Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button

Home > Press > Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm
Grating etched into LiNbO3 planar waveguides. The etched air gap width is 388 nm and depth is about 800nm

Abstract:
Siyuan Yu, Professor in Photonics and Optical Communications
Department of Electrical & Electronic Engineering, University of Bristol

Photonic Structures Fabrication in LiNbO3 Crystals using the System100 ICP180

UK | Posted on June 14th, 2010

The Photonics Group at the University of Bristol have used their OIPT System100 RIE100 ICP180 system to develop a high speed, high quality process for etching sub-micron features in Lithium Niobate (LiNbO3) and related materials. This work was motivated by the need to produce high aspect ratio, highly vertical features, such as photonic crystals, in LiNbO3.

LiNbO3 is a hard material to etch. Previously reported etch processes had limited dry etch rate of ~20 nm/min. Such slow etch rate was also typically associated with low selectivity over mask materials. Although the slow etch processes may be able to etch waveguides that does not require very vertical profiles, they require a long etch time. More importantly, they cannot be used to achieve photonic features with sizes approaching 100nm and requiring very smooth and vertical sidewall profiles to optimise their optical performance.

The Bristol group developed an optimised SF6-based chemistry on the RIE100/ICP180 system. The high density ICP plasma source enables etch rates of up to 200 nm/min, with vertical and smooth sidewalls. Ridge waveguides, gratings (Figure 1), and photonic crystals (Figure 2) have been successfully etched into LiNbO3 planar waveguide layers produced by proto exchange and by epitaxial growth on Lithium Tantalate (LiTaO3) substrates. Depths of up to 0.8 micron have been achieved with feature sizes of less than 200 nm.

The Bristol group have also been able to pattern the LiTaO3 substrate using such etching processes before the epitaxial growth of the LiNbO3 layer at Prof Pam Thomas' group in the Physics Department, Warwick University, who successfully produced buried photonic structures in these crystals.

####

For more information, please click here

Contacts:
Prof. Siyuan Yu.

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Lehigh engineer discovers a high-speed nano-avalanche: New findings published in the Journal of Electrochemical Society about the process involving transformations in glass that occur under intense electrical and thermal conditions could lead the way to more energy-efficient glas August 24th, 2016

Light and matter merge in quantum coupling: Rice University physicists probe photon-electron interactions in vacuum cavity experiments August 24th, 2016

New microchip demonstrates efficiency and scalable design: Increased power and slashed energy consumption for data centers August 24th, 2016

Tunneling nanotubes between neurons enable the spread of Parkinson's disease via lysosomes August 24th, 2016

Possible Futures

Lehigh engineer discovers a high-speed nano-avalanche: New findings published in the Journal of Electrochemical Society about the process involving transformations in glass that occur under intense electrical and thermal conditions could lead the way to more energy-efficient glas August 24th, 2016

Light and matter merge in quantum coupling: Rice University physicists probe photon-electron interactions in vacuum cavity experiments August 24th, 2016

New microchip demonstrates efficiency and scalable design: Increased power and slashed energy consumption for data centers August 24th, 2016

Tunneling nanotubes between neurons enable the spread of Parkinson's disease via lysosomes August 24th, 2016

Academic/Education

Nanotech Security Featured by Simon Fraser University: Company's Anti-Counterfeiting Technology Developed With the Help of University's 4D LABS Materials Research Institute August 21st, 2016

W.M. Keck Foundation awards Cal State LA a $375,000 research and education grant August 4th, 2016

Thomas Swan and NGI announce unique partnership July 28th, 2016

The NanoWizardŽ AFM from JPK is applied for interdisciplinary research at the University of South Australia for applications including smart wound healing and how plants can protect themselves from toxins July 26th, 2016

Announcements

Lehigh engineer discovers a high-speed nano-avalanche: New findings published in the Journal of Electrochemical Society about the process involving transformations in glass that occur under intense electrical and thermal conditions could lead the way to more energy-efficient glas August 24th, 2016

Light and matter merge in quantum coupling: Rice University physicists probe photon-electron interactions in vacuum cavity experiments August 24th, 2016

New microchip demonstrates efficiency and scalable design: Increased power and slashed energy consumption for data centers August 24th, 2016

Tunneling nanotubes between neurons enable the spread of Parkinson's disease via lysosomes August 24th, 2016

Photonics/Optics/Lasers

New theory could lead to new generation of energy friendly optoelectronics: Researchers at Queen's University Belfast and ETH Zurich, Switzerland, have created a new theoretical framework which could help physicists and device engineers design better optoelectronics August 23rd, 2016

Hexagonal boron nitride semiconductors enable cost-effective detection of neutron signals: Texas Tech University researchers demonstrate hexagonal boron nitride semiconductors as a cost-effective alternative for inspecting overseas cargo containers entering US ports August 17th, 2016

Prototype chip could help make quantum computing practical: Built-in optics could enable chips that use trapped ions as quantum bits August 9th, 2016

Scientists discover light could exist in a previously unknown form August 6th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic