Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SOKUDO Joins CEA-Leti IMAGINE Program to Develop Multiple E-Beam Lithography Process

Abstract:
SOKUDO Co., Ltd., the lithography coat/develop track, process equipment, joint venture company, and CEA-Leti today announced that SOKUDO will join the new industry/research multi-partner program IMAGINE that is developing maskless lithography for IC manufacturing.

SOKUDO Joins CEA-Leti IMAGINE Program to Develop Multiple E-Beam Lithography Process

Kyoto, Japan & Grenoble, France | Posted on September 16th, 2010

The three-year project is led by CEA-Leti, the leading French semiconductor research institute, and also includes semiconductor manufacturers TSMC and STMicroelectronics. It is evaluating a maskless lithography infrastructure and the use of MAPPER Lithography tools for high throughput. The multiple e-beam-lithography program covers a global approach to the technology, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.

"E-beam has the potential to be a viable technology for many sub-22nm lithography process layers in logic/foundry semiconductor manufacturing," said Tadahiro Suhara, SOKUDO president and CEO. "SOKUDO is taking a comprehensive approach to being prepared for coat/develop track process readiness in multiple sub-22nm lithography technologies, including immersion ArF lithography extensions, EUV and e-beam lithography. The CEA-Leti IMAGINE collaboration brings together a focused effort to enable production-worthy e-beam lithography, including multiple resist manufacturers key to sub-22nm process development."

"We have been working with SOKUDO's RF3 coat-and-develop track system for many years and the IMAGINE program will benefit from the strong knowledge and support of SOKUDO in developing the necessary processes to support maskless technology," said Serge Tedesco, CEA-Leti program manager. "The experience of CEA-Leti in e-beam technology combined with SOKUDO's coat-and-develop track expertise will help secure the necessary process infrastructure for multi e-beam lithography."

MAPPER Lithography B.V., based in Delft, The Netherlands, makes maskless-lithography machines for the semiconductor industry. It is supporting the IMAGINE project with its massively parallel electron-beam platforms.

####

About CEA-Leti
CEA is a French research and technology public organisation, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC campus, CEA-Leti operates 8,000-m² state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, CEA-Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, CEA-Leti puts a strong emphasis on intellectual property and owns more than 1,500 patent families.

About SOKUDO Co., Ltd.
SOKUDO Co., Ltd. (Headquarters: Kyoto, Japan) is a joint venture company owned by Dainippon Screen Mfg. Co., Ltd. and Applied Materials, Inc. SOKUDO was established in 2006 for the development, manufacturing, sales and service of advanced coat/develop track equipment for semiconductor production. Additional information on SOKUDO can be found at www.sokudo.com.

For more information, please click here

Contacts:
SOKUDO Contact:
Charles Pieczulewski
Senior Manager, Strategic Marketing
+81 75 256 8245


CEA-LETI Contacts:
Serge Tedesco
+33 4 38 78 49 89


Thierry Bosc
+33 4 38 78 31 95


Agency
Amélie Ravier
+33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Research brief: UMN researchers use green gold to rapidly detect and identify harmful bacteria August 15th, 2018

Particles pull last drops of oil from well water: Rice University engineers find nanoscale solution to 'produced water' problem August 15th, 2018

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

Chip Technology

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Flipping the switch on supramolecular electronics August 14th, 2018

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Scientists squeeze nanocrystals in a liquid droplet into a solid-like state and back again: Simple chemical technique transforms crystal mixture where 2 liquids meet August 9th, 2018

Nanoelectronics

Flipping the switch on supramolecular electronics August 14th, 2018

Quantum chains in graphene nanoribbons: Breakthrough in nanoresearch August 9th, 2018

Nanotube 'rebar' makes graphene twice as tough: Rice University scientists test material that shows promise for flexible electronics August 3rd, 2018

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Announcements

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Research brief: UMN researchers use green gold to rapidly detect and identify harmful bacteria August 15th, 2018

Particles pull last drops of oil from well water: Rice University engineers find nanoscale solution to 'produced water' problem August 15th, 2018

How hot is Schrödinger's coffee? August 15th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Leti and Oscaro Partner on Leti’s New Low-Power, Low-Cost Transceiver to Track Parcels July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

Leti & Partners Launch Pilot Program to Assess New Perception Sensors for Autonomous Vehicles July 5th, 2018

Research partnerships

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Yale-NUS scientist and collaborators solve open theoretical problem on electron interactions August 10th, 2018

Scientists squeeze nanocrystals in a liquid droplet into a solid-like state and back again: Simple chemical technique transforms crystal mixture where 2 liquids meet August 9th, 2018

Quantum chains in graphene nanoribbons: Breakthrough in nanoresearch August 9th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project