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Home > News > Stanford University places order for 2 CVD Systems with Plasma-Therm

July 29th, 2010

Stanford University places order for 2 CVD Systems with Plasma-Therm

Abstract:
StanfordUniversityhas recently placed an order for two Plasma-Therm deposition systems: a Versaline HDPCVD system and a Shuttlelock PECVD system. The tools will be installed at Stanford's Nanofabrication Facility.

Source:
compoundsemiconductor.net

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