Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Abstract:
SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, announced a strategic collaboration with the Cornell NanoScale Science & Technology Facility (CNF), a university nanofab based in North America.

SUSS MicroTec Announces Collaboration in Nano Research with Cornell University

Garching, Germany | Posted on January 11th, 2011

As part of the cooperation, Cornell staff will perform research using SUSS lithography equipment, including enhanced contact aligner tool sets and a Gamma spray coater. The research and development facilities at CNF, which hosts up to 700 users annually, will also serve SUSS MicroTec as a support lab for research applications and customer demonstrations. The new equipment is expected to become available to users early in 2011.

The lithography equipment to be installed at CNF includes two specialized mask aligner toolsets for the SUSS MA/BA6 aligner: Substrate Conformal Imprinting Lithography (SCIL), a technology developed by SUSS MicroTec in conjunction with Philips Research, that provides an inexpensive means of defining features of 10nm or less with high reproducibility by using a full-size imprint stamp and MO Exposure Optics, a patented technique developed by SUSS MicroTec's daughter company SUSS MicroOptics. This unique illumination technology extends the performance of standard lithography processes. The Gamma lithography coater cluster will be used to support all resist processing operations at CNF. It includes facilities for development, baking, and coating, including the SUSS spray coat module for high aspect ratio structures.

According to Don Tennant, Director of Operations at Cornell's NanoScale Facility, "The Gamma system manufactured by SUSS MicroTec will bring to CNF the high end performance coat bake and develop capability that is really needed". Its stable, reproducible results and its process flexibility are a great match to the needs of our users. This agreement will also provide us with an opportunity to explore the exciting new technology that SUSS MicroTec has developed both for the Gamma system and for the MA/BA6 platform. We are anxious to learn what these advancements can do to enhance the efforts of our users."

"We are very pleased to have the CNF, a recognized pioneer in nanotechnology research, as our partner", commented Frank Averdung, President and CEO of SUSS MicroTec AG. "We are looking forward to using their state-of-the-art research facilities for further developing our technologies. We are happy to offer our North American customers the option to have their application processes set up and tested in this environment."

####

For more information, please click here

Contacts:
SÜSS MicroTec AG
Phone:+49 89 32007 0
presscontact(at)suss(dot)com

Copyright © SUSS MicroTec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultra-short pulse lasers & Positioning August 21st, 2014

Malvern’s Dr Alan Rawle talks TLAs in plenary lecture at Particulate Systems Analysis conference August 21st, 2014

Water window imaging opportunity: A new theoretical study elucidates mechanisms that could help in producing coherent radiations, ultimately promoting high-contrast imaging of biological samples August 21st, 2014

Nanotechnology Helps Production of Super Adsorbent Polymers August 21st, 2014

Academic/Education

SEMATECH and Newly Merged SUNY CNSE/SUNYIT Launch New Patterning Center to Further Advance Materials Development: Center to Provide Access to Critical Tools that Support Semiconductor Technology Node Development August 7th, 2014

Oxford Instruments Asylum Research and the Center for Nanoscale Systems at Harvard University Present a Workshop on AFM Nanomechanical and Nanoelectrical Characterization, Aug. 21-22 August 6th, 2014

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

Haydale Announces Collaboration Agreement with Swansea University’s Welsh Centre for Printing and Coatings (WCPC) July 12th, 2014

Nanoelectronics

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

3-D nanostructure could benefit nanoelectronics, gas storage: Rice U. researchers predict functional advantages of 3-D boron nitride July 15th, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Announcements

Ultra-short pulse lasers & Positioning August 21st, 2014

Malvern’s Dr Alan Rawle talks TLAs in plenary lecture at Particulate Systems Analysis conference August 21st, 2014

Water window imaging opportunity: A new theoretical study elucidates mechanisms that could help in producing coherent radiations, ultimately promoting high-contrast imaging of biological samples August 21st, 2014

Nanotechnology Helps Production of Super Adsorbent Polymers August 21st, 2014

Tools

Ultra-short pulse lasers & Positioning August 21st, 2014

Malvern’s Dr Alan Rawle talks TLAs in plenary lecture at Particulate Systems Analysis conference August 21st, 2014

Oxford Instruments Asylum Research Receives the 2014 Microscopy Today Innovation Award for blueDrive Photothermal Excitation August 18th, 2014

Laser makes microscopes way cooler: Cooling a nanowire probe with a laser could lead to substantial improvements in the sensitivity of atomic force probe microscopes August 15th, 2014

Alliances/Partnerships/Distributorships

Sunblock poses potential hazard to sea life August 20th, 2014

SouthWest NanoTechnologies Appoints Matteson-Ridolfi for U.S. Distribution of its SMW™ Specialty Multiwall Carbon Nanotubes August 13th, 2014

Could hemp nanosheets topple graphene for making the ideal supercapacitor? August 12th, 2014

On the frontiers of cyborg science August 10th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE