased to have the CNF, a recognized pioneer in nanotechnology research, as our partner", commented Frank Averdung, President and CEO of SUSS MicroTec AG. "We are looking forward to using their state-of-the-art research facilities for further developing our technologies. We are happy to offer our North American customers the option to have their application processes set up and tested in this environment."

####

For more information, please click here

Contacts:
SÜSS MicroTec AG
Phone:+49 89 32007 0
presscontact(at)suss(dot)com

Copyright © SUSS MicroTec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Academic/Education

The Institute of Applied Physics at the University of Tsukuba near Tokyo in Japan uses Deben's ARM2 detector to better understand catalytic reaction mechanisms June 27th, 2018

Powering the 21st Century with Integrated Photonics: UCSB-Led Team Selected for Demonstration of a Novel Waveguide Platform Which is Transparent Throughout the MWIR and LWIR Spectral Bands June 19th, 2018

SUNY Poly Professor Eric Lifshin Selected for ‘Fellow of the Microanalysis Society’ Position for Significant Contributions to Microanalysis June 13th, 2018

Grand Opening of UC Irvine Materials Research Institute (IMRI) to Spotlight JEOL Center for Nanoscale Solutions: Renowned Materials Scientists to Present at the 1st International Symposium on Advanced Microscopy and Spectroscopy (ISAMS) April 18th, 2018

Nanoelectronics

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Laser sintering optimized for printed electronics: New study sheds (laser) light on the best means of laying down thin-film circuitry September 13th, 2018

September 5th, 2018

Rice U. lab probes molecular limit of plasmonics: Optical effect detailed in organic molecules with fewer than 50 atoms September 5th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Leti & EFI Aim to Dramatically Improve Reliability & Speed of Low-Cost Electronic Devices for Autos: Project Will Extend Model Predictive Control Technique to Microcontrollers, Digital Signal Processors and Other Devices that Lack Powerful Computation Capabilities September 18th, 2018

Silvaco, Purdue team up to bring scalable atomistic TCAD solutions for next generation semiconductor devices and materials August 24th, 2018

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project