Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

android tablet pc

Home > Press > Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm
Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm

Siyuan Yu, Professor in Photonics and Optical Communications
Department of Electrical & Electronic Engineering, University of Bristol

Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

UK | Posted on June 14th, 2010

The Photonics Group at the University of Bristol have used their OIPT System100 RIE100 ICP180 system to develop a high speed, high quality process for etching sub-micron features in Lithium Niobate (LiNbO3) and related materials. This work was motivated by the need to produce high aspect ratio, highly vertical features, such as photonic crystals, in LiNbO3.

LiNbO3 is a hard material to etch. Previously reported etch processes had limited dry etch rate of ~20 nm/min. Such slow etch rate was also typically associated with low selectivity over mask materials. Although the slow etch processes may be able to etch waveguides that does not require very vertical profiles, they require a long etch time. More importantly, they cannot be used to achieve photonic features with sizes approaching 100nm and requiring very smooth and vertical sidewall profiles to optimise their optical performance.

The Bristol group developed an optimised SF6-based chemistry on the RIE100/ICP180 system. The high density ICP plasma source enables etch rates of up to 200 nm/min, with vertical and smooth sidewalls. Ridge waveguides, gratings (Figure 1), and photonic crystals (Figure 2) have been successfully etched into LiNbO3 planar waveguide layers produced by proto exchange and by epitaxial growth on Lithium Tantalate (LiTaO3) substrates. Depths of up to 0.8 micron have been achieved with feature sizes of less than 200 nm.

The Bristol group have also been able to pattern the LiTaO3 substrate using such etching processes before the epitaxial growth of the LiNbO3 layer at Prof Pam Thomas' group in the Physics Department, Warwick University, who successfully produced buried photonic structures in these crystals.


For more information, please click here

Prof. Siyuan Yu.

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Graphene and Amaranthus Superparamagnets: Breakthrough nanoparticles discovery of Indian researcher September 23rd, 2014

New NIH/DOE Grant for Life Science Studies at NSLS-II: Funding will support operation of three powerful experimental stations designed to reveal detailed structures of proteins, viruses, and more September 23rd, 2014

BSA Distinguished Lecture Tuesday, 10/14: 'LCLS: A Stunning New View Through X-ray Laser Eyes' September 23rd, 2014

Brookhaven Lab's National Synchrotron Light Source II Approved to Start Routine Operations: Milestone marks transition to exciting new chapter September 23rd, 2014

Possible Futures

Air Force’s 30-year plan seeks 'strategic agility' August 1st, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Local girl does good March 22nd, 2014


Biosensors Get a Boost from Graphene Partnership: $5 Million Investment Supports Dozens of Jobs and Development of 300mm Fabrication Process and Wafer Transfer Facility September 18th, 2014

Malvern technology delivers Malvern reliability in multi-disciplinary lab at Queen Mary University London September 9th, 2014

State University of New York Trustees Unanimously Approve SUNY Polytechnic Institute (SUNY Poly) as New Name for Merged SUNY CNSE / SUNYIT September 9th, 2014

New Vice President Takes Helm at CNSE CMOST: Catherine Gilbert To Lead CNSE Children’s Museum of Science and Technology Through Expansion And Relocation August 29th, 2014


Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014


Southampton scientists grow a new challenger to graphene September 23rd, 2014

Engineers show light can play seesaw at the nanoscale: Discovery is another step toward faster and more energy-efficient optical devices for computation and communication September 22nd, 2014

Twisted graphene chills out: When two sheets of graphene are stacked in a special way, it is possible to cool down the graphene with a laser instead of heating it up, University of Manchester researchers have shown September 22nd, 2014

Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014

The latest news from around the world, FREE

  Premium Products
Only the news you want to read!
 Learn More
University Technology Transfer & Patents
 Learn More
Full-service, expert consulting
 Learn More

Nanotechnology Now Featured Books


The Hunger Project

© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE