Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Imec’s SiGe MEMS technology platform improves performance of state-of-the-art MEMS

Abstract:
Imec demonstrates the value of its SiGe above-IC MEMS technology platform for improving performance of state-of-the-art MEMS with the development of new MEMS devices. The new devices are a 15µm SiGe micromirror and a grating light valve for high-resolution displays. The devices were realized with imec's generic CMOS-compatible MEMS process for the monolithic integration of MEMS devices directly on top of CMOS metallization.

Imec’s SiGe MEMS technology platform improves performance of state-of-the-art MEMS

Leuven, Belgium | Posted on July 14th, 2010

The 15µm micromirror, designed for use in display systems, uses an innovative electrostatic actuation mechanism relying on 6 electrodes. The design enables analog pulse-width modulation (PWM) instead of the binary-weighed PWM of current state-of-the-art MEMS-based micromirrors. This novel actuation mechanism allows display of a large range of grey-scale values, while binary-weighed PWM depends on the number of sub-frames or bit-planes. Using analog PWM thus leads to higher response speed, less image processing hardware and less memory. Moreover, the analog PWM is implemented on the MEMS level instead of on the CMOS level, allowing a simplified electronic circuit.

The second device is a grating light valve, a MEMS reflection grating producing bright and dark pixels in a display system by controlled diffraction of incident light due to electrostatic deflection of microbeams. The grating light valve uses clamped-clamped microbeams which are suspended over an electrode. It can modulate the intensity of the diffracted light when an actuation voltage is applied to half of the beams. Display systems using such a technology provide a high contrast ratio, high resolution and high brightness. Both the mirrors and grating light valves are realized with a 300nm thick SiGe structural layer.

The devices have been realized in the frame of the Flemish Strategic Basic Research (SBO) project Gemini, a collaboration between imec, Ghent University and Katholieke Universiteit Leuven (K.U.Leuven). Imec's MEMS technology platform, set up in imec's 200mm fab, to integrate MEMS and its readout and driving electronics on one chip, has been used to design and process the devices. The platform consists of a number of standard modules (CMOS protection layer, MEMS via and poly-SiGe electrode, anchor and poly-SiGe structural layer and a thin-film poly-SiGe packaging module) which can be processed at ~450şC above standard CMOS. Optional (optical, piezoresistive, probes…) modules can be added, depending on the functionality that is needed. This monolithic approach results in more compact systems with a reduced assembly and packaging cost and a higher performance than current hybrid systems. Companies can get access to this MEMS-technology platform through the imec CMORE service (www.imec.be/cmore).

####

About imec
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,750 people includes over 550 industrial residents and guest researchers. In 2009, imec's revenue (P&L) was 275 million euro. Further information on imec can be found at www.imec.be.

Note: Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.).

For more information, please click here

Contacts:
imec: Katrien Marent, Director of External Communications, T: +32 16 28 18 80, Mobile: +32 474 30 28 66,

Barbara Kalkis, Maestro Marketing & PR, T: +1 408 996 9975, M: +1 408 529 4210,

Copyright © imec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

MEMS

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

Cleaning or Etching Items with Unique Geometries Requires Specialized Expertise June 27th, 2018

Executives Explore Key Megatrends and Innovations in MEMS, Sensors, Imaging Tech at SEMI-MSIG European Summits: Speakers to share developments in smart automotive, smart cities, smart industrial, biomedical, consumer and IoT, September 19-21, 2018 in Grenoble, France June 19th, 2018

HTA to Present European Strategy for Competitive Micro- and Nanotechnologies & Smart Systems: Special Event in Brussels on April 24 Gathers Research Institutes’ CEOs, European Commissioners and Key European Industrials April 17th, 2018

Announcements

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

UMBC researchers develop nanoparticles to reduce internal bleeding caused by blast trauma July 13th, 2018

Tools

Oxford Instruments’ 22 Tesla superconducting magnet system commissioned at the UAM, making it the most intense magnetic field available outside a large international facility July 12th, 2018

Nanometrics to Announce Second Quarter Financial Results on July 31, 2018 July 12th, 2018

Nanometrics to Participate in the 10th Annual CEO Investor Summit 2018: Accredited investor and publishing research analyst event held concurrently with SEMICON West and Intersolar 2018 in San Francisco June 28th, 2018

The Institute of Applied Physics at the University of Tsukuba near Tokyo in Japan uses Deben's ARM2 detector to better understand catalytic reaction mechanisms June 27th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project