Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Optical ethanol vapor sensor shows potential of SOI-based integrated gas sensors

A scanning electron microscope (SEM) image of a SOI microring resonator of 5µm radius
A scanning electron microscope (SEM) image of a SOI microring resonator of 5µm radius

Abstract:
An ethanol vapor sensor is fabricated using a ZnO nanoparticle film as a coating on a silicon-on-insulator (SOI) microring resonator of 5µm in radius. The sensor can detect ethanol vapor concentrations as low as 100ppm. This achievement successfully demonstrates the potential of SOI technology for the development of sensitive, compact, low-power and inexpensive optical gas sensing devices.

Optical ethanol vapor sensor shows potential of SOI-based integrated gas sensors

Belgium | Posted on June 22nd, 2010

INTEC, imec's associated laboratory at Ghent University, and imec have coated SOI microring resonators with films of 3.5nm ZnO nanocrystals for optical sensing of gaseous ethanol. Ethanol vapor concentrations down to 100ppm have been detected. The proposed technology meets today's demand for compact, cheap, low-power and reasonably sensitive gas detection systems. By doping metal oxides with specific functional molecules, this technique can be extended for selective detection of other gases.

With this result, INTEC and imec have demonstrated the potential of SOI technology for integrated low-power and low-cost optical gas sensing. With future advancements in micropatterning techniques, other selective films can efficiently be coated on several microring resonators to achieve integrated and multiplexed multi-gas sensing on an optical chip. In several industrial, medical and environmental applications, this technology can be advantageous over other techniques (electrochemical, catalytic...). For instance, integrated optical gas sensors are very compact and can operate at room temperature, they are suitable for remote sensing and multiplexing, they are not affected by electromagnetic interference and don't involve direct electrical contacts enabling risk free operation in explosive gas environments. Moreover, these sensors can provide a robust and reliable solution taking the advantage of stable metal oxide coatings. The compatibility of the SOI devices with CMOS fabrication tools and the promise of inexpensive mass fabrication make this technology additionally attractive.

The microring resonators have been fabricated with standard CMOS fabrication facilities. In practice, 193nm deep-ultraviolet photolithography in combination with dry etching is used to fabricate high-Q microring resonators of 5µm in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of 3.5nm diameter. After coating, the SOI microring resonators have Q values of about 15,000. The porous nature of the coating provides a large surface area for gas adsorption. When ethanol vapor is adsorbed, a change in the ZnO refractive index occurs and a shift in the resonance wavelength of the microring resonator due to evanescent field interaction can be measured. E.g., exposure to 1500ppm of ethanol leads to a shift of 500pm. With this sensing configuration, ethanol vapor concentrations down to 100ppm are detected and a detection limit below 25ppm is estimated.

####

About imec
Imec is Europe’s largest independent research center in nanoelectronics and nano-technology. Its staff of more than 1,750 people includes over 550 industrial residents and guest researchers. Imec’s research is applied in better healthcare, smart electronics, sustainable energy, and safer transport.

For more information, please click here

Contacts:
Kapeldreef 75
B-3001 Leuven
Belgium
Phone: +32 16 28 12 11
Fax: +32 16 22 94 00

Copyright © imec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Building a smart cardiac patch: 'Bionic' cardiac patch could one day monitor and respond to cardiac problems June 28th, 2016

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

Yale researchers’ technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Chip Technology

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

GraphExeter illuminates bright new future for flexible lighting devices June 23rd, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Particle zoo in a quantum computer: First experimental quantum simulation of particle physics phenomena June 23rd, 2016

Sensors

Researchers discover new chemical sensing technique: Technique allows sharper detail -- and more information -- with near infrared light June 24th, 2016

Artificial synapse rivals biological ones in energy consumption June 21st, 2016

A new form of hybrid photodetectors with quantum dots and graphene June 19th, 2016

Drum beats from a one atom thick graphite membrane June 15th, 2016

Announcements

Building a smart cardiac patch: 'Bionic' cardiac patch could one day monitor and respond to cardiac problems June 28th, 2016

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

Yale researchers’ technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic