Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm
Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm

Abstract:
Siyuan Yu, Professor in Photonics and Optical Communications
Department of Electrical & Electronic Engineering, University of Bristol

Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

UK | Posted on June 14th, 2010

The Photonics Group at the University of Bristol have used their OIPT System100 RIE100 ICP180 system to develop a high speed, high quality process for etching sub-micron features in Lithium Niobate (LiNbO3) and related materials. This work was motivated by the need to produce high aspect ratio, highly vertical features, such as photonic crystals, in LiNbO3.

LiNbO3 is a hard material to etch. Previously reported etch processes had limited dry etch rate of ~20 nm/min. Such slow etch rate was also typically associated with low selectivity over mask materials. Although the slow etch processes may be able to etch waveguides that does not require very vertical profiles, they require a long etch time. More importantly, they cannot be used to achieve photonic features with sizes approaching 100nm and requiring very smooth and vertical sidewall profiles to optimise their optical performance.

The Bristol group developed an optimised SF6-based chemistry on the RIE100/ICP180 system. The high density ICP plasma source enables etch rates of up to 200 nm/min, with vertical and smooth sidewalls. Ridge waveguides, gratings (Figure 1), and photonic crystals (Figure 2) have been successfully etched into LiNbO3 planar waveguide layers produced by proto exchange and by epitaxial growth on Lithium Tantalate (LiTaO3) substrates. Depths of up to 0.8 micron have been achieved with feature sizes of less than 200 nm.

The Bristol group have also been able to pattern the LiTaO3 substrate using such etching processes before the epitaxial growth of the LiNbO3 layer at Prof Pam Thomas' group in the Physics Department, Warwick University, who successfully produced buried photonic structures in these crystals.

####

For more information, please click here

Contacts:
Prof. Siyuan Yu.

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

New Biosensor Produced in Iran to Detect Effective Drugs in Cancer Treatment July 4th, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Possible Futures

Groundbreaking research to help control liquids at micro and nano scales July 3rd, 2015

Harris & Harris Group Portfolio Company D-Wave Systems Announces 1,000 Qubit Processor and is Discussed in the Economist June 23rd, 2015

Global Nanoclays Market Analysis, Size, Growth, Trends And Segment Forecasts, 2015 To 2022: Grand View Research, Inc June 15th, 2015

Healthcare Nanotechnology (Nanomedicine) Market Size To 2020 June 5th, 2015

Academic/Education

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

Rice University boots up powerful microscopes: New electron microscopes will capture images at subnanometer resolution June 29th, 2015

Six top Catalan research centres constitute ‘The Barcelona Institute of Science and Technology’ to pursue a joint scientific endeavour June 27th, 2015

Lancaster University revolutionary quantum technology research receives funding boost June 22nd, 2015

Announcements

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

New Biosensor Produced in Iran to Detect Effective Drugs in Cancer Treatment July 4th, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Photonics/Optics/Lasers

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Making new materials with micro-explosions: ANU media release: Scientists have made exotic new materials by creating laser-induced micro-explosions in silicon, the common computer chip material June 29th, 2015

Opening a new route to photonics Berkeley lab researchers find way to control light in densely packed nanowaveguides June 27th, 2015

The quantum spin Hall effect is a fundamental property of light June 25th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project