Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm
Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm

Abstract:
Siyuan Yu, Professor in Photonics and Optical Communications
Department of Electrical & Electronic Engineering, University of Bristol

Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

UK | Posted on June 14th, 2010

The Photonics Group at the University of Bristol have used their OIPT System100 RIE100 ICP180 system to develop a high speed, high quality process for etching sub-micron features in Lithium Niobate (LiNbO3) and related materials. This work was motivated by the need to produce high aspect ratio, highly vertical features, such as photonic crystals, in LiNbO3.

LiNbO3 is a hard material to etch. Previously reported etch processes had limited dry etch rate of ~20 nm/min. Such slow etch rate was also typically associated with low selectivity over mask materials. Although the slow etch processes may be able to etch waveguides that does not require very vertical profiles, they require a long etch time. More importantly, they cannot be used to achieve photonic features with sizes approaching 100nm and requiring very smooth and vertical sidewall profiles to optimise their optical performance.

The Bristol group developed an optimised SF6-based chemistry on the RIE100/ICP180 system. The high density ICP plasma source enables etch rates of up to 200 nm/min, with vertical and smooth sidewalls. Ridge waveguides, gratings (Figure 1), and photonic crystals (Figure 2) have been successfully etched into LiNbO3 planar waveguide layers produced by proto exchange and by epitaxial growth on Lithium Tantalate (LiTaO3) substrates. Depths of up to 0.8 micron have been achieved with feature sizes of less than 200 nm.

The Bristol group have also been able to pattern the LiTaO3 substrate using such etching processes before the epitaxial growth of the LiNbO3 layer at Prof Pam Thomas' group in the Physics Department, Warwick University, who successfully produced buried photonic structures in these crystals.

####

For more information, please click here

Contacts:
Prof. Siyuan Yu.

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Dream Chip Technologies Presents First 22nm FD-SOI Silicon of New Automotive Driver Assistance SoC: Advanced driver assistance system (ADAS) computer vision SoC developed for European THINGS2DO project with working first silicon fabricated on GLOBALFOUNDRIES’ 22nm FD-SOI Platfor February 27th, 2017

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Possible Futures

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Atom-scale oxidation mechanism of nanoparticles helps develop anti-corrosion materials February 24th, 2017

Academic/Education

Nominations Invited for $250,000 Kabiller Prize in Nanoscience: Major international prize recognizes a visionary nanotechnology researcher February 20th, 2017

Oxford Nanoimaging report on how the Nanoimager, a desktop microscope delivering single molecule, super-resolution performance, is being applied at the MRC Centre for Molecular Bacteriology & Infection November 22nd, 2016

The University of Applied Sciences in Upper Austria uses Deben tensile stages as an integral part of their computed tomography research and testing facility October 18th, 2016

Enterprise In Space Partners with Sketchfab and 3D Hubs for NewSpace Education October 13th, 2016

Announcements

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

Dream Chip Technologies Presents First 22nm FD-SOI Silicon of New Automotive Driver Assistance SoC: Advanced driver assistance system (ADAS) computer vision SoC developed for European THINGS2DO project with working first silicon fabricated on GLOBALFOUNDRIES’ 22nm FD-SOI Platfor February 27th, 2017

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Photonics/Optics/Lasers

Nano 'sandwich' offers unique properties: Rice University researchers simulate two-dimensional hybrids for optoelectronics February 27th, 2017

'Lossless' metamaterial could boost efficiency of lasers and other light-based devices February 20th, 2017

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

Research opens door to smaller, cheaper, more agile communications tech February 16th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project