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September 7th, 2010
ATMI and Ovonyx reported progress toward the commercialization of germanium antimony telluride-based phase change memory devices using chemical vapor deposition processes. Not to be outdone, Silicon Genesis (SiGen) has started production of solar wafers using its new high volume manufacturing system, dubbed PolyMax.
ATMI and Ovonyx declared that "This work enabled conformal depositions in high aspect ratio PCM cells and demonstrated good electrical results when compared to sputter-deposited GST 225 on comparable device structures." Results include various CVD alloy depositions that demonstrated set speed below 50ns, typical endurance of 108-1010 cycles, and data retention that exceeded 100°C for 10 years.
"GST-based PCM continues to show significant commercial potential as a replacement memory technology for NOR Flash and segments of DRAM markets," said Tod Higinbotham, ATMI's executive VP and general manager of microelectronics.
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