Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Industry Leaders at SEMATECH Litho Forum Expect EUV Lithography for Semiconductor Manufacturing in 2014

Abstract:
Industry collaboration is required to tackle business and technical challenges facing lithography

Industry Leaders at SEMATECH Litho Forum Expect EUV Lithography for Semiconductor Manufacturing in 2014

New York, NY | Posted on May 24th, 2010

At SEMATECH's Litho Forum, May 10-12, semiconductor business leaders and technology experts gained valuable insight on the industry's perceptions about and intentions for lithography development.

The Forum, a three-day gathering of global lithography experts, featured an impressive line-up of senior executives and technical experts in the semiconductor industry who shared perspectives on why collaboration is imperative for semiconductor innovation and what challenges the development of next-generation technologies must tackle to make lithography successful.

"The fundamental enabler of the industry is improving the cost per function," said Dan Armbrust, president and CEO of SEMATECH. "For the industry to evolve, business models need to take into account collaborations to control costs and extend current technologies while building the infrastructure for future solutions."

"Lithography is the backbone of the semiconductor industry, and it will be a driving force for future application opportunities and business growth," said Bryan Rice, director of Lithography at SEMATECH. "The resulting information and guidance from this year's Forum will be invaluable in helping SEMATECH members extend current technologies, build infrastructure for emerging ones, and overcome the technical and cost challenges of next-generation lithography."

Key highlights of the Forum included the following:

o Keynote speaker Gary Patton of IBM focused on the need for industry collaboration and innovation to continue the roadmap forward and pointed to SEMATECH's collaboration on EUV infrastructure as a good example of the type of collaborative innovation to make EUV happen.

o Presenters from IBM, TSMC, Tokyo Electron Limited, and GLOBALFOUNDRIES reviewed the current state of lithography and activities supporting lithography options, including EUV insertion, mask inspection challenges, double patterning process development, multiple e-beam decisions for 22 nm and sub-22 nm, and overall tool readiness.

o Equipment and material suppliers emphasized that the overall development costs and risk reduction must be secured by ensuring that development progresses at a pace compatible with the EUV mask and resist infrastructure.

Additionally, more than 130 attendees were surveyed on their plans and preferences on lithographic approaches for future manufacturing. Key survey results included the following:

o As identified at previous Forums, 193 nm immersion double patterning continues to be the suitable lithographic technology for volume manufacturing in 2012.

o While some manufacturers will use the technology sooner, EUV would be capable of being placed into manufacturing in 2014, with extendibility into manufacturing in 2016.

o For immersion double patterning, cost of ownership, overlay capability, and extendibility to the next-generation device are still the top challenges.

o For EUV technology, mask defects, source power, exposure tool throughput, and cost of ownership were rated the top challenges.

o 193 nm and EUV were chosen as the technologies that would be considered for manufacturing at the 32 nm node or beyond.

With an industry cycle of about two years per lithography node, SEMATECH's biennial Litho Forum provides an opportunity for lithography users and suppliers to evaluate the progress of various technology options. The previous Forums helped coordinate industry consensus on the 32 nm half-pitch generation and beyond.

####

About SEMATECH
For over 20 years, SEMATECH® (www.sematech.org), the international consortium of leading semiconductor manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
257 Fuller Road | Suite 2200 | Albany, NY | 12203
o: 518-649-1041
m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nano Ruffles in Brain Matter: Freiburg researchers decipher the role of nanostructures around brain cells in central nervous system function October 31st, 2014

Gold nanoparticle chains confine light to the nanoscale October 31st, 2014

'Nanomotor lithography' answers call for affordable, simpler device manufacturing October 31st, 2014

Device invented at Johns Hopkins provides up-close look at cancer on the move: Microscopic view of metastasis could give insight about how to keep cancer in check October 31st, 2014

Chip Technology

Sussex physicists find simple solution for quantum technology challenge October 28th, 2014

Watching the hidden life of materials: Ultrafast electron diffraction experiments open a new window on the microscopic world October 27th, 2014

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

QuantumWise guides the semiconductor industry towards the atomic scale October 24th, 2014

Nanoelectronics

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

Materials for the next generation of electronics and photovoltaics: MacArthur Fellow develops new uses for carbon nanotubes October 21st, 2014

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

Announcements

Nano Ruffles in Brain Matter: Freiburg researchers decipher the role of nanostructures around brain cells in central nervous system function October 31st, 2014

Gold nanoparticle chains confine light to the nanoscale October 31st, 2014

'Nanomotor lithography' answers call for affordable, simpler device manufacturing October 31st, 2014

Device invented at Johns Hopkins provides up-close look at cancer on the move: Microscopic view of metastasis could give insight about how to keep cancer in check October 31st, 2014

Events/Classes

New Compact SIMS at 61st AVS | Visit us on Booth 311 October 28th, 2014

Iran to Hold 3rd Int'l Engineering Materials, Metallurgy Conference October 25th, 2014

Iran-Made Respiratory Nano Masks Provided to Hajj Pilgrims October 23rd, 2014

MEMS & Sensors Technology Showcase: Finalists Announced for MEMS Executive Congress US 2014 October 23rd, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE