Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Abstract:
SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, announced a strategic collaboration with the Cornell NanoScale Science & Technology Facility (CNF), a university nanofab based in North America.

SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Garching, Germany | Posted on January 11th, 2011

As part of the cooperation, Cornell staff will perform research using SUSS lithography equipment, including enhanced contact aligner tool sets and a Gamma spray coater. The research and development facilities at CNF, which hosts up to 700 users annually, will also serve SUSS MicroTec as a support lab for research applications and customer demonstrations. The new equipment is expected to become available to users early in 2011.

The lithography equipment to be installed at CNF includes two specialized mask aligner toolsets for the SUSS MA/BA6 aligner: Substrate Conformal Imprinting Lithography (SCIL), a technology developed by SUSS MicroTec in conjunction with Philips Research, that provides an inexpensive means of defining features of 10nm or less with high reproducibility by using a full-size imprint stamp and MO Exposure Optics, a patented technique developed by SUSS MicroTec's daughter company SUSS MicroOptics. This unique illumination technology extends the performance of standard lithography processes. The Gamma lithography coater cluster will be used to support all resist processing operations at CNF. It includes facilities for development, baking, and coating, including the SUSS spray coat module for high aspect ratio structures.

According to Don Tennant, Director of Operations at Cornell's NanoScale Facility, "The Gamma system manufactured by SUSS MicroTec will bring to CNF the high end performance coat bake and develop capability that is really needed". Its stable, reproducible results and its process flexibility are a great match to the needs of our users. This agreement will also provide us with an opportunity to explore the exciting new technology that SUSS MicroTec has developed both for the Gamma system and for the MA/BA6 platform. We are anxious to learn what these advancements can do to enhance the efforts of our users."

"We are very pleased to have the CNF, a recognized pioneer in nanotechnology research, as our partner", commented Frank Averdung, President and CEO of SUSS MicroTec AG. "We are looking forward to using their state-of-the-art research facilities for further developing our technologies. We are happy to offer our North American customers the option to have their application processes set up and tested in this environment."

####

For more information, please click here

Contacts:
SÜSS MicroTec AG
Phone:+49 89 32007 0
presscontact(at)suss(dot)com

Copyright © SUSS MicroTec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Doubling down on Schrödinger's cat May 27th, 2016

Finding a new formula for concrete: Researchers look to bones and shells as blueprints for stronger, more durable concrete May 26th, 2016

Deep Space Industries and SFL selected to provide satellites for HawkEye 360’s Pathfinder mission: The privately-funded space-based global wireless signal monitoring system will be developed by Deep Space Industries and UTIAS Space Flight Laboratory May 26th, 2016

Academic/Education

Graphene: Progress, not quantum leaps May 23rd, 2016

Smithsonian Science Education Center and National Space Society Team Up for Next-Generation Space Education Program "Enterprise In Space" May 11th, 2016

The University of Colorado Boulder, USA, combines Raman spectroscopy and nanoindentation for improved materials characterisation May 9th, 2016

Albertan Science Lab Opens in India May 7th, 2016

Nanoelectronics

Researchers demonstrate size quantization of Dirac fermions in graphene: Characterization of high-quality material reveals important details relevant to next generation nanoelectronic devices May 20th, 2016

Graphene: A quantum of current - When current comes in discrete packages: Viennese scientists unravel the quantum properties of the carbon material graphene May 20th, 2016

New type of graphene-based transistor will increase the clock speed of processors: Scientists have developed a new type of graphene-based transistor and using modeling they have demonstrated that it has ultralow power consumption compared with other similar transistor devices May 19th, 2016

Self-healing, flexible electronic material restores functions after many breaks May 17th, 2016

Announcements

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Doubling down on Schrödinger's cat May 27th, 2016

Finding a new formula for concrete: Researchers look to bones and shells as blueprints for stronger, more durable concrete May 26th, 2016

Deep Space Industries and SFL selected to provide satellites for HawkEye 360’s Pathfinder mission: The privately-funded space-based global wireless signal monitoring system will be developed by Deep Space Industries and UTIAS Space Flight Laboratory May 26th, 2016

Tools

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

More light on cancer: Scientists created nanoparticles to highlight cancer cells May 21st, 2016

Nanotubes are beacons in cancer-imaging technique: Rice University researchers use spectral triangulation to pinpoint location of tumors May 21st, 2016

Alliances/Trade associations/Partnerships/Distributorships

The CEA Announces Expanded Collaboration with Intel to Advance Cutting-edge Research and Innovation in Key Digital Areas May 17th, 2016

Solliance realizes first up-scaled Perovskite based PV modules with 10% efficiency: Holst Centre, imec and ECN pave the road to upscaling Perovskite PV modules May 10th, 2016

Industrial Nanotech, Inc. Expands Distribution Network in US and Internationally May 9th, 2016

Albertan Science Lab Opens in India May 7th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic