Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH Gate-Stack Symposium Identifies Post-22 nm Strategies

Abstract:
Participants at the recent 7th Annual International Symposium on Advanced Gate Stack Technology discussed strategies for implementing advanced logic and memory technologies for sub-16 nm node and beyond process technologies.

SEMATECH Gate-Stack Symposium Identifies Post-22 nm Strategies

Albany, NY | Posted on October 13th, 2010

The Symposium, hosted by SEMATECH, drew more than 100 international researchers from industry and academia that shared recent discoveries and outlined new gate stack strategies for the 16 nm technology generation and beyond.

"We are very pleased with the global participation in the conference, and with the outcome - in the exploration of solutions for functional stacks for future devices," said Paul Kirsch, SEMATECH's director of front end processes. "The Symposium's success can be attributed to the breadth and depth of its participants and their research findings. SEMATECH will continue to work collaboratively with the industry on fundamental issues on extending CMOS logic and memory technologies."

The technologies covered were high-k/metal gate stacks for Silicon (Si), Silicon Germanium (SiGe), III-V high performance MOSFETs, metal/high-k/metal stacks for resistance change memory, flash memory, and phase change memory.

Key observations include:

· Progress is being made on Ge and III-V alternative channel material devices, although there was general acknowledgement among Symposium attendees that this area will require more effort and more resources to demonstrate manufacturable solutions.

· Various presenters addressed the functional stack challenges for logic and memory centered on high-k metal gate for Si, SiGe as well as concerns over III-V high performance MOSFETs.

· Consensus of the participants is although there are many hurdles to overcome, vertical stacking seems the most promising pathway for continued scaling.

· To offset the slowdown in scaling and achieve uniformity and address reliability, newer, more innovative materials and switching mechanisms of non-volatile memories need to be investigated further.

Other findings disclosed at the Symposium:

· Keynote presenters, from Intel's Technology and Manufacturing Group and Macronix provided a comprehensive overview of transistor scaling options beyond the 15 nm node and the challenges of non-volatile memories including floating gate for planar and non-planar devices.

· High-k / metal gate process issues were discussed by SONY, Toshiba, IBM and GLOBALFOUNDRIES, highlighting issues with stack scaling.

· Andrew Kummel of the University of California, San Diego discussed the density-functional theory (DFT) simulations suggesting practical pathways to improve the quality of high-k oxides on both Ge and III-V interfaces.

· In the area of emerging memory development, resistance change memory is considered to be one of the most promising candidates for the next generation of memory. Various materials, selector devices and architectures were showcased. Cross bar architectures were discussed for future memory.

· The impressive progress on Spin Torque Transfer (STTRAM) was discussed by Grandis, Everspin and the University of Virginia.

· Several presentations explored new or alternative materials and architectures beyond CMOS devices for 2020, including electron spin devices, graphene, and nanowire transistors. Prof. Kang Wang of University of California at Los Angeles reported efficient spin injection into Ge was realized using magnesium oxide (MgO) and is being optimized for spin transfer torque.

The International Symposium on Advanced Gate Stack Technology is part of the SEMATECH Knowledge Series, a set of public, single-focused industry meetings designed to increase global knowledge in key areas of semiconductor R&D.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
257 Fuller Road, Suite 2200
Albany, NY 12203
o: 518-649-1041
m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Possible Futures

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

GLOBALFOUNDRIES Demonstrates Industry-Leading 112G Technology for Next-Generation Connectivity Solutions: High bandwidth, low power SerDes IP portfolio enables ‘connected intelligence’ in data centers and networking applications November 15th, 2017

Counterfeits and product piracy can be prevented by security features, such as printed 3-D microstructures: Forgeries and product piracy are detrimental to society and industry -- 3-D microstructures can increase security -- KIT researchers develop innovative fluorescent 3-D stru November 15th, 2017

Chip Technology

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

GLOBALFOUNDRIES Demonstrates Industry-Leading 112G Technology for Next-Generation Connectivity Solutions: High bandwidth, low power SerDes IP portfolio enables ‘connected intelligence’ in data centers and networking applications November 15th, 2017

Nanometrics Announces $50 Million Share Repurchase Program November 15th, 2017

Nanotubes/Buckyballs/Fullerenes/Nanorods

TUBALL nanotube-based concentrates recognised as the most innovative raw material for composites by JEC Group November 7th, 2017

Nanotube fiber antennas as capable as copper: Rice University researchers show their flexible fibers work well but weigh much less October 23rd, 2017

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

How to draw electricity from the bloodstream: A one-dimensional fluidic nanogenerator with a high power-conversion efficiency September 11th, 2017

Nanoelectronics

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Leti Will Present 11 Papers and Host More-than-Moore Technologies Workshop November 14th, 2017

The next generation of power electronics? Gallium nitride doped with beryllium: How to cut down energy loss in power electronics? The right kind of doping November 9th, 2017

Researchers bring optical communication onto silicon chips: Ultrathin films of a semiconductor that emits and detects light can be stacked on top of silicon wafers October 23rd, 2017

Announcements

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Events/Classes

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Arrowhead to Present at 29th Annual Piper Jaffray Healthcare Conference November 14th, 2017

Leti Will Present 11 Papers and Host More-than-Moore Technologies Workshop November 14th, 2017

TUBALL nanotube-based concentrates recognised as the most innovative raw material for composites by JEC Group November 7th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project